Model	AI-LM-15000-AB8
Stage	Air Bearing Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	524 mm x 196.85 mm x 75.90 mm
Dimensions Moving Plate (Length x Width)	305 mm x 196.85 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm per 100mm Travel	+/- 1 µm	+/- 0.5 µm
Bidirectional Repeatability	+/- 30 µm	+/- 30 µm	+/- 10 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1 µm per 100mm Travel
Flatness [2]	+/- 1 µm per 100mm Travel
Pitch	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 5 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Pitch Moment	79 nm
Max Roll Moment	75 nm
Max Yaw Moment	37 nm
Vertical Z Stiffness	480 N/µm
Horizontal Y Stiffness	140 N/µm
Max Payload Capacity	60 kg
Assembly Mass	13 kg

Model	AI-LM-15000-AB
Stage	Air Bearing Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	371.6 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	5.9 kg

Model	AI-LM-10000-AB
Stage	Air Bearing Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	320.8 mm x 150 mm x 63.8 mm
Dimensions Moving Plate (Length x Width)	150 mm x 150 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Air Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System
Structure	Anodized Aluminum 6061-T6
Base Structure	Granite, Aluminum, or Steel Designed per System Requirements
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Max Pitch Moment [2]	20 Nm
Max Roll Moment [2]	24 Nm
Max Yaw Moment [2]	10 Nm
Vertical Z Stiffness	250 N/µm
Horizontal Y Stiffness	105 N/µm
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max Load Capacity	30 kg
Assembly Mass	5.2 kg

Model		AI-HH-60XY-15Z-56RT-LM
Stage		Hybrid Hexapod
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		170 mm x 163.5 mm x 224.5 mm
Drives		Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.03 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Roll	360 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>1000 deg/s²
Max Payload		5 kg
Assembly Mass		9.022 kg

Model		AI-HH-60XY-15Z-56R
Stage		Hybrid Hexapod
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		174 mm x 176.3 mm x 201 mm
Drives		Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.03 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	100 mm/s
	Z	15 mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	30 deg/s
	Roll	360 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>1000 deg/s²
Max Payload		5 kg
Assembly Mass		5.7 kg

Model		AI-HH-30D-200XY-62Z-80R-LM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		571 mm x 401 mm x 322.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	100  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass		30 kg

Model		AI-HH-30D-200XY-62Z-80R-CM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		510 mm x 336.5 mm x 293.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	50  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>2000 deg/s²
Max Payload		5 kg
Assembly Mass		14 kg

Model		AI-HH-30D-100XY-62Z-80R-LM
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		415.8 mm x 295.5 mm x 312.2 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 30 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	100  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass		15.29 kg

Model		AI-HH-30D-60XY-62Z-80R-BSD
Stage		Hybrid Hexapod (Angulares® )
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		62 mm (+ 62 mm/- 0 mm)
Travel - Pitch & Roll		+/- 30 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		199 mm x 208 mm x 285.2 mm
Drives		XY, Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Rotary Brake		Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm
	Z	+/- 200 nm
	Pitch And Roll	+/- 1 arc-sec
	Yaw	+/- 0.5 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec		Pitch And Roll
Yaw Runout	Axial Runout	12 µm	10 µm	5 µm
	Radial Runout	12 µm	10 µm	5 µm
	Wobble	20 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	YawPitch And Roll	~0.15 arc-sec
	Yaw	0.04 arc-sec
Max Linear Velocity [3]	XY	50  mm/s
	Z	15  mm/s
Max Linear Acceleration [3]	XY	0.1 G
	Z	0.3 G
Max Angular Velocity [3]	Pitch And Roll	20 deg/s
	Roll	>3000 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>2000 deg/s²
Max Payload		5-10 kg
Assembly Mass

Model		AI-HH-200XY-60Z-154RA
Stage		Hybrid Hexapod
Travel - XY		200 mm (+/- 100 mm)
Travel - Z		60 mm (+ 60 mm/- 0 mm)
Travel - Pitch & Roll		+/- 14 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		443.2 mm x 410.1 mm x 378 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor
Brake		Pneumatic Release, Spring Lock
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	10 nm	7 nm	4 nm
	Radial Runout	10 nm	7 nm	4 nm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	500  mm/s
	Z	30  mm/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	60 deg/s
	Yaw	1800 deg/s
Max Angular Acceleration [3]	Pitch And Roll	>1000 deg/s²
	Yaw	>3600 deg/s²
Max Payload		20 kg
Assembly Mass		57 kg

