Crossed Roller Bearing Rotary Stages

ALIO’s mechanical bearing rotary stages have been designed with crossed roller bearings for improved stiffness for offset loads and rotational precision. Integrated with servo torque frameless motors, these stages can handle applications where the mass and acceleration needs are extreme, while still maintaining nanometer-level precision performance.

Standard ALIO rotary stages have 0.2 arc-second repeatability. Standard mechanical crossed roller bearings are rated at 13 to 20 microns of radial and axial run-out, with optional run-outs of certain models below 5 microns. The mechanical bearing rotary stage family has multiple motor sizes to meet duty cycles as well as mass and acceleration needs from 80 mm to 300 mm in diameter. Vacuum rotary union options are available on the inner diameter for mounting a vacuum chuck.

360 Degree Angular Contact Bearing Stages

ALIO has designed mechanical bearing rotary stages with angular contact bearings representing the most compact design on the market. Integrated with servo ironless motors, these stages best fit metrology applications where small angular adjustment is needed with nanometer-level precision performance.

Rotational Air Bearing Stages

When ultra-tight run-out precision motion is needed, manufacturers can choose from ALIO’s continually growing line of air bearing rotary stages. Whether it is exceptional stiffness or cost-effective motion that is the priority, ALIO Industries can offer a variety of options to meet the needs of today’s nanometer-level -precision applications.

2 Axis Gimbal

Incorporating ALIO’s industry-leading torque ratings, out two-axis gimbal rotary systems are capable of high rotational speeds while maintaining the stand-out precision levels expected from ALIO’s systems. Metrology, laser processing, additive manufacturing, and many other industry sectors have benefited from these ALIO products., and air purge is incorporated for contaminant protection and longer life.  Internal cable and air- line routing provide an extremely clean finished product.

ALIO’s two-axis systems are designed around the customers’ mass with variable counterbalance, cable guidance, and cable and air feed-through capabilities.  With hard-stops allowing for ± 110 and ± 170 degrees of rotation for nearly unlimited part access on the horizontal axis, ALIO’s dual axis rotary systems exhibit angular travel ± 180 for the rotation about the vertical axis.

Open-Center Rotary Stages

ALIO’s large open-center rotary stages utilize a tangential linear direct drive with angular contact (duplex pair)
bearings. This low-profile design is suitable for high-throughput
applications requiring up to +/- 7.5 degree angular movement and an extreme aperture for maximum accessibility from both sides.

Precision Crossed Roller Bearing Linear Stages

ALIO’ Nano Precision XY Monolithic product is a 3-plate system with unmatched 6-D performance.  With years of testing, continuous design improvement, and unique manufacturing protocols, the ALIO precision crossed roller bearing stages have no equal for quality and performance. Our linear stage product family begin with 25 mm travel and go up to 400 mm of travel with motor and encoder options to fit your application needs.

Monolithic XY Linear System

ALIO’s XY monolithic True Nano® motion systems performance is unequaled for 6-D Nano Precision®. With nanometer straightness and flatness you can be assured that your point precision is True Nano®. This stage family comes with enclosed or open center versions from 50mm travel to 450mm travel. Standard axis bi-directional repeatability is less than 50 nanometers with optional 10 nanometers bi-directional repeatability for demanding metrology or manufacturing needs. Stages can come with NIST traceable data assuring nano precision not just marketing data sheet optimism.

Linear CM Servo Motor

ALIO produces CM linear servo stages for customers that need less costly True Nano® precision. CM servo motor stages still have the ALIO 6-D precision with less linear force for smaller and lower acceleration applications. The stage family uses the precision anti-skid bearings common to all other ALIO mechanical bearing products with the same 25 mm to 400 mm travel ranges.

Standard Hybrid Hexapod

ALIO’s Hybrid Hexapod® ALIO’s new, patented approach to six DoF hexapod positioning, resulting in nano-level accuracy at any working point. This makes this a unique design ideal for automated application in Photonics, Microassembly, Laser Processing or Metrology – literally any application requiring 6- degrees of freedom positioning with nanometer/arc-sec levels of incremental motion and repeatability is a good fit for this product where product sensor resolution improvements are driving the need for higher precision. It is proven, that this point-precision design is two orders of magnitude more precise than any competitive hexapod built today.As other competitive hexapods use six links to accomplish even a single DoF movement. Position errors add in this arrangement.

The modular design makes it scalable from coffee cup size to meters in height with dozens of kilograms payload, working in atmosphere or high vacuum, all with 6-D precision.

MINI Hybrid Hexapod

ALIO’s MINI Hybrid Hexapod® is ideal for automated lens alignment/bonding to CCD arrays. It has been helpful in building camera array modules, translational OIS, telescopic integrated lenses for miniature cameras used in every day products like cell phone cameras and drones. Any application requiring 6- degrees of freedom positioning with nanometer/arc-sec levels of incremental motion and repeatability is a good fit for this product where product sensor resolution improvements are driving the need for higher precision.

AngularesTM – Extra large Tip/Tilt Range Hexapod

The 60-degree tip/tilt travel of the AngularesTM Hybrid Hexapod® is by far the most angular travel range available from any 6-Degree-Of-Freedom (6-DOF) positioner on the market. It is perfectly suited for applications including aspheric and freeform optical metrology, silicon photonics packaging and probing, laser micro processing (non-planar substrates and taper control), wafer metrology, camera module alignment and assembly, sensor/image stabilization testing, and optical element and fiber alignment.

The AngularesTM  is capable of unlimited XY travel, Z travel for 62 mm which can be increased to 208 mm using other tripod models, tip/tilt travel of 60 degrees (+/- 30 degrees) with continuous 360 degree Theta-Z, XYZ bidirectional repeatability of less than +/- 0.6 arc-seconds, velocity up to 100 mm/second XY and Z, and less than 10 nanometers linear and 0.1 arc-seconds angular minimum incremental motion.

Special Task Hybrid Hexapods

ALIO’s modular and versatile Hybrid Hexapod® concept allows various adaptions and customization towards our customer needs. Such can range from applications with several dozens of kg load and high force requirements to totally novel design with large apertures.

High Angle Tripods

ALIO’s modular designs allow the use of high precision Tripods for applications requiring high angular movements without the need of purchasing a full six axes system. Depending on the specific type and configurations, rotational movements around the x and y axis of up to +/- 30 degree, and 360 degree around the z axis are possible. Of course, all with Nano Precision.