Rotary Motion Systems

ALIO Industries offers a range of precision rotary stages that are designed to meet the most demanding applications. Our standard rotary stage family uses crossed roller bearings and frameless torque motors to provide extreme throughput, acceleration, and mass capabilities while maintaining nanometer-level precision. These rotary stages are also highly stiff and can handle offset loads with ease.

Our crossed roller bearing rotary stages have +/-0.2 arc-second repeatability and are rated at 13 to 20 microns of radial and axial run-out. Some models even offer run-outs below 5 microns. We also offer mechanical bearing rotary stages in different sizes to meet varying duty cycles, mass, and acceleration needs, ranging from 80 mm to 300 mm in diameter. For mounting a vacuum chuck, vacuum rotary union options are available on the inner diameter.

Explore ALIO’s range of crossed roller bearing and mechanical bearing rotary stages to find the perfect solution for your rotary motion system needs.

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Crossed Roller Bearing Rotary: AI-TM-(DIAMETER)R

ALIO Industries offers mechanical bearing rotary stages with angular contact bearings to meet the requirements of applications that demand a compact and flat rotary stage with a decent aperture size. With torque motors, these stages enable a smooth continuous movement or a step-and-settle process over the full 360 degrees, without compromising precision or throughput. The stages are highly versatile and suitable for various industries and applications.

To know more about this family of stages, check out the spec sheet.

360 degree Angular Contact Bearing Stages: AI-TM-(DIAMETER)RA

ALIO Industries offers a line of air bearing rotary stages for manufacturers that require the highest rotational precision. These stages move without mechanical contact, resulting in frictionless and wear-free movement. ALIO’s air bearing rotary stages can minimize errors such as wobble, eccentricity, or runout to achieve near-perfect, smooth 360-degree movement even at high speeds or when mounted vertically. Equipped with powerful torque motors, these stages can perform both constant continuous rotation and step-and-settle processes with equal precision and reliability.

It’s no wonder that ALIO’s air bearing rotary stages are commonly used in highly precise applications within the semiconductor, metrology, and photonics industries. For detailed specifications, download the following spec sheets:

Rotational Air Bearing Stages: AI-TM-(DIAMETER)R-AB

Large Rotational Air Bearing Stages: AI-TM-(DIAMETER)R-AB

ALIO Industries offers industry-leading torque ratings with its two-axis gimbal rotary systems, delivering high rotational speeds without sacrificing precision. The systems can be customized for each customer’s mass, with variable counterbalance, cable guidance, and cable and air feed-through capabilities. The dual-axis rotary systems allow for +/-110 and +/-170 degrees of rotation on the horizontal axis, while exhibiting angular travel +/-180 degrees for rotation about the vertical axis. An air purge is incorporated to protect against contamination and maximize lifespan.

ALIO’s 2-axis gimbal rotary systems have been utilized in a range of industries, including metrology, laser processing, and additive manufacturing. For more detailed specifications, please refer to the spec sheet.

2 Axis Gimbal