| Model | AI-LM-60000-AB8 | ||
| Stage | Air Bearing Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 981.2 mm x 196.85 mm x 75.90 mm |
||
| Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) |
||
| Feedback | Non-Contact Optical Linear Encoder |
||
| Bearings | Air Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
| Structure | Anodized Aluminum 6061-T6 | ||
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
| Environment | Ambient | ||
| Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
| Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 1 µm per 100mm Travel | ||
| Flatness [2] | +/- 1 µm per 100mm Travel | ||
| Pitch | +/- 5 arc-sec | ||
| Yaw | +/- 5 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max Pitch Moment | 79 nm | ||
| Max Roll Moment | 75 nm | ||
| Max Yaw Moment | 37 nm | ||
| Vertical Z Stiffness | 480 N/µm | ||
| Horizontal Y Stiffness | 140 N/µm | ||
| Max Payload Capacity | 60 kg | ||
| Assembly Mass | 20 kg | ||
| Model | AI-LM-60000-AB |
| Stage | Air Bearing Linear Stage |
| Travel | 600 mm (+/- 300 mm) |
| Dimensions (Length x Width x Height) | 828.8 mm x 150 mm x 63.8 mm |
| Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
| Drive | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
| Environment | Ambient |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
| Max Pitch Moment [2] | 20 Nm |
| Max Roll Moment [2] | 24 Nm |
| Max Yaw Moment [2] | 10 Nm |
| Vertical Z Stiffness | 250 N/µm |
| Horizontal Y Stiffness | 105 N/µm |
| Max Velocity [3] | 2.0 m/s |
| Max Acceleration [3] | 2.0 G |
| Max Load Capacity | 30 kg |
| Assembly Mass | 11.7 kg |
| Model | AI-LM-60000-ABL |
| Stage | XY Planar Air Bearing Stage |
| Travel - XY | 600 mm (+/- 300 mm) |
| Optional Travel - Yaw Compliance | Optional: +/- 0.1 deg |
| Dimensions (Length x Width x Height) | 1650 mm x 1200 mm x 145 mm |
| Dimensions Moving Plate (Length x Width) | 404 mm x 423.4 mm |
| Drives | Direct Drive (Ironless Core Linear Motor) |
| Feedback | Non-Contact Optical Linear Encoder |
| Bearings | Air Bearings |
| Cables | High Flex, 10M Cycle, Trackless Cable Routing Optional: Customer/Payload Cable Routing Available |
| Structure | Anodized Aluminum 6061-T6 |
| Base Structure | Precision Lapped Black Granite |
| Environment | Ambient Optional: Clean Room |
| Operating Temperature | 0°C to 50°C |
| Humidity | 10% to 80% Non-Condensing |
| Performance Specifications [1] | #colspan# |
| Accuracy | < +/- 0.5 µm |
| Repeatability | < +/- 100 nm |
| Straightness | < +/- 0.5 µm |
| Flatness | < +/- 1 µm |
| Max Velocity | > 1 m/s |
| Max Acceleration | > 1 G |
| Load Capacity | 20 kg Optional: 80+ kg |
| Assembly Mass | Depending on specific Configuration - Ask ALIO |
| Configurable Options | #colspan# |
| ALIO's Planar Air Bearing Stage is Designed to be Easily Customizable to Meet Customer Specific Requirements | Custom Plate L x W x H |
| Custom X and/or Y Travel | |
| Custom User Mounting Interface Features | |
| Custom Platen Designs (Open Center Options) | |
| Custom Compact Designs for Small Footprint | |
| Customer Cable Routing | |
| Customizable Motor Forces | |
| Custom High Payload Options | |
| Custom Granite Features and Sizes | |
| Various Material Options Throughout | |
| Single Axis Versions Available (Y Axis Only) | |
| Various Support and Vibration Isolation Options | |
| Various Safety System Options | |
| Various Control Chassis Options |
| Model | AI-LM-70000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 1000 mm x 1207 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 834 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 28 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 10 µm | +/- 4 µm | |
| Flatness [2] | +/- 20 µm | +/- 8 µm | |
| Pitch | 25 arc-sec | ||
| Yaw | 25 arc-sec | ||
| Roll | 25 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.5 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 1.6 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.4 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 54 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-60000-UII | ||
