Model | AI-LM-15000-AB8 | ||
Stage | Air Bearing Linear Stage | ||
Travel | 150 mm (+/- 75 mm) | ||
Dimensions (Length x Width x Height) | 524 mm x 196.85 mm x 75.90 mm |
||
Dimensions Moving Plate (Length x Width) | 305 mm x 196.85 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Air Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
||
Structure | Anodized Aluminum 6061-T6 | ||
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
||
Environment | Ambient | ||
Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm per 100mm Travel | +/- 1 µm | +/- 0.5 µm |
Bidirectional Repeatability | +/- 30 µm | +/- 30 µm | +/- 10 µm |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1 µm per 100mm Travel | ||
Flatness [2] | +/- 1 µm per 100mm Travel | ||
Pitch | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 5 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Pitch Moment | 79 nm | ||
Max Roll Moment | 75 nm | ||
Max Yaw Moment | 37 nm | ||
Vertical Z Stiffness | 480 N/µm | ||
Horizontal Y Stiffness | 140 N/µm | ||
Max Payload Capacity | 60 kg | ||
Assembly Mass | 13 kg |
Model | AI-LM-15000-AB |
Stage | Air Bearing Linear Stage |
Travel | 150 mm (+/- 75 mm) |
Dimensions (Length x Width x Height) | 371.6 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 5.9 kg |
Model | AI-LM-10000-AB |
Stage | Air Bearing Linear Stage |
Travel | 100 mm (+/- 50 mm) |
Dimensions (Length x Width x Height) | 320.8 mm x 150 mm x 63.8 mm |
Dimensions Moving Plate (Length x Width) | 150 mm x 150 mm |
Drive | Direct Drive (Ironless Core Linear Motor) |
Feedback | Non-Contact Optical Linear Encoder |
Bearings | Air Bearings |
Cables | High Flex, 10M Cycle, 3m Length Optional: Trackless Cable Management System |
Structure | Anodized Aluminum 6061-T6 |
Base Structure | Granite, Aluminum, or Steel Designed per System Requirements |
Environment | Ambient |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications [1] | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
Max Pitch Moment [2] | 20 Nm |
Max Roll Moment [2] | 24 Nm |
Max Yaw Moment [2] | 10 Nm |
Vertical Z Stiffness | 250 N/µm |
Horizontal Y Stiffness | 105 N/µm |
Max Velocity [3] | 2.0 m/s |
Max Acceleration [3] | 2.0 G |
Max Load Capacity | 30 kg |
Assembly Mass | 5.2 kg |
Model | AI-HH-60XY-15Z-56RT-LM | |||
Stage | Hybrid Hexapod | |||
Travel - XY | 60 mm (+/- 30 mm) | |||
Travel - Z | 15 mm (+ 15 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 170 mm x 163.5 mm x 224.5 mm | |||
Drives | Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut | |||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
Z | +/- 100 nm | +/- 70 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.04 arc-sec | |||
Yaw | 0.03 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | XY | 150 mm/s | ||
Z | 15 mm/s | |||
Max Linear Acceleration [3] | XY | 0.3 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 30 deg/s | ||
Roll | 360 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1000 deg/s² | ||
Yaw | >1000 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 9.022 kg |
Model | AI-HH-60XY-15Z-56R | |||
Stage | Hybrid Hexapod | |||
Travel - XY | 60 mm (+/- 30 mm) | |||
Travel - Z | 15 mm (+ 15 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 174 mm x 176.3 mm x 201 mm | |||
Drives | Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut | |||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
Z | +/- 100 nm | +/- 70 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.04 arc-sec | |||
Yaw | 0.03 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | XY | 100 mm/s | ||
Z | 15 mm/s | |||
Max Linear Acceleration [3] | XY | 0.3 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 30 deg/s | ||
Roll | 360 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1000 deg/s² | ||
Yaw | >1000 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 5.7 kg |
Model | AI-HH-30D-200XY-62Z-80R-LM | |||
Stage | Hybrid Hexapod (Angulares® ) | |||
Travel - XY | 200 mm (+/- 100 mm) | |||
Travel - Z | 62 mm (+ 62 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 30 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 571 mm x 401 mm x 322.2 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
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Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Rotary Brake | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B) |
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Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 30 nm | ||
Z | +/- 200 nm | |||
Pitch And Roll | +/- 1 arc-sec | |||
Yaw | +/- 0.5 arc-sec | |||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 12 µm | 10 µm | 5 µm |
Radial Runout | 12 µm | 10 µm | 5 µm | |
Wobble | 20 arc-sec | 15 arc-sec | 10 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.15 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Max Linear Velocity [3] | XY | 100 mm/s | ||