Model		AI-HH-100XY-15Z-56RT-LM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		296 mm x 244 mm x 215.2 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc/sec	5 arc/sec	1 arc/sec
	XZ & YZ	250 arc/sec	200 arc/sec	50 arc/sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
MAX LINEAR ACCELERATION [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	PITCH AND ROLL	30 deg/s
	YAW	3000 deg/s
MAX ANGULAR ACCELERATION [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		8.9 kg

Model		AI-HH-60XY-15Z-56RT-LM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		165 mm  x 215.2 mm x 222.7 mm
Drives		XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	150 mm/s
	Z	15 mm/s
MAX LINEAR ACCELERATION [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	PITCH AND ROLL	30 deg/s
	YAW	3000 deg/s
MAX ANGULAR ACCELERATION [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		7.3 kg

Model		AI-HH-60XY-15Z-56RT-BSD
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		60 mm (+/- 30 mm)
Travel - Z		15 mm (+ 15 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continous
Dimensions (Length x Width x Height)		171 mm x 177 mm x 191.7 mm
Drives		XY, Pitch & Roll: Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 100 nm		+/- 70 nm
	Z	+/- 100 nm		+/- 70 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20 nm
	Z	< 20 nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.04 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]	XY	100 mm/s
	Z	15 mm/s
MAX LINEAR ACCELERATION [3]	XY	0.3 G
	Z	0.3 G
Max Angular Velocity [3]	PITCH AND ROLL	30 deg/s
	YAW	3000 deg/s
MAX ANGULAR ACCELERATION [3]	PITCH AND ROLL	>1000 deg/s²
	YAW	>7200 deg/s²
Max Payload		5 kg
Assembly Mass		6 kg

Model	AI-HH-ST14-200XY-60Z-104R
Travel - XY	200 mm (+/- 100 mm)
Travel - Z	60 mm (+ 60 mm /- 0 mm)
Travel - Pitch & Roll	+/- 30 deg
Travel - Yaw	360 deg continous
Dimensions (Length x Width x Height)	292 mm x 275 mm x 400 mm
Stage	Hybrid Hexapod
Drives	XY, Pitch & Yaw: Stepper Motor Yaw: Torque Motor
Feedback	Standard: No Encoder Optional: Non-Contact Optical Linear Encoder, Rotary Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder Optional: Magnetic Spring (Constant Force)
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications	(STD)
Linear Resolution with Encoder Option	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Pitch And Roll Resolution with Encoder Option	~0.01 arc-sec
Yaw Resolution with Encoder Option	0.02 arc-sec
Max Linear Velocity [2]	20 mm/s
Max Angular Velocity (Pitch & Roll) [2]	10 deg/s
Max Angular Velocity (Yaw) [2]	540 deg/s
Max Payload [3]	10 kg
Assembly Mass	28 kg

Model		AI-HH-300XY-106Z-154R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2 mm x 500 mm x 519.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	10 µm	7 µm	4 µm
	Radial Runout	10 µm	7 µm	4 µm
	Wobble	20 arc-sec	10 arc-sec	6 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	~0.01 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		10 kg
Assembly Mass		105 kg

Model		AI-HH-300XY-106Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		300 mm (+/- 150 mm)
Travel - Z		106 mm (+ 106 mm/- 0 mm)
Travel - Pitch & Roll		+/- 18 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		504.2 mm x 500 mm x 519.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		7.5 kg
Assembly Mass		105 kg

Model		AI-HH-200XY-40Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		200 mm(+/- 100 mm)
Travel - Z		40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		399 mm x 359 mm x 318.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.08 arc-sec
	Yaw	< 0.08 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.3 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		5 kg
Assembly Mass		46 kg

Model		AI-HH-150XY-40Z-104R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		150 mm (+/- 75 mm)
Travel - Z		40 mm (+ 40 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		399 mm x 350 mm x 308.9 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.5 arc-sec		+/- 0.3 arc-sec
	Yaw	+/- 0.5 arc-sec		+/- 0.3 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	12 µm	9 µm	6 µm
	Radial Runout	12 µm	9 µm	6 µm
	Wobble	25 arc-sec	15 arc-sec	10 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	#colspan#~0.01 arc-sec
	Yaw	0.02 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.4 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		5 kg
Assembly Mass		34 kg

