Micron 2 (µII) Stage - Linear Stage

AI-XBS-35000-UII

Scanning / Smooth Continuous Movement: N/A

Step and Settle: Fit

No Movement on Power Loss: Best Fit

Aperture / Open Center: N/A

Precision: Fit

Throughput: Best Fit

micron II Linear Motion - XBS Ball Screw_Torque Motor_Ball Rail X

Product Specifications

ModelAI-XBS-35000-UII
StageLinear Stage
Travel350 mm (+/- 175 mm)
Dimensions (Length x Width x Height)713 mm x 388 mm x 100 mm
Brake OptionsStandard: No Brake Included
Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)758 mm x 388 mm x 100 mm
DriveFrameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
FeedbackNon-Contact Optical Linear Encoder
BearingsDual Recirculating Ball Rail Bearings
CablesHigh Flex, 10M Cycle, 3m
StructureAnodized Aluminum 6061-T6
EnvironmentAmbient
Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature0°C to 50°C
Humidity10% to 80% Non-Condensing
Performance Specifications [1](STD)ULTRA
Linear Displacement Accuracy +/- 16 µm +/- 2 µm
Backlash0 nm
Bidirectional Repeatability +/- 1.0 µm
ResolutionStandard: ~4.88 nm after 4096 Interpolation
Optional: Digital AQB (1 nm - 5000 nm) 
Straightness In Y +/- 5 µm +/- 3 µm
Flatness [2] +/- 5 µm +/- 3 µm
Pitch [2] +/- 18 arc-sec
Yaw +/- 18 arc-sec
Roll +/- 18 arc-sec
Max Velocity [3]0.3 m/s
Max Peak Acceleration [3]0.5 G
Max Payload Capability With Axis Oriented Horizontally150 kg
Max Payload Capability With Axis Oriented Vertically80 kg
Assembly Mass32 kg

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