Z | 15 mm/s | |||
Max Linear Acceleration [3] | XY | 0.3 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 20 deg/s | ||
Roll | >3000 deg/s | |||
Max Angular Acceleration [3] | PITCH AND ROLL | >1000 deg/s² | ||
YAW | >2000 deg/s² | |||
Max Payload | 5-10 kg | |||
Assembly Mass | 30 kg |
Model | AI-HH-30D-200XY-62Z-80R-CM | |||
Stage | Hybrid Hexapod (Angulares® ) | |||
Travel - XY | 200 mm (+/- 100 mm) | |||
Travel - Z | 62 mm (+ 62 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 30 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 510 mm x 336.5 mm x 293.2 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
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Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
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Bearings | Crossed Roller Bearings | |||
Rotary Brake | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B) |
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Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 30 nm | ||
Z | +/- 200 nm | |||
Pitch And Roll | +/- 1 arc-sec | |||
Yaw | +/- 0.5 arc-sec | |||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 12 µm | 10 µm | 5 µm |
Radial Runout | 12 µm | 10 µm | 5 µm | |
Wobble | 20 arc-sec | 15 arc-sec | 10 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.15 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Max Linear Velocity [3] | XY | 50 mm/s | ||
Z | 15 mm/s | |||
Max Linear Acceleration [3] | XY | 0.1 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 20 deg/s | ||
Roll | >3000 deg/s | |||
Max Angular Acceleration [3] | PITCH AND ROLL | >1000 deg/s² | ||
YAW | >2000 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 14 kg |
Model | AI-HH-30D-100XY-62Z-80R-LM | |||
Stage | Hybrid Hexapod (Angulares® ) | |||
Travel - XY | 100 mm (+/- 50 mm) | |||
Travel - Z | 62 mm (+ 62 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 30 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 415.8 mm x 295.5 mm x 312.2 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
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Bearings | Crossed Roller Bearings | |||
Rotary Brake | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B) |
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Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 30 nm | ||
Z | +/- 200 nm | |||
Pitch And Roll | +/- 1 arc-sec | |||
Yaw | +/- 0.5 arc-sec | |||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 12 µm | 10 µm | 5 µm |
Radial Runout | 12 µm | 10 µm | 5 µm | |
Wobble | 20 arc-sec | 15 arc-sec | 10 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.15 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Max Linear Velocity [3] | XY | 100 mm/s | ||
Z | 15 mm/s | |||
Max Linear Acceleration [3] | XY | 0.3 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 20 deg/s | ||
Roll | >3000 deg/s | |||
Max Angular Acceleration [3] | PITCH AND ROLL | >1000 deg/s² | ||
YAW | >2000 deg/s² | |||
Max Payload | 5-10 kg | |||
Assembly Mass | 15.29 kg |
Model | AI-HH-30D-60XY-62Z-80R-BSD | |||
Stage | Hybrid Hexapod (Angulares® ) | |||
Travel - XY | 60 mm (+/- 30 mm) | |||
Travel - Z | 62 mm (+ 62 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 30 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 199 mm x 208 mm x 285.2 mm | |||
Drives | XY, Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor |
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Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
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Bearings | Crossed Roller Bearings | |||
Rotary Brake | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (B) |
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Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 100 nm | ||
Z | +/- 200 nm | |||
Pitch And Roll | #colspan# +/- 1 arc-sec | |||
Yaw | #colspan# +/- 0.5 arc-sec | |||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | Pitch And Roll | ||
Yaw Runout | Axial Runout | 12 µm | 10 µm | 5 µm |
Radial Runout | 12 µm | 10 µm | 5 µm | |
Wobble | 20 arc-sec | 15 arc-sec | 10 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
YawPitch And Roll | ~0.15 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Max Linear Velocity [3] | XY | 50 mm/s | ||
Z | 15 mm/s | |||
Max Linear Acceleration [3] | XY | 0.1 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 20 deg/s | ||
Roll | >3000 deg/s | |||
Max Angular Acceleration [3] | PITCH AND ROLL | >1000 deg/s² | ||
YAW | >2000 deg/s² | |||
Max Payload | 5-10 kg | |||
Assembly Mass |
Model | AI-HH-200XY-60Z-154RA | |||
Stage | Hybrid Hexapod | |||
Travel - XY | 200 mm (+/- 100 mm) | |||
Travel - Z | 60 mm (+ 60 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 14 deg | |||
Travel - Yaw | 360 deg continous | |||
Dimensions (Length x Width x Height) | 443.2 mm x 410.1 mm x 378 mm | |||