Model		AI-HH-100XY-24Z-56R-MS
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		262.5 mm x 246 mm x 250.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Magnetic Spring (Constant Force)
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	#colspan#  < 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
Pitch And Roll	~0.02 arc-sec
Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		20 kg

Model		AI-HH-100XY-24Z-56R-CM,MS
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		12 mm (+ 12 mm/- 0 mm)
Travel - Pitch & Roll		+/- 10 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		262.5 mm x 246 mm x 218.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.05 m/s
Max Linear Acceleration [3]		0.1 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		13.1 kg

Model		AI-HH-100XY-24Z-56R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		24 mm (+ 24 mm/- 0 mm)
Travel - Pitch & Roll		+/- 11 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		244 mm x 244 mm x 233.8 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.02 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.5 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2.5 kg
Assembly Mass		18.4 kg

Model		AI-HH-100XY-6Z-56R-CM
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll		+/- 3 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		200 mm x 184 mm x 200.5 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.03 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.05 m/s
Max Linear Acceleration [3]		0.1 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2 kg
Assembly Mass		10 kg

Model		AI-HH-100XY-6Z-56R
Stage		Hybrid Hexapod (6 DOF)
Travel - XY		100 mm (+/- 50 mm)
Travel - Z		6 mm (+ 6 mm/- 0 mm)
Travel - Pitch & Roll		+/- 3 deg
Travel - Yaw		360 deg continuous
Dimensions (Length x Width x Height)		244 mm x 244 mm x 220.5 mm
Drives		XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor
Feedback		Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder
Bearings		Crossed Roller Bearings
Counterbalance		Pneumatic Cylinder
Cables		High Flex, 10M Cycle, 3m Length
Structure		Anodized Aluminum 6061-T6
Environment		Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr
Operating Temperature		0°C to 50°C
Humidity		10% to 80% Non-Condensing
Performance Specifications [1]		(STD)	ULTRA	NANO
Bidrectional Repeatability	XY	+/- 80 nm		+/- 50 nm
	Z	+/- 80 nm		+/- 50 nm
	Pitch And Roll	+/- 0.6 arc-sec		+/- 0.4 arc-sec
	Yaw	+/- 0.6 arc-sec		+/- 0.4 arc-sec
Backlash	XY	0 nm / arc-sec (no backlash on any axis)
	Z
	Pitch And Roll
	Yaw
Minimum Incremental Step Size	XY	< 20  nm
	Z	< 20  nm
	Pitch And Roll	< 0.1 arc-sec
	Yaw	< 0.1 arc-sec
Yaw Runout	Axial Runout	15 µm	12 µm	10 µm
	Radial Runout	15 µm	12 µm	10 µm
	Wobble	25 arc-sec	20 arc-sec	15 arc-sec
Resolution	XY	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
	Z
	Pitch And Roll	~0.03 arc-sec
	Yaw	0.04 arc-sec
Orthogonality	XY	20 arc-sec	5 arc-sec	1 arc-sec
	XZ & YZ	250 arc-sec	200 arc-sec	50 arc-sec
Max Linear Velocity [3]		0.4 m/s
Max Linear Acceleration [3]		0.5 G
Max Angular Velocity [3]	Pitch And Roll	180 deg/s
	Roll	180 deg/s
Max Angular Acceleration [3]	PITCH AND ROLL	>1800 deg/s²
	YAW	>3600 deg/s²
Max Payload		2 kg
Assembly Mass		17.2 kg

Model	AI-LM-15000-Z-ABCB-HF
Stage	Vertical Z Stage
Travel	150mm (+/- 75mm)
Dimensions (Length x Width x Height)	215mm x 50mm x 353mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	4.0 G
Max Payload Capability	25 kg
Assembly Mass	6.5 kg

Model	AI-LM-15000-Z-ABCB
Stage	Vertical Z Stage
Travel	150mm (+/- 75mm)
Dimensions (Length x Width x Height)	200mm x 50mm x 353mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	25 kg
Assembly Mass	5.6 kg

