Model	AI-VC-600-Z-SCB-ATRAK
Stage	Vertical Z Stage
Travel	6 mm (+/- 3 mm)
Dimensions (Length x Width x Height)	73.6 mm x 60 mm x 59 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Spring Counterbalance
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Linear Displacement Accuracy	+/- 2.0 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 5 µm
Flatness [2]	+/- 5 µm
Max Payload Capability	350 g
Force	15 N
Assembly Mass	620 g

Model	AI-LM-20000-Z-ABCB
Stage	Vertical Z Stage
Travel	200mm (+/- 100mm)
Dimensions (Length x Width x Height)	230mm x 50mm x 484mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 3.0 µm	+/- 2.0 µm	+/- 1.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	25 kg
Assembly Mass	9.3 kg

Model	AI-LM-15000-Z-ABCB-HF
Stage	Vertical Z Stage
Travel	150mm (+/- 75mm)
Dimensions (Length x Width x Height)	215mm x 50mm x 353mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	4.0 G
Max Payload Capability	25 kg
Assembly Mass	6.5 kg

Model	AI-LM-15000-Z-ABCB
Stage	Vertical Z Stage
Travel	150mm (+/- 75mm)
Dimensions (Length x Width x Height)	200mm x 50mm x 353mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	25 kg
Assembly Mass	5.6 kg

Model	AI-LM-10000-Z-ABCB-HF
Stage	Vertical Z Stage
Travel	100mm (+/- 50mm)
Dimensions (Length x Width x Height)	215mm x 50mm x 323mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	4.5 G
Max Payload Capability	25 kg
Assembly Mass	5.9 kg

Model	AI-LM-10000-Z-ABCB
Stage	Vertical Z Stage
Travel	100mm (+/- 50mm)
Dimensions (Length x Width x Height)	183.5mm x 50mm x 323mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	3.5 G
Max Payload Capability	12 kg
Assembly Mass	4.7 kg

Model	AI-LM-6000-Z-ABCB
Stage	Vertical Z Stage
Travel	60mm (+/- 30mm)
Dimensions (Length x Width x Height)	183.5mm x 45mm x 220mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	10 kg
Assembly Mass	2.9 kg

Model	AI-BSD-5000-Z
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	175 mm x 100 mm 229 mm
Motor	Frameless Torque Motor, Precision Ball Screw
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Brake	Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake
Counterbalance	Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 125 nm		+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.1 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Max Payload Capability (With Pneuboost)	50 kg
Assembly Mass	7.6 kg

Model	AI-BSD-3200-Z
Stage	Vertical Z Stage
Travel	32 mm (+/- 16 mm)
Dimensions (Length x Width x Height)	175 mm x 100 mm x 202 mm
Motor	Frameless Torque Motor, Precision Ball Screw
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Brake	Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake
Counterbalance	Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 125 nm		+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.1 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Max Payload Capability (With Pneuboost)	50 kg
Assembly Mass	6.9 kg

Model	AI-BSD-2400-Z
Stage	Vertical Z Stage
Travel	24 mm (+/- 12 mm)
Dimensions (Length x Width x Height)	175 mm x 100 mm x 188 mm
Motor	Frameless Torque Motor, Precision Ball Screw
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Brake	Standard: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: No Brake
Counterbalance	Standard: None Needed Optional: Pneumatic Counterbalance to Increase Payload Capability
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.8 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 125 nm		+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2 µm	+/- 0.8 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.1 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Max Payload Capability (With Pneuboost)	50 kg
Assembly Mass	6.6 kg

Model	AI-LM-17000-("PAYLOAD")-Z-MCB-BASE
Stage	Vertical Z Stage
Travel	170 mm (+/- 85 mm)
Payload Options	20 N, 30 N, 40 N, 50 N, or 60 N
Dimensions (Length x Width x Height)	262 mm x 50 mm x 340 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 5 µm		+/- 2.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm		+/- 2.0 µm		+/- 1.5 µm
Flatness [2]	+/- 5.0 µm		+/- 2.0 µm		+/- 1.5 µm
Pitch	18 arc-sec
Yaw	18 arc-sec
Roll	18 arc-sec
Max Velocity [3]	1 m/s
Max Acceleration [3]	2.0 G
Payload (Nominal)	20 N	30 N	40 N	50 N	60 N
Minimum To Maximum Payload Range	15-25 N	25-35 N	35-45 N	45-55 N	55-65 N
Assembly Mass	13.8 kg