Drives | XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw Yaw: Torque Motor |
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Brake | Pneumatic Release, Spring Lock | |||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
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Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
Z | +/- 100 nm | +/- 70 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 10 nm | 7 nm | 4 nm |
Radial Runout | 10 nm | 7 nm | 4 nm | |
Wobble | 20 arc-sec | 10 arc-sec | 6 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.02 arc-sec | |||
Yaw | ~0.01 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | XY | 500 mm/s | ||
Z | 30 mm/s | |||
Max Linear Acceleration [3] | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 60 deg/s | ||
Yaw | 1800 deg/s | |||
Max Angular Acceleration [3] | Pitch And Roll | >1000 deg/s² | ||
Yaw | >3600 deg/s² | |||
Max Payload | 20 kg | |||
Assembly Mass | 57 kg |
Model | AI-HH-100XY-15Z-56RT-LM | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 100 mm (+/- 50 mm) | |||
Travel - Z | 15 mm (+ 15 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continous | |||
Dimensions (Length x Width x Height) | 296 mm x 244 mm x 215.2 mm | |||
Drives | XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
Z | +/- 100 nm | +/- 70 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.04 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc/sec | 5 arc/sec | 1 arc/sec |
XZ & YZ | 250 arc/sec | 200 arc/sec | 50 arc/sec | |
Max Linear Velocity [3] | XY | 150 mm/s | ||
Z | 15 mm/s | |||
MAX LINEAR ACCELERATION [3] | XY | 0.3 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | PITCH AND ROLL | 30 deg/s | ||
YAW | 3000 deg/s | |||
MAX ANGULAR ACCELERATION [3] | PITCH AND ROLL | >1000 deg/s² | ||
YAW | >7200 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 8.9 kg |
Model | AI-HH-60XY-15Z-56RT-LM | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 60 mm (+/- 30 mm) | |||
Travel - Z | 15 mm (+ 15 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continous | |||
Dimensions (Length x Width x Height) | 165 mm x 215.2 mm x 222.7 mm | |||
Drives | XY: Direct Drive (Ironless Core Linear Motor) Pitch & Roll: Frameless Torque Motor with Precision Ball Screw with Anti-Backlash Nut Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
Z | +/- 100 nm | +/- 70 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.04 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | XY | 150 mm/s | ||
Z | 15 mm/s | |||
MAX LINEAR ACCELERATION [3] | XY | 0.3 G | ||
Z | 0.3 G | |||
Max Angular Velocity [3] | PITCH AND ROLL | 30 deg/s | ||
YAW | 3000 deg/s | |||
MAX ANGULAR ACCELERATION [3] | PITCH AND ROLL | >1000 deg/s² | ||
YAW | >7200 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 7.3 kg |
Model | AI-HH-60XY-15Z-56RT-BSD | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 60 mm (+/- 30 mm) | |||
Travel - Z | 15 mm (+ 15 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continous | |||
Dimensions (Length x Width x Height) | 171 mm x 177 mm x 191.7 mm | |||
Drives | XY, Pitch & Roll: Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient | |||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 100 nm | +/- 70 nm | |
Z | +/- 100 nm | +/- 70 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | #colspan# < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.04 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | XY | 100 mm/s | ||
Z | 15 mm/s | |||
MAX LINEAR ACCELERATION [3] | XY | 0.3 G | ||
Z | #colspan#0.3 G | |||
Max Angular Velocity [3] | PITCH AND ROLL | 30 deg/s | ||
YAW | 3000 deg/s | |||
MAX ANGULAR ACCELERATION [3] | PITCH AND ROLL | >1000 deg/s² | ||
YAW | >7200 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 6 kg |
Model | AI-HH-ST14-200XY-60Z-104R |
Travel - XY | 200 mm (+/- 100 mm) |
Travel - Z | 60 mm (+ 60 mm /- 0 mm) |
Travel - Pitch & Roll | +/- 30 deg |
Travel - Yaw | 360 deg continous |
Dimensions (Length x Width x Height) | 292 mm x 275 mm x 400 mm |
Stage | Hybrid Hexapod |
Drives | XY, Pitch & Yaw: Stepper Motor Yaw: Torque Motor |
Feedback | Standard: No Encoder Optional: Non-Contact Optical Linear Encoder, Rotary Encoder |
Bearings | Crossed Roller Bearings |
Counterbalance | Pneumatic Cylinder Optional: Magnetic Spring (Constant Force) |
Cables | High Flex, 10M Cycle, 3m Length |
Structure | Anodized Aluminum 6061-T6 |
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
Operating Temperature | 0°C to 50°C |
Humidity | 10% to 80% Non-Condensing |
Performance Specifications | (STD) |
Linear Resolution with Encoder Option | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
Pitch And Roll Resolution with Encoder Option | ~0.01 arc-sec |
Yaw Resolution with Encoder Option | 0.02 arc-sec |
Max Linear Velocity [2] | 20 mm/s |
