Z-Lift & Vertical Stage - Vertical Z Stage


Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: Fit

Precision: Best Fit

Throughput: Good Fit

ALIO - Z-Lift Stages - NanoZ Dual Voice Coil with air bearings

Product Specifications

Travel24 mm (+ 24 mm/- 0 mm) 
Dimensions (Diameter x Height)200 mm x 112 mm
StageVertical Z Stage
MotorDual Voice Coil Motor (VC)
FeedbackDual Non-Contact Optical Linear Encoder
BearingsAir Bearings
CounterbalancePneumatic Cylinder
CablesHigh Flex, 10M Cycle, 3m Length
StructureAnodized Aluminum 6061-T6
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1]Depending on specific application - Ask ALIO
Max Velocity0.2 m/s
Max Acceleration0.5 G
Assembly Mass6.5 kg
Max Payload20 kg

Contact ALIO.

Want to learn more about the services we offer?