Z-Lift & Vertical Stage - Vertical Z Stage

AI-VC-600-Z-SCB-ATRAK

Scanning / Smooth Continuous Movement: Best Fit

Step and Settle: Best Fit

No Movement on Power Loss: N/A

Aperture / Open Center: N/A

Precision: Best Fit

Throughput: Good Fit

Product Specifications

ModelAI-VC-600-Z-SCB-ATRAK
StageVertical Z Stage
Travel6 mm (+/- 3 mm)
Dimensions
(Length x Width x Height)
73.6 mm x 60 mm x 59
mm
DriveVoice Coil Motor (VC)
FeedbackNon-Contact Optical
Linear Encoder
BearingsCrossed Roller
Bearings
CounterbalanceSpring Counterbalance
CablesHigh Flex, 10M Cycle,
3m Length
StructureAnodized Aluminum
6061-T6
EnvironmentAmbient

Optional: Clean Room and Vacuum (10-6 Torr)
Operating
Temperature
0°C to 50°C
Humidity10% to 80%
Non-Condensing
Performance Specifications [1]
Linear
Displacement Accuracy
 +/- 2.0 µm
Bidirectional
Linear Repeatability
 +/- 75 nm
ResolutionStandard: ~4.88 nm
after 4096 Interpolation

Optional: Digital AQB (1 nm - 5000 nm)
Straightness
In X
 +/- 5 µm
Flatness [2] +/- 5 µm
Max Payload
Capability
350 g
Force15 N
Assembly Mass620 g

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