Max Angular Velocity (Pitch & Roll) [2] | 10 deg/s |
Max Angular Velocity (Yaw) [2] | 540 deg/s |
Max Payload [3] | 10 kg |
Assembly Mass | 28 kg |
Model | AI-HH-300XY-106Z-154R | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 300 mm (+/- 150 mm) | |||
Travel - Z | 106 mm (+ 106 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 18 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 504.2 | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Pneumatic Cylinder | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
Yaw | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.08 arc-sec | |||
Yaw | < 0.08 arc-sec | |||
Yaw Runout | Axial Runout | 10 µm | 7 µm | 4 µm |
Radial Runout | 10 µm | 7 µm | 4 µm | |
Wobble | 20 arc-sec | 10 arc-sec | 6 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.01 arc-sec | |||
Yaw | ~0.01 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.5 m/s | |||
Max Linear Acceleration [3] | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Roll | #colspan#180 deg/s | |||
Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
YAW | >3600 deg/s² | |||
Max Payload | 10 kg | |||
Assembly Mass | 105 kg |
Model | AI-HH-300XY-106Z-104R | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 300 mm (+/- 150 mm) | |||
Travel - Z | 106 mm (+ 106 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 18 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 504.2 mm x 500 mm x 519.9 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Pneumatic Cylinder | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
Yaw | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.08 arc-sec | |||
Yaw | < 0.08 arc-sec | |||
Yaw Runout | Axial Runout | 12 µm | 9 µm | 6 µm |
Radial Runout | 12 µm | 9 µm | 6 µm | |
Wobble | 25 arc-sec | 15 arc-sec | 10 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.01 arc-sec | |||
Yaw | 0.02 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.5 m/s | |||
Max Linear Acceleration [3] | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Roll | 180 deg/s | |||
Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
YAW | >3600 deg/s² | |||
Max Payload | 7.5 kg | |||
Assembly Mass | 105 kg |
Model | AI-HH-200XY-40Z-104R | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 200 mm(+/- 100 mm) | |||
Travel - Z | 20 mm (+ 20 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 11 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 399 mm x 359 mm x 318.9 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Pneumatic Cylinder | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
Yaw | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.08 arc-sec | |||
Yaw | < 0.08 arc-sec | |||
Yaw Runout | Axial Runout | 12 µm | 9 µm | 6 µm |
Radial Runout | 12 µm | 9 µm | 6 µm | |
Wobble | 25 arc-sec | 15 arc-sec | 10 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.01 arc-sec | |||
Yaw | 0.02 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.5 m/s | |||
Max Linear Acceleration [3] | 0.3 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Roll | 180 deg/s | |||
Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
YAW | >3600 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 46 kg |
Model | AI-HH-150XY-40Z-104R | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 150 mm (+/- 75 mm) | |||
Travel - Z | 20 mm (+ 20 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 11 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 399 mm x 350 mm x 308.9 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Pneumatic Cylinder | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
Yaw | +/- 0.5 arc-sec | +/- 0.3 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 12 µm | 9 µm | 6 µm |
Radial Runout | 12 µm | 9 µm | 6 µm | |
Wobble | 25 arc-sec | 15 arc-sec | 10 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | #colspan#~0.01 arc-sec | |||
Yaw | 0.02 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.5 m/s | |||
Max Linear Acceleration [3] | 0.4 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Roll | 180 deg/s | |||
Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
YAW | >3600 deg/s² | |||
Max Payload | 5 kg | |||
Assembly Mass | 34 kg |
Model | AI-HH-100XY-24Z-56R-MS | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 100 mm (+/- 50 mm) | |||
Travel - Z | 12 mm (+ 12 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 262.5 mm x 246 mm x 250.8 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Magnetic Spring (Constant Force) | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | #colspan# < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.02 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.5 m/s | |||
Max Linear Acceleration [3] | 0.5 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Roll | 180 deg/s | |||
Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
YAW | >3600 deg/s² | |||
Max Payload | 2.5 kg | |||