Model	AI-LM-10000-Z-ABCB-HF
Stage	Vertical Z Stage
Travel	100mm (+/- 50mm)
Dimensions (Length x Width x Height)	215mm x 50mm x 323mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	4.5 G
Max Payload Capability	25 kg
Assembly Mass	5.9 kg

Model	AI-LM-10000-Z-ABCB
Stage	Vertical Z Stage
Travel	100mm (+/- 50mm)
Dimensions (Length x Width x Height)	183.5mm x 50mm x 323mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	3.5 G
Max Payload Capability	12 kg
Assembly Mass	4.7 kg

Model	AI-LM-6000-Z-ABCB
Stage	Vertical Z Stage
Travel	60mm (+/- 30mm)
Dimensions (Length x Width x Height)	183.5mm x 45mm x 220mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Air Bearing Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Repeatability	+/- 75 nm		+/- 45 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	0.25 m/s
Max Peak Acceleration [3]	2.5 G
Max Payload Capability	10 kg
Assembly Mass	2.9 kg

Model	AI-LM-7000-50N-Z-CB
Stage	Vertical Z Stage
Travel	70 mm (+ 70 mm/- 0 mm)
Dimensions (Length x Width x Height)	175 mm x 125 mm x 250 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.25 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	30 kg
Force	50 N
Assembly Mass	13.0 kg

Model	AI-LM-6000-50N-Z-CB
Stage	Vertical Z Stage
Travel	60 mm (+ 60 mm/- 0 mm)
Dimensions (Length x Width x Height)	175 mm x 125 mm x 235 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Counterbalance	Pneumatic Cylinder
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 75 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch	+/- 12 arc-sec
Yaw	+/- 12 arc-sec
Roll	+/- 12 arc-sec
Max Velocity [3]	0.25 m/s
Max Acceleration [3]	1.0 G
Max Payload Capability	20 kg
Force	50 N
Assembly Mass	12.3 kg

Model	AI-XBS-15000-UII
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	513 mm x 388 mm x 100 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)	558 mm x 388 mm x 100 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 6 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In Y	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch [2]	+/- 12 arc-sec
Yaw	+/- 12 arc-sec
Roll	+/- 12 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	150 kg
Max Payload Capability With Axis Oriented Vertically	80 kg
Assembly Mass	25 kg

Model	AI-XBS-10000-UII
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	463 mm x 388 mm x 100 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK)
(-Pbrk) Dimensions (Length x Width x Height)	508 mm x 388 mm x 100 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 5 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness In Y	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch [2]	+/- 12 arc-sec
Yaw	+/- 12 arc-sec
Roll	+/- 12 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	150 kg
Max Payload Capability With Axis Oriented Vertically	80 kg
Assembly Mass	24 kg

Model	AI-SBS-15000-UII
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	443 mm x 258 mm x 69 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	465 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)	515 mm x 258 mm x 69 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 6 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch [2]	+/- 12 arc-sec
Yaw	+/- 12 arc-sec
Roll	+/- 12 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	70 kg
Max Payload Capability With Axis Oriented Vertically	40 kg
Assembly Mass	11.5 kg

Model	AI-SBS-10000-UII
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	393 mm x 258 mm x 69 mm
Brake Options	Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	415 mm x 258 mm x 69 mm
(-Ebrk) Dimensions (Length x Width x Height)	465 mm x 258 mm x 69 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA
Linear Displacement Accuracy	+/- 5 µm	+/- 2 µm
Backlash	0 nm
Bidirectional Repeatability	+/- 1.0 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch [2]	+/- 12 arc-sec
Yaw	+/- 12 arc-sec
Roll	+/- 12 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	0.5 G
Max Payload Capability With Axis Oriented Horizontally	70 kg
Max Payload Capability With Axis Oriented Vertically	40 kg
Assembly Mass	11 kg

Model	AI-LM-15000-UII-WL
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	470 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch	10 arc-sec
Yaw	10 arc-sec
Roll	6 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	22 kg

Model	AI-LM-10000-UII-WL
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	420 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch	10 arc-sec
Yaw	10 arc-sec
Roll	6 arc-sec
Max Velocity [3]	2.0 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	20 kg

Model	AI-LM-15000-UII-W
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	370 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch	10 arc-sec
Yaw	10 arc-sec
Roll	6 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	22 kg

