Linear Motion System - Linear Stage


Scanning / Smooth Continuous Movement: Fit

Step and Settle: Good Fit

No Movement on Power Loss: Good Fit

Aperture / Open Center: N/A

Precision: Good Fit

Throughput: Fit

ALIO - Linear Motion Stages - VBS Ball Screw_Torque Motor_Cross Roller Bearings X

Product Specifications

StageLinear Stage
Travel150 mm (+/- 75 mm)
(Length x Width x Height)
370 mm x 120 mm x 50 mm
Brake OptionsStandard: No Brake

Optional: Pneumatic Release, Spring Engage Brake (-PBRK)

Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
Dimensions (Length x Width x Height)
404 mm x 120 mm x 50 mm
Dimensions (Length x Width x Height)
452 mm x 120 mm x 50 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsCrossed Roller Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6

Optional: Clean Room and Vacuum (10-6 Torr)
0°C to 50°C
Humidity10% to 80% Non-Condensing
Specifications [1]
Displacement Accuracy
 +/- 3 µm +/- 1.0 µm +/- 0.4 µm
Backlash0 nm
Linear Repeatability
 +/- 100 nm
ResolutionStandard: ~4.88 nm after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness +/- 3.5 µm +/- 2.5 µm +/- 1.5 µm
Flatness [2] +/- 4.0 µm +/- 2.0 µm
Pitch [2]+/- 15 arc-sec
Yaw+/- 15 arc-sec
Roll+/- 15 arc-sec
Max Velocity
0.3 m/s
Max Peak
Acceleration [3]
1.0 G
Max Payload

W/ Axis Oriented Horizontal
25 kg
Max Payload

W/ Axis Oriented Vertical
12 kg
Assembly Mass4.6 kg

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