Assembly Mass | 20 kg |
Model | AI-HH-100XY-24Z-56R-CM,MS | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 100 mm (+/- 50 mm) | |||
Travel - Z | 12 mm (+ 12 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 10 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 262.5 mm x 246 mm x 218.8 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Pneumatic Cylinder | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.02 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.05 m/s | |||
Max Linear Acceleration [3] | 0.1 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Roll | 180 deg/s | |||
Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
YAW | >3600 deg/s² | |||
Max Payload | 2.5 kg | |||
Assembly Mass | 13.1 kg |
Model | AI-HH-100XY-24Z-56R | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 100 mm (+/- 50 mm) | |||
Travel - Z | 12 mm (+ 12 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 11 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 244 mm x 244 mm x 233.8 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Pneumatic Cylinder | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.02 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.05 m/s | |||
Max Linear Acceleration [3] | 0.5 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Roll | 180 deg/s | |||
Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
YAW | >3600 deg/s² | |||
Max Payload | 2.5 kg | |||
Assembly Mass | 18.4 kg |
Model | AI-HH-100XY-6Z-56R-CM | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 100 mm (+/- 50 mm) | |||
Travel - Z | 6 mm (+ 6 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 3 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 200 mm x 184 mm x 200.5 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Pneumatic Cylinder | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.03 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.05 m/s | |||
Max Linear Acceleration [3] | 0.1 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Roll | 180 deg/s | |||
Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
YAW | >3600 deg/s² | |||
Max Payload | 2 kg | |||
Assembly Mass | 10 kg |
Model | AI-HH-100XY-6Z-56R | |||
Stage | Hybrid Hexapod (6 DOF) | |||
Travel - XY | 100 mm (+/- 50 mm) | |||
Travel - Z | 6 mm (+ 6 mm/- 0 mm) | |||
Travel - Pitch & Roll | +/- 3 deg | |||
Travel - Yaw | 360 deg continuous | |||
Dimensions (Length x Width x Height) | 244 mm x 244 mm x 220.5 mm | |||
Drives | XY, Pitch & Roll: Direct Drive (Ironless Core Linear Motor) Yaw: Torque Motor |
|||
Feedback | Linear Axes: Non-Contact Optical Linear Encoder Rotary Axis: Non-Contact Optical Rotary Encoder |
|||
Bearings | Crossed Roller Bearings | |||
Counterbalance | Pneumatic Cylinder | |||
Cables | High Flex, 10M Cycle, 3m Length | |||
Structure | Anodized Aluminum 6061-T6 | |||
Environment | Ambient Optional: Vacuum 10-5 Torr, Vacuum 10-7 Torr |
|||
Operating Temperature | 0°C to 50°C | |||
Humidity | 10% to 80% Non-Condensing | |||
Performance Specifications [1] | (STD) | ULTRA | NANO | |
Bidrectional Repeatability | XY | +/- 80 nm | +/- 50 nm | |
Z | +/- 80 nm | +/- 50 nm | ||
Pitch And Roll | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Yaw | +/- 0.6 arc-sec | +/- 0.4 arc-sec | ||
Backlash | XY | 0 nm / arc-sec (no backlash on any axis) |
||
Z | ||||
Pitch And Roll | ||||
Yaw | ||||
Minimum Incremental Step Size | XY | < 20 nm | ||
Z | < 20 nm | |||
Pitch And Roll | < 0.1 arc-sec | |||
Yaw | < 0.1 arc-sec | |||
Yaw Runout | Axial Runout | 15 µm | 12 µm | 10 µm |
Radial Runout | 15 µm | 12 µm | 10 µm | |
Wobble | 25 arc-sec | 20 arc-sec | 15 arc-sec | |
Resolution | XY | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Z | ||||
Pitch And Roll | ~0.03 arc-sec | |||
Yaw | 0.04 arc-sec | |||
Orthogonality | XY | 20 arc-sec | 5 arc-sec | 1 arc-sec |
XZ & YZ | 250 arc-sec | 200 arc-sec | 50 arc-sec | |
Max Linear Velocity [3] | 0.4 m/s | |||
Max Linear Acceleration [3] | 0.5 G | |||
Max Angular Velocity [3] | Pitch And Roll | 180 deg/s | ||
Roll | 180 deg/s | |||
Max Angular Acceleration [3] | PITCH AND ROLL | >1800 deg/s² | ||
YAW | >3600 deg/s² | |||
Max Payload | 2 kg | |||
Assembly Mass | 17.2 kg |
Model | AI-LM-15000-Z-ABCB-HF | ||
Stage | Vertical Z Stage | ||
Travel | 150mm (+/- 75mm) | ||
Dimensions (Length x Width x Height) | 215mm x 50mm x 353mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Air Bearing Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.4 µm |
Bidirectional Repeatability | +/- 75 nm | +/- 45 nm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness In Y | +/- 2.5 µm | +/- 1.5 µm | +/- 1.2 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch [2] | +/- 15.0 arc-sec | ||
Yaw | +/- 15.0 arc-sec | ||
Roll | +/- 8.0 arc-sec | ||
Max Velocity [3] | 0.25 m/s | ||
Max Peak Acceleration [3] | 4.0 G | ||
Max Payload Capability | 25 kg | ||