Model	AI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION")
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Payload Options	30 N, 50 N, 60 N, 70 N, 80 N, or 90 N
Dimensions (Length x Width x Height)	182 mm x 106 mm x 176 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 7 µm		+/- 1.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 100 nm				+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 6.0 µm		+/- 3.0 µm
Flatness [2]	+/- 6.0 µm		+/- 3.0 µm
Pitch	15 arc-sec
Yaw	15 arc-sec
Roll	15 arc-sec
Max Velocity [3]	0.05 m/s
Payload (Nominal)	30 N, 50 N, 60 N, 70 N, 80 N, or 90 N	50 N	60 N	70 N	80 N	90 N
Minimum To Maximum Payload Range	24-36 N	44-56 N	54-66 N	64-76 N	74-86 N	84-96 N
Assembly Mass	7.1 kg
Moving Mass	3.3 kg

Model	AI-LM-5000-("PAYLOAD")-Z-MCB-("ORIENTATION")
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Payload Options	2 N, 8 N, 14 N, 19 N, or 24 N
Dimensions (Length x Width x Height)	165 mm x 96 mm x 156 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 7 µm		+/- 1.0 µm		+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 5.0 µm		+/- 2.5 µm
Flatness [2]	+/- 5.0 µm		+/- 2.5 µm
Pitch	14 arc-sec
Yaw	14 arc-sec
Roll	14 arc-sec
Max Velocity [3]	0.1 m/s
Payload (Nominal)	--	2 N	8 N	14 N	19 N	24 N
Minimum To Maximum Payload Range	--	0-6 N	4-12 N	10-18 N	15-23 N	18-30 N
Assembly Mass	5.2 kg
Moving Mass	2.1 kg

Model	AI-LM-2400-("PAYLOAD")-Z-MCB-("ORIENTATION")
Stage	Vertical Z Stage
Travel	24 mm (+/-12 mm)
Payload Options	2 N, 8 N, 14 N, 19 N, or 24 N
Dimensions (Length x Width x Height)	165 mm x 96 mm x 130 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)		ULTRA		NANO
Linear Displacement Accuracy	+/- 5 µm		+/- 0.7 µm		+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 75 nm				+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm		+/- 2.0 µm
Flatness [2]	+/- 3.0 µm		+/- 2.0 µm
Pitch	10 arc-sec
Yaw	10 arc-sec
Roll	10 arc-sec
Max Velocity [3]	0.1 m/s
Payload (Nominal)	--	2 N	8 N	14 N	19 N	24 N
Minimum To Maximum Payload Range	--	0-6 N	4-12 N	10-18 N	15-23 N	18-30 N
Assembly Mass	4.6 kg
Moving Mass	2 kg

Model	AI-VC-600-Z-SCB
Stage	Vertical Z Stage
Travel	6 mm (+/- 3 mm)
Dimensions (Length x Width x Height)	80 mm x 60 mm x 70 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Spring Counterbalance
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	Depending on specific Application - Ask ALIO
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	4.0 G
Max Payload Capability	2.5 kg
Assembly Mass	0.9 kg

Model	AI-LM-2500-Z-MCB-15N
Stage	Vertical Z Stage
Travel	25 mm (+/- 12.5 mm)
Dimensions (Length x Width x Height)	56 mm x 88 mm x 144 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	Depending on specific Application - Ask ALIO
Max Payload [6]	15N
Payload Range [6]	7.5 - 15 N
Max Velocity	0.1 m/s
Max Acceleration	0.5 G
Assembly Mass	1.9 kg

Model	AI-LM-2500-Z-MCB-7N
Stage	Vertical Z Stage
Travel	25 mm (+/- 12.5 mm)
Dimensions (Length x Width x Height)	56 mm x 88 mm x 144 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	Depending on specific Application - Ask ALIO
Max Payload [6]	7.5 N
Payload Range [6]	2.5 - 7.5 N
Max Velocity	0.1 m/s
Max Acceleration	0.5 G
Assembly Mass	1.9 kg