| Stage | Cartesian Gantry | ||
| Travel - X And/Or Travel - Y | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 900 mm x 1107 mm x 320 mm | ||
| Max. Sample Width (Inner Width) | 734 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient | ||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | STD | PRCSN | ULTRA |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 1.0 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 16 µm | +/- 8 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 20 arc-sec | ||
| Max Velocity With AC Drive [3] | 2.5 m/s | ||
| Max Velocity With 48VDC Drive [3] | 0.5 m/s | ||
| Max Acceleration With AC Drive [3] | 1.8 G | ||
| Max Acceleration With 48VDC Drive [3] | 0.4 G | ||
| Max (Vertical) Payload Capability | 25 kg | ||
| Max (Horizontal) Payload Capability | 30 kg | ||
| Assembly Mass | 45 kg | ||
| Configurable Options | |||
| ALIO's Gantry is Designed to be Easily Customizable to Meet Customer Specific Requirements | Y Axis Top Down Mounting (Face Mounting Shown) | ||
| Large or Small Cable Tracks | |||
| Mix and Match Travel | |||
| Risers Available (Custom Height) | |||
| Multiple Cable Routing and Connectorization Options | |||
| Customer Cable Routing Available | |||
| Granite, Optical Table, and Breadboard Bases | |||
| Single Axis Versions Available | |||
| Z Axis Options Available | |||
| X and X' Controlled Yaw Available | |||
| Various Material Options Available | |||
| Inch Spacing Versions Available (see page 3) | |||
| *Increased Gap between X and X' stages without Increased Y Travel |
|||
| Model | AI-LM-70000-UII-XB | ||
| Stage | Linear Stage | ||
| Travel | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 1066 mm x 357 mm x 96.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | ELITE |
| Linear Displacement Accuracy | +/- 28 µm | +/- 5 µm | +/- 3 µm |
| Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 24 µm | +/- 18 µm | +/- 10 µm |
| Flatness [2] | +/- 75 µm | +/- 18 µm | +/- 12 µm |
| Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
| Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | Depending on specific Application - Ask ALIO | ||
| Model | AI-LM-60000-UII-XB | ||
| Stage | Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 966 mm x 357 mm x 96.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | ELITE |
| Linear Displacement Accuracy | +/- 24 µm | +/- 5 µm | +/- 2 µm |
| Bidirectional Linear Repeatability | +/- 1 µm | +/- 0.5 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 20 µm | +/- 15 µm | +/- 10 µm |
| Flatness [2] | +/- 50 µm | +/- 18 µm | +/- 12 µm |
| Pitch | +/- 30 arc-sec | +/- 15 arc-sec | |
| Yaw | +/- 30 arc-sec | +/- 18 arc-sec | |
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | Depending on specific Application - Ask ALIO | ||
| Model | AI-XBS-55000-UII | |
| Stage | Linear Stage | |
| Travel | 550 mm (+/- 275 mm) | |
| Dimensions (Length x Width x Height) | 913 mm x 388 mm x 100 mm | |
| Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
| (-Pbrk) Dimensions (Length x Width x Height) | 958 mm x 388 mm x 100 mm | |
| Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
| Feedback | Non-Contact Optical Linear Encoder | |
| Bearings | Dual Recirculating Ball Rail Bearings | |
| Cables | High Flex, 10M Cycle, 3m | |
| Structure | Anodized Aluminum 6061-T6 | |
| Environment | Ambient |
|
| Operating Temperature | 0°C to 50°C | |
| Humidity | 10% to 80% Non-Condensing | |
| Performance Specifications [1] | (STD) | ULTRA |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm |
| Backlash | 0 nm | |
| Bidirectional Repeatability | +/- 1.0 µm | |
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
| Straightness In Y | +/- 8 µm | +/- 4 µm |
| Flatness [2] | +/- 8 µm | +/- 4 µm |
| Pitch [2] | +/- 18 arc-sec | |
| Yaw | +/- 18 arc-sec | |
| Roll | +/- 18 arc-sec | |
| Max Velocity [3] | 0.3 m/s | |
| Max Peak Acceleration [3] | 0.5 G | |
| Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
| Max Payload Capability With Axis Oriented Vertically | 80 kg | |
| Assembly Mass | 40 kg | |