Assembly Mass | 6.5 kg |
Model | AI-LM-15000-Z-ABCB | ||
Stage | Vertical Z Stage | ||
Travel | 150mm (+/- 75mm) | ||
Dimensions (Length x Width x Height) | 200mm x 50mm x 353mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Air Bearing Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.4 µm |
Bidirectional Repeatability | +/- 75 nm | +/- 45 nm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness In Y | +/- 2.5 µm | +/- 1.5 µm | +/- 1.2 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch [2] | +/- 15.0 arc-sec | ||
Yaw | +/- 15.0 arc-sec | ||
Roll | +/- 8.0 arc-sec | ||
Max Velocity [3] | 0.25 m/s | ||
Max Peak Acceleration [3] | 2.5 G | ||
Max Payload Capability | 25 kg | ||
Assembly Mass | 5.6 kg |
Model | AI-LM-10000-Z-ABCB-HF | ||
Stage | Vertical Z Stage | ||
Travel | 100mm (+/- 50mm) | ||
Dimensions (Length x Width x Height) | 215mm x 50mm x 323mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Air Bearing Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.3 µm |
Bidirectional Repeatability | +/- 75 nm | +/- 45 nm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness In Y | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
Pitch [2] | +/- 10.0 arc-sec | ||
Yaw | +/- 10.0 arc-sec | ||
Roll | +/- 6.0 arc-sec | ||
Max Velocity [3] | 0.25 m/s | ||
Max Peak Acceleration [3] | 4.5 G | ||
Max Payload Capability | 25 kg | ||
Assembly Mass | 5.9 kg |
Model | AI-LM-10000-Z-ABCB | ||
Stage | Vertical Z Stage | ||
Travel | 100mm (+/- 50mm) | ||
Dimensions (Length x Width x Height) | 183.5mm x 50mm x 323mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Air Bearing Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.3 µm |
Bidirectional Repeatability | +/- 75 nm | +/- 45 nm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness In Y | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
Pitch [2] | +/- 10.0 arc-sec | ||
Yaw | +/- 10.0 arc-sec | ||
Roll | +/- 6.0 arc-sec | ||
Max Velocity [3] | 0.25 m/s | ||
Max Peak Acceleration [3] | 3.5 G | ||
Max Payload Capability | 12 kg | ||
Assembly Mass | 4.7 kg |
Model | AI-LM-6000-Z-ABCB | ||
Stage | Vertical Z Stage | ||
Travel | 60mm (+/- 30mm) | ||
Dimensions (Length x Width x Height) | 183.5mm x 45mm x 220mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Air Bearing Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
Bidirectional Repeatability | +/- 75 nm | +/- 45 nm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness In Y | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
Pitch [2] | +/- 10.0 arc-sec | ||
Yaw | +/- 10.0 arc-sec | ||
Roll | +/- 6.0 arc-sec | ||
Max Velocity [3] | 0.25 m/s | ||
Max Peak Acceleration [3] | 2.5 G | ||
Max Payload Capability | 10 kg | ||
Assembly Mass | 2.9 kg |
Model | AI-LM-7000-50N-Z-CB | ||
Stage | Vertical Z Stage | ||
Travel | 70 mm (+ 70 mm/- 0 mm) | ||
Dimensions (Length x Width x Height) | 175 mm x 125 mm x 250 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 5 µm | +/- 1.0 µm | +/- 0.5 µm |
Bidirectional Linear Repeatability | +/- 100 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 4 µm | +/- 1.0 µm | +/- 0.5 µm |
Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
Pitch | +/- 15 arc-sec | ||
Yaw | +/- 15 arc-sec | ||
Roll | +/- 15 arc-sec | ||
Max Velocity [3] | 0.25 m/s | ||
Max Acceleration [3] | 1.0 G | ||
Max Payload Capability | 30 kg | ||
Force | 50 N | ||
Assembly Mass | 13.0 kg |
Model | AI-LM-6000-50N-Z-CB | ||
Stage | Vertical Z Stage | ||
Travel | 60 mm (+ 60 mm/- 0 mm) | ||
Dimensions (Length x Width x Height) | 175 mm x 125 mm x 235 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Counterbalance | Pneumatic Cylinder | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 5 µm | +/- 1.0 µm | +/- 0.5 µm |
Bidirectional Linear Repeatability | +/- 75 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 4 µm | +/- 1.0 µm | +/- 0.5 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch | +/- 12 arc-sec | ||
Yaw | +/- 12 arc-sec | ||
Roll | +/- 12 arc-sec | ||
Max Velocity [3] | 0.25 m/s | ||
Max Acceleration [3] | 1.0 G | ||
Max Payload Capability | 20 kg | ||
Force | 50 N | ||
Assembly Mass | 12.3 kg |
Model | AI-XBS-15000-UII | |
Stage | Linear Stage | |
Travel | 150 mm (+/- 75 mm) | |
Dimensions (Length x Width x Height) | 513 mm x 388 mm x 100 mm | |
Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
(-Pbrk) Dimensions (Length x Width x Height) | 558 mm x 388 mm x 100 mm | |
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
Feedback | Non-Contact Optical Linear Encoder | |
Bearings | Dual Recirculating Ball Rail Bearings | |
Cables | High Flex, 10M Cycle, 3m | |
Structure | Anodized Aluminum 6061-T6 | |
Environment | Ambient |
|
Operating Temperature | 0°C to 50°C | |
Humidity | 10% to 80% Non-Condensing | |
Performance Specifications [1] | (STD) | ULTRA |
Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm |
Backlash | 0 nm | |
Bidirectional Repeatability | +/- 1.0 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
Straightness In Y | +/- 3 µm | +/- 2 µm |
Flatness [2] | +/- 3 µm | +/- 2 µm |
Pitch [2] | +/- 12 arc-sec | |
Yaw | +/- 12 arc-sec | |
Roll | +/- 12 arc-sec | |
Max Velocity [3] | 0.3 m/s | |
Max Peak Acceleration [3] | 0.5 G | |
Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
Max Payload Capability With Axis Oriented Vertically | 80 kg | |
Assembly Mass | 25 kg |
Model | AI-XBS-10000-UII | |
Stage | Linear Stage | |
Travel | 100 mm (+/- 50 mm) | |
Dimensions (Length x Width x Height) | 463 mm x 388 mm x 100 mm | |
Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) |
|
(-Pbrk) Dimensions (Length x Width x Height) | 508 mm x 388 mm x 100 mm | |
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
Feedback | Non-Contact Optical Linear Encoder | |
Bearings | Dual Recirculating Ball Rail Bearings | |
Cables | High Flex, 10M Cycle, 3m | |
Structure | Anodized Aluminum 6061-T6 | |
Environment | Ambient |
|
Operating Temperature | 0°C to 50°C | |
Humidity | 10% to 80% Non-Condensing | |
Performance Specifications [1] | (STD) | ULTRA |
Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm |
Backlash | 0 nm | |
Bidirectional Repeatability | +/- 1.0 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
|
Straightness In Y | +/- 3 µm | +/- 2 µm |
Flatness [2] | +/- 3 µm | +/- 2 µm |
Pitch [2] | +/- 12 arc-sec | |
Yaw | +/- 12 arc-sec | |
Roll | +/- 12 arc-sec | |
Max Velocity [3] | 0.3 m/s | |
Max Peak Acceleration [3] | 0.5 G | |
Max Payload Capability With Axis Oriented Horizontally | 150 kg | |
Max Payload Capability With Axis Oriented Vertically | 80 kg | |
Assembly Mass | 24 kg |
Model | AI-SBS-15000-UII | |
Stage | Linear Stage | |
Travel | 150 mm (+/- 75 mm) | |
Dimensions (Length x Width x Height) | 443 mm x 258 mm x 69 mm | |
Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
(-Pbrk) Dimensions (Length x Width x Height) | 465 mm x 258 mm x 69 mm | |
(-Ebrk) Dimensions (Length x Width x Height) | 515 mm x 258 mm x 69 mm | |
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
Feedback | Non-Contact Optical Linear Encoder | |
Bearings | Dual Recirculating Ball Rail Bearings | |
Cables | High Flex, 10M Cycle, 3m Length | |
Structure | Anodized Aluminum 6061-T6 | |
Environment | Ambient |
|
Operating Temperature | 0°C to 50°C | |
Humidity | 10% to 80% Non-Condensing | |
Performance Specifications [1] | (STD) | ULTRA |
Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm |
Backlash | 0 nm | |
Bidirectional Repeatability | +/- 1.0 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
Straightness In Y | +/- 3 µm | +/- 2 µm |
Flatness [2] | +/- 3 µm | +/- 2 µm |
Pitch [2] | +/- 12 arc-sec | |
Yaw | +/- 12 arc-sec | |
Roll | +/- 12 arc-sec | |
Max Velocity [3] | 0.3 m/s | |
Max Peak Acceleration [3] | 0.5 G | |
Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
Max Payload Capability With Axis Oriented Vertically | 40 kg | |
Assembly Mass | 11.5 kg |
Model | AI-SBS-10000-UII | |
Stage | Linear Stage | |
Travel | 100 mm (+/- 50 mm) | |
Dimensions (Length x Width x Height) | 393 mm x 258 mm x 69 mm | |
Brake Options | Standard: No Brake Included Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
|
(-Pbrk) Dimensions (Length x Width x Height) | 415 mm x 258 mm x 69 mm | |
(-Ebrk) Dimensions (Length x Width x Height) | 465 mm x 258 mm x 69 mm | |
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | |
Feedback | Non-Contact Optical Linear Encoder | |
Bearings | Dual Recirculating Ball Rail Bearings | |
Cables | High Flex, 10M Cycle, 3m Length | |
Structure | Anodized Aluminum 6061-T6 | |
Environment | Ambient |
|
Operating Temperature | 0°C to 50°C | |
Humidity | 10% to 80% Non-Condensing | |
Performance Specifications [1] | (STD) | ULTRA |
Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm |
Backlash | 0 nm | |
Bidirectional Repeatability | +/- 1.0 µm | |
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
|
Straightness In Y | +/- 3 µm | +/- 2 µm |
Flatness [2] | +/- 3 µm | +/- 2 µm |
Pitch [2] | +/- 12 arc-sec | |
Yaw | +/- 12 arc-sec | |
Roll | +/- 12 arc-sec | |
Max Velocity [3] | 0.3 m/s | |
Max Peak Acceleration [3] | 0.5 G | |
Max Payload Capability With Axis Oriented Horizontally | 70 kg | |
Max Payload Capability With Axis Oriented Vertically | 40 kg | |
Assembly Mass | 11 kg |
Model | AI-LM-15000-UII-WL | ||
Stage | Linear Stage | ||
Travel | 150 mm (+/- 75 mm) | ||
Dimensions (Length x Width x Height) | 470 mm x 388 mm x 88 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 3 µm | +/- 2 µm | |
Flatness [2] | +/- 3 µm | +/- 2 µm | |
Pitch | 10 arc-sec | ||
Yaw | 10 arc-sec | ||
Roll | 6 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max (Vertical) Payload Capability | 100 kg | ||
Max (Horizontal) Payload Capability | 70 kg | ||