Model	AI-LM-2500-Z-MCB-2N
Stage	Vertical Z Stage
Travel	25 mm (+/- 12.5 mm)
Dimensions (Length x Width x Height)	56 mm x 88 mm x 144 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6 Optional: Stainless Steel
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	Depending on specific Application - Ask ALIO
Max Payload [6]	2.5 N
Payload Range [6]	0 - 2.5 N
Max Velocity	0.1 m/s
Max Acceleration	0.5 G
Assembly Mass	1.9 kg

Model	AI-VC-2400-NANO-Z-CB
Travel	24 mm (+ 24 mm/- 0 mm)
Dimensions (Diameter x Height)	200 mm x 112 mm
Stage	Vertical Z Stage
Motor	Dual Voice Coil Motor (VC)
Feedback	Dual Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.8 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 0.8 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm	+/- 0.4 µm
Pitch	+/- 10 arc-sec
Yaw	+/- 10 arc-sec
Roll	+/- 10 arc-sec
Max Velocity	0.2 m/s
Max Acceleration	0.5 G
Assembly Mass	6.5 kg
Max Payload	20 kg

Model	AI-LM-7000-50N-Z-CB
Stage	Vertical Z Stage
Travel	70 mm (+ 70 mm/- 0 mm)
Dimensions (Length x Width x Height)	175 mm x 125 mm x 250 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.25 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	30 kg
Force	50 N
Assembly Mass	13.0 kg

Model	AI-LM-6000-50N-Z-CB
Stage	Vertical Z Stage
Travel	60 mm (+ 60 mm/- 0 mm)
Dimensions (Length x Width x Height)	175 mm x 125 mm x 235 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 12 arc-sec
Yaw	+/- 12 arc-sec
Roll	+/- 12 arc-sec
Max Velocity [3]	0.25 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Force	50 N
Assembly Mass	12.3 kg

Model	AI-VC-2400-120N-Z-CB
Stage	Vertical Z Stage
Travel	24 mm (+ 24 mm/- 0 mm)
Dimensions (Length x Width x Height)	175 mm x 125 mm x 170 mm
Motor	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.8 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2 µm	+/- 0.8 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 10 arc-sec
Yaw	+/- 10 arc-sec
Roll	+/- 10 arc-sec
Max Velocity [3]	0.25 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	16 kg
Force	120 N
Assembly Mass	8.0 kg

Model	AI-LM-5000-15N-Z-CB
Stage	Vertical Z Stage
Travel	50 mm (+/- 25 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 136 mm
Drive	Direct Drive Ironless Core Linear Motor
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 8.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 5.0 µm	+/- 2.5 µm
Flatness [2]	+/- 5.0 µm	+/- 2.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Max Velocity [3]	0.2 m/s
Max Peak Acceleration [3]	1.5 G
Max Payload Capability	10 kg
Force	15 N
Assembly Mass	4.4 kg

Model	AI-LM-3000-47N-Z-CB
Stage	Vertical Z Stage
Travel	30 mm (+/- 15 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 136 mm
Drive	Direct Drive Ironless Core Linear Motor
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6.0 µm	+/- 0.8 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 4.0 µm	+/- 2.0 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 10.0  arc-sec
Yaw	+/- 10.0  arc-sec
Roll	+/- 10.0  arc-sec
Max Velocity [3]	0.2 m/s
Max Peak Acceleration [3]	3.0 G
Max Payload Capability	10 kg
Force	47 N
Assembly Mass	4.4 kg

Model	AI-VC-2400-11N-Z-CB
Stage	Vertical Z Stage
Travel	24 mm (+/- 12 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 98 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 3.0 µm	+/- 2.0 µm
Flatness [2]	+/- 3.0 µm	+/- 2.0 µm
Pitch [2]	+/- 10.0  arc-sec
Yaw	+/- 10.0  arc-sec
Roll	+/- 10.0  arc-sec
Max Velocity [3]	0.1 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability	10 kg
Force	11 N
Assembly Mass	3.6 kg

Model	AI-VC-600-24N-Z-CB
Stage	Vertical Z Stage
Travel	6 mm (+/- 3 mm)
Dimensions (Length x Width x Height)	165 mm x 96 mm x 98 mm
Drive	Voice Coil Motor (VC)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In X	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 1.5 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0  arc-sec
Yaw	+/- 10.0  arc-sec
Roll	+/- 10.0  arc-sec
Max Velocity [3]	0.1 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	10 kg
Force	24 N
Assembly Mass	3.6 kg