Model	AI-LM-10000-UII-W
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	320 mm x 388 mm x 88 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch	10 arc-sec
Yaw	10 arc-sec
Roll	6 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	2.0 G
Max (Vertical) Payload Capability	100 kg
Max (Horizontal) Payload Capability	70 kg
Assembly Mass	20 kg

Model	AI-LM-15000-UII-SN
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	330 mm x 72 mm x 57 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch	10 arc-sec
Yaw	10 arc-sec
Roll	6 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	2.5 kg

Model	AI-LM-10000-UII-SN
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	280 mm x 72 mm x 57 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm)
Straightness	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch	10 arc-sec
Yaw	10 arc-sec
Roll	6 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	2.1 kg

Model	AI-LM-15000-UII-S
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	370 mm x 208 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch	10 arc-sec
Yaw	10 arc-sec
Roll	6 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	9 kg

Model	AI-LM-10000-UII-S
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	320 mm x 208 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch	10 arc-sec
Yaw	10 arc-sec
Roll	6 arc-sec
Max Velocity [3]	2 m/s
Max Acceleration [3]	4.0 G
Max (Vertical) Payload Capability	40 kg
Max (Horizontal) Payload Capability	32 kg
Assembly Mass	8 kg

Model	AI-LM-15000-UII
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	370 mm x 258 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 6 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch [2]	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 3 arc-sec
Max Velocity [3]	2.5 m/s
Max Peak Acceleration [3]	10.0 G
Max Payload Capability	70 kg
Assembly Mass	12 kg

Model	AI-LM-10000-UII
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	320 mm x 258 mm x 82.5 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Dual Recirculating Ball Rail Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 5 µm	+/- 2 µm	+/- 1 µm
Bidirectional Linear Repeatability	+/- 0.5 µm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness In Y	+/- 3 µm	+/- 2 µm
Flatness [2]	+/- 3 µm	+/- 2 µm
Pitch [2]	+/- 5 arc-sec
Yaw	+/- 5 arc-sec
Roll	+/- 3 arc-sec
Max Velocity [3]	2 m/s
Max Peak Acceleration [3]	10.0 G
Max Payload Capability	70 kg
Assembly Mass	11 kg

Model	AI-LM-160x100-XY
Stage	Monolithic XY Stage (Asymmetrical)
Travel - X	160 mm (+/- 80 mm)
Travel - Y	100 mm (+/- 50 mm)
Dimensions (Length X Width X Height)	275 mm x 175 mm x 80 mm
Drives	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.0 µm	+/- 0.7 µm	+/- 0.4 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 7.5 arc-sec
Yaw	+/- 7.5 arc-sec
Roll	+/- 4.0 arc-sec
Orthogonality	+/- 10.0 arc-sec	+/- 2.5 arc-sec	+/- 0.5 arc-sec
Max Velocity [3]	1 m/s
Max Peak Acceleration [3]	1.5 G
Max Payload Capability	25 kg
Assembly Mass	11.4 kg

Model	AI-VBS-15000
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	370 mm x 120 mm x 50 mm
Brake Options	Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	404 mm x 120 mm x 50 mm
(-Ebrk) Dimensions (Length x Width x Height)	452 mm x 120 mm x 50 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 1.0 µm	+/- 0.4 µm
Backlash	0 nm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.5 µm	+/- 2.5 µm	+/- 1.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability W/ Axis Oriented Horizontal	25 kg
Max Payload Capability W/ Axis Oriented Vertical	12 kg
Assembly Mass	4.6 kg

Model	AI-VBS-10000
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	295 mm x 120 mm x 50 mm
Brake Options	Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	329 mm x 120 mm x 50 mm
(-Ebrk) Dimensions (Length x Width x Height)	377 mm x 120 mm x 50 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 1.0 µm	+/- 0.3 µm
Backlash	0 nm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability W/ Axis Oriented Horizontal	25 kg
Max Payload Capability W/ Axis Oriented Vertical	12 kg
Assembly Mass	3.8 kg