| Model | AI-LM-70000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 1020 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 28 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 12 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 35 kg | ||
| Model | AI-LM-60000-UII-WL | ||
| Stage | Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 920 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2.0 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 32 kg | ||
| Model | AI-LM-70000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 920 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 28 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 12 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 35 kg | ||
| Model | AI-LM-60000-UII-W | ||
| Stage | Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 820 mm x 388 mm x 88 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 2.0 G | ||
| Max (Vertical) Payload Capability | 100 kg | ||
| Max (Horizontal) Payload Capability | 70 kg | ||
| Assembly Mass | 32 kg | ||
| Model | AI-LM-70000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 880 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 28 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 12 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 8 kg | ||
| Model | AI-LM-60000-UII-SN | ||
| Stage | Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 780 mm x 72 mm x 57 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 7 kg | ||
| Model | AI-LM-70000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 920 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 28 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 20 arc-sec | ||
| Yaw | 20 arc-sec | ||
| Roll | 12 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 18.5 kg | ||
| Model | AI-LM-60000-UII-S | ||
| Stage | Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 820 mm x 208 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch | 18 arc-sec | ||
| Yaw | 18 arc-sec | ||
| Roll | 10 arc-sec | ||
| Max Velocity [3] | 2 m/s | ||
| Max Acceleration [3] | 4.0 G | ||
| Max (Vertical) Payload Capability | 40 kg | ||
| Max (Horizontal) Payload Capability | 32 kg | ||
| Assembly Mass | 16.5 kg | ||
| Model | AI-LM-70000-UII | ||
| Stage | Linear Stage | ||
| Travel | 700 mm (+/- 350 mm) | ||
| Dimensions (Length x Width x Height) | 920 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient |
||
| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 28 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
| Straightness In Y | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch [2] | +/- 10 arc-sec | ||
| Yaw | +/- 10 arc-sec | ||
| Roll | +/- 6 arc-sec | ||
| Max Velocity [3] | 5.5 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 23 kg | ||
| Model | AI-LM-60000-UII | ||
| Stage | Linear Stage | ||
| Travel | 600 mm (+/- 300 mm) | ||
| Dimensions (Length x Width x Height) | 820 mm x 258 mm x 82.5 mm | ||
| Drive | Direct Drive (Ironless Core Linear Motor) | ||
| Feedback | Non-Contact Optical Linear Encoder | ||
| Bearings | Dual Recirculating Ball Rail Bearings | ||
| Cables | High Flex, 10M Cycle, 3m Length | ||
| Structure | Anodized Aluminum 6061-T6 | ||
| Environment | Ambient Optional: Clean Room and Vacuum (10^-6 Torr) |
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| Operating Temperature | 0°C to 50°C | ||
| Humidity | 10% to 80% Non-Condensing | ||
| Performance Specifications [1] | (STD) | ULTRA | NANO |
| Linear Displacement Accuracy | +/- 24 µm | +/- 2 µm | +/- 1 µm |
| Bidirectional Linear Repeatability | +/- 0.5 µm | ||
| Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
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| Straightness In Y | +/- 8 µm | +/- 4 µm | |
| Flatness [2] | +/- 8 µm | +/- 4 µm | |
| Pitch [2] | +/- 9 arc-sec | ||
| Yaw | +/- 9 arc-sec | ||
| Roll | +/- 5 arc-sec | ||
| Max Velocity [3] | 5 m/s | ||
| Max Peak Acceleration [3] | 10.0 G | ||
| Max Payload Capability | 70 kg | ||
| Assembly Mass | 21 kg | ||
翻译由我们中国区合作伙伴Aunion Tech Co., Ltd（上海昊量光电设备有限公司）家提供！
