| Model | AI-VC-600-Z-SCB-ATRAK |
| Stage | Vertical Z Stage |
| Travel | 6 mm (+/- 3 mm) |
| Dimensions (Length x Width x Height) | 73.6 mm x 60 mm x 59 mm |
| Drive | Voice Coil Motor (VC) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Crossed Roller Bearings |
| Counterbalance | Spring Counterbalance |
| Cables | High Flex, 10M Cycle, 3m Length |
| Structure | Anodized Aluminum 6061-T6 |
| Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Linear Displacement Accuracy | +/- 2.0 µm |
| Bidirectional Linear Repeatability | +/- 75 nm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
| Straightness In X | +/- 5 µm |
| Flatness [2] | +/- 5 µm |
| Max Payload Capability | 350 g |
| Force | 15 N |
| Assembly Mass | 620 g |
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