Model	AI-VBS-6000
Stage	Linear Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	225 mm x 120 mm x 50 mm
Brake Options	Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK)
(-Pbrk) Dimensions (Length x Width x Height)	259 mm x 120 mm x 50 mm
(-Ebrk) Dimensions (Length x Width x Height)	307 mm x 120 mm x 50 mm
Drive	Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3 µm	+/- 0.7 µm	+/- 0.3 µm
Backlash	0 nm
Bidirectional Linear Repeatability	+/- 100 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.5 µm	+/- 1.5 µm
Pitch [2]	+/- 15 arc-sec
Yaw	+/- 15 arc-sec
Roll	+/- 15 arc-sec
Max Velocity [3]	0.3 m/s
Max Peak Acceleration [3]	1.0 G
Max Payload Capability W/ Axis Oriented Horizontal	20 kg
Max Payload Capability W/ Axis Oriented Vertical	12 kg
Assembly Mass	3 kg

Model	AI-CM-15000-150-XY
Stage	Monolithic XY Stage with Open Center
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	282.5 mm x 282.5 mm x 52 mm
Aperture / Thru	150 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 4.0 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 5.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.9 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	1.2 G
Bot Axis Max Peak Acceleration [3]	0.4 G
Max Payload Capability	12 kg
Assembly Mass	7.4 kg

Model	AI-CM-10000-100-XY
Stage	Monolithic XY Stage with Open Center
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	229.5 mm x 229.5 mm x 52 mm
Aperture / Thru	100 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	1.6 G
Bot Axis Max Peak Acceleration [3]	0.6 G
Max Payload Capability	12 kg
Assembly Mass	5.6 kg

Model	AI-CM-5000-050-XY
Stage	Monolithic XY Stage with Open Center
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	179.5 mm x 179.5 mm x 45 mm
Aperture / Thru	50 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Flatness [2]	+/- 2.5 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	3.0 G
Bot Axis Max Peak Acceleration [3]	1.0 G
Max Payload Capability	10 kg
Assembly Mass	3.2 kg

Model	AI-CM-15000-XY
Stage	Monolithic XY Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	225 mm x 225 mm x 60 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.8 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	1.0 G
Bot Axis Max Peak Acceleration [3]	0.4 G
Max Payload Capability	12 kg
Assembly Mass	8.5 kg

Model	AI-CM-10000-XY
Stage	Monolithic XY Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	184 mm x 184 mm x 60 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 1.0 µm	+/- 0.3 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.7 m/s
Bot Axis Max Velocity [3]	0.5 m/s
Top Axis Max Peak Acceleration [3]	1.2 G
Bot Axis Max Peak Acceleration [3]	0.6 G
Max Payload Capability	12 kg
Assembly Mass	5.8 kg

Model	AI-CM-6000-XY
Stage	Monolithic XY Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	125 mm x125 mm x 60 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 0.7 µm	+/- 0.3 µm
Flatness [2]	+/- 2.5 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	0.9 m/s
Bot Axis Max Velocity [3]	0.6
Top Axis Max Peak Acceleration [3]	3.0 G
Bot Axis Max Peak Acceleration [3]	1.2 G
Max Payload Capability	10 kg
Assembly Mass	2.9 kg

Model	AI-CM-15000
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	229 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.5 µm	+/- 2.5 µm	+/- 1.5 µm
Flatness [2]	+/- 4.0 µm	+/- 2.0 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Max Velocity [3]	1.1 m/s
Max Acceleration [3]	1.8 G
Max Payload Capability	12 kg
Assembly Mass	2.5 kg

Model	AI-CM-10000
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	190 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 1.0 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Max Velocity [3]	1 m/s
Max Acceleration [3]	2.0 G
Max Payload Capability	12 kg
Assembly Mass	2.2 kg

Model	AI-CM-6000
Stage	Linear Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	130 mm x 120 mm x 32 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.5 µm	+/- 1.5 µm
Pitch [2]	+/- 12.0 arc-sec
Yaw	+/- 12.0 arc-sec
Roll	+/- 12.0 arc-sec
Max Velocity [3]	0.9 m/s
Max Acceleration [3]	3.0 G
Max Payload Capability	10 kg
Assembly Mass	1.4 kg

Model	AI-LM-15000
Stage	Linear Stage
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	275 mm x 120 mm x 45 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.4 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.2 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch Y [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 8.0 arc-sec
Max Velocity [3]	2.1 m/s
Max Acceleration [3]	6.0 G
Max Payload Capability	25 kg
Assembly Mass	4.4 kg

Model	AI-LM-10000
Stage	Linear Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	244 mm x 120 mm x 45 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch Y [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	1.8 m/s
Max Acceleration [3]	7.0 G
Max Payload Capability	25 kg
Assembly Mass	4 kg

Model	AI-LM-6000
Stage	Linear Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	168 mm x 120 mm x 40 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.5 µm	+/- 1.5 µm	+/- 1.0 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch Y [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Max Velocity [3]	1.2 m/s
Max Acceleration [3]	5.0 G
Max Payload Capability	20 kg
Assembly Mass	2.2 kg

Model	AI-LM-15000-150-XY
Stage	Monolithic XY Stage with Open Center
Travel	150 mm (+/- 75 mm)
Dimensions (Length x Width x Height)	326.5 mm x 326.5 mm x 68 mm
Aperture / Thru	150 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.2 µm	+/- 0.6 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 3.0 µm	+/- 1.2 µm	+/- 0.6 µm
Flatness [2]	+/- 3.0 µm	+/- 1.5 µm
Pitch [2]	+/- 15.0 arc-sec
Yaw	+/- 15.0 arc-sec
Roll	+/- 15.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.7 m/s
Bot Axis Max Velocity [3]	1.0  m/s
Top Axis Max Peak Acceleration [3]	4.0 G
Top Axis Max Peak Acceleration [3]	1.4 G
Max Payload Capability	25 kg
Assembly Mass	14 kg

Model	AI-LM-10000-100-XY
Stage	Monolithic XY Stage with Open Center
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	230 mm x 230 mm x 64 mm
Aperture / Thru	100 mm
Motor	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB")
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 4.0 µm	+/- 1.0 µm	+/- 0.5 µm
Bidirectional Linear Repeatability	+/- 50 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 2.0 µm	+/- 1.0 µm	+/- 0.5 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 10.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.4 m/s
Bot Axis Max Velocity [3]	0.8 m/s
Top Axis Max Peak Acceleration [3]	4.0 G
Top Axis Max Peak Acceleration [3]	1.6 G
Max Payload Capability	25 kg
Assembly Mass	6.5 kg

Model	AI-LM-10000-XY
Stage	Monolithic XY Stage
Travel	100 mm (+/- 50 mm)
Dimensions (Length x Width x Height)	244 mm x 244 mm x 80 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.7 µm	+/- 0.3 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.0 µm	+/- 0.7 µm	+/- 0.3 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.4 m/s
Bot Axis Max Velocity [3]	0.8 m/s
Top Axis Max Peak Acceleration [3]	4.0 G
Bot Axis Max Peak Acceleration [3]	1.6 G
Max Payload Capability	25 kg
Assembly Mass	13 kg

Model	AI-LM-6000-XY
Stage	Monolithic XY Stage
Travel	60 mm (+/- 30 mm)
Dimensions (Length x Width x Height)	152.5 mm x 152.5 mm x 80 mm
Drive	Direct Drive (Ironless Core Linear Motor)
Feedback	Non-Contact Optical Linear Encoder
Bearings	Crossed Roller Bearings
Cables	High Flex, 10M Cycle, 3m Length
Structure	Anodized Aluminum 6061-T6
Environment	Ambient Optional: Clean Room and Vacuum (10-6 Torr)
Operating Temperature	0°C to 50°C
Humidity	10% to 80% Non-Condensing
Performance Specifications [1]	(STD)	ULTRA	NANO
Linear Displacement Accuracy	+/- 3.0 µm	+/- 0.5 µm	+/- 0.2 µm
Bidirectional Linear Repeatability	+/- 30 nm
Resolution	Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm)
Straightness	+/- 1.0 µm	+/- 0.5 µm	+/- 0.2 µm
Flatness [2]	+/- 2.0 µm	+/- 1.0 µm
Pitch [2]	+/- 10.0 arc-sec
Yaw	+/- 10.0 arc-sec
Roll	+/- 6.0 arc-sec
Orthogonality	+/- 20.0 arc-sec	+/- 5.0 arc-sec	+/- 1.0 arc-sec
Top Axis Max Velocity [3]	1.2 m/s
Bot Axis Max Velocity [3]	0.7 m/s
Top Axis Max Peak Acceleration [3]	5.0 G
Bot Axis Max Peak Acceleration [3]	2.0 G
Max Payload Capability	20 kg
Assembly Mass	4.7 kg