Assembly Mass | 22 kg |
Model | AI-LM-10000-UII-WL | ||
Stage | Linear Stage | ||
Travel | 100 mm (+/- 50 mm) | ||
Dimensions (Length x Width x Height) | 420 mm x 388 mm x 88 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 3 µm | +/- 2 µm | |
Flatness [2] | +/- 3 µm | +/- 2 µm | |
Pitch | 10 arc-sec | ||
Yaw | 10 arc-sec | ||
Roll | 6 arc-sec | ||
Max Velocity [3] | 2.0 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max (Vertical) Payload Capability | 100 kg | ||
Max (Horizontal) Payload Capability | 70 kg | ||
Assembly Mass | 20 kg |
Model | AI-LM-15000-UII-W | ||
Stage | Linear Stage | ||
Travel | 150 mm (+/- 75 mm) | ||
Dimensions (Length x Width x Height) | 370 mm x 388 mm x 88 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 3 µm | +/- 2 µm | |
Flatness [2] | +/- 3 µm | +/- 2 µm | |
Pitch | 10 arc-sec | ||
Yaw | 10 arc-sec | ||
Roll | 6 arc-sec | ||
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max (Vertical) Payload Capability | 100 kg | ||
Max (Horizontal) Payload Capability | 70 kg | ||
Assembly Mass | 22 kg |
Model | AI-LM-10000-UII-W | ||
Stage | Linear Stage | ||
Travel | 100 mm (+/- 50 mm) | ||
Dimensions (Length x Width x Height) | 320 mm x 388 mm x 88 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 3 µm | +/- 2 µm | |
Flatness [2] | +/- 3 µm | +/- 2 µm | |
Pitch | 10 arc-sec | ||
Yaw | 10 arc-sec | ||
Roll | 6 arc-sec | ||
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max (Vertical) Payload Capability | 100 kg | ||
Max (Horizontal) Payload Capability | 70 kg | ||
Assembly Mass | 20 kg |
Model | AI-LM-15000-UII-SN | ||
Stage | Linear Stage | ||
Travel | 150 mm (+/- 75 mm) | ||
Dimensions (Length x Width x Height) | 330 mm x 72 mm x 57 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Straightness | +/- 3 µm | +/- 2 µm | |
Flatness [2] | +/- 3 µm | +/- 2 µm | |
Pitch | 10 arc-sec | ||
Yaw | 10 arc-sec | ||
Roll | 6 arc-sec | ||
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 4.0 G | ||
Max (Vertical) Payload Capability | 40 kg | ||
Max (Horizontal) Payload Capability | 32 kg | ||
Assembly Mass | 2.5 kg |
Model | AI-LM-10000-UII-SN | ||
Stage | Linear Stage | ||
Travel | 100 mm (+/- 50 mm) | ||
Dimensions (Length x Width x Height) | 280 mm x 72 mm x 57 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) |
||
Straightness | +/- 3 µm | +/- 2 µm | |
Flatness [2] | +/- 3 µm | +/- 2 µm | |
Pitch | 10 arc-sec | ||
Yaw | 10 arc-sec | ||
Roll | 6 arc-sec | ||
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 4.0 G | ||
Max (Vertical) Payload Capability | 40 kg | ||
Max (Horizontal) Payload Capability | 32 kg | ||
Assembly Mass | 2.1 kg |
Model | AI-LM-15000-UII-S | ||
Stage | Linear Stage | ||
Travel | 150 mm (+/- 75 mm) | ||
Dimensions (Length x Width x Height) | 370 mm x 208 mm x 82.5 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 3 µm | +/- 2 µm | |
Flatness [2] | +/- 3 µm | +/- 2 µm | |
Pitch | 10 arc-sec | ||
Yaw | 10 arc-sec | ||
Roll | 6 arc-sec | ||
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 4.0 G | ||
Max (Vertical) Payload Capability | 40 kg | ||
Max (Horizontal) Payload Capability | 32 kg | ||
Assembly Mass | 9 kg |
Model | AI-LM-10000-UII-S | ||
Stage | Linear Stage | ||
Travel | 100 mm (+/- 50 mm) | ||
Dimensions (Length x Width x Height) | 320 mm x 208 mm x 82.5 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 3 µm | +/- 2 µm | |
Flatness [2] | +/- 3 µm | +/- 2 µm | |
Pitch | 10 arc-sec | ||
Yaw | 10 arc-sec | ||
Roll | 6 arc-sec | ||
Max Velocity [3] | 2 m/s | ||
Max Acceleration [3] | 4.0 G | ||
Max (Vertical) Payload Capability | 40 kg | ||
Max (Horizontal) Payload Capability | 32 kg | ||
Assembly Mass | 8 kg |
Model | AI-LM-15000-UII | ||
Stage | Linear Stage | ||
Travel | 150 mm (+/- 75 mm) | ||
Dimensions (Length x Width x Height) | 370 mm x 258 mm x 82.5 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 6 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness In Y | +/- 3 µm | +/- 2 µm | |
Flatness [2] | +/- 3 µm | +/- 2 µm | |
Pitch [2] | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 3 arc-sec | ||
Max Velocity [3] | 2.5 m/s | ||
Max Peak Acceleration [3] | 10.0 G | ||
Max Payload Capability | 70 kg | ||
Assembly Mass | 12 kg |
Model | AI-LM-10000-UII | ||
Stage | Linear Stage | ||
Travel | 100 mm (+/- 50 mm) | ||
Dimensions (Length x Width x Height) | 320 mm x 258 mm x 82.5 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Dual Recirculating Ball Rail Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 5 µm | +/- 2 µm | +/- 1 µm |
Bidirectional Linear Repeatability | +/- 0.5 µm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness In Y | +/- 3 µm | +/- 2 µm | |
Flatness [2] | +/- 3 µm | +/- 2 µm | |
Pitch [2] | +/- 5 arc-sec | ||
Yaw | +/- 5 arc-sec | ||
Roll | +/- 3 arc-sec | ||
Max Velocity [3] | 2 m/s | ||
Max Peak Acceleration [3] | 10.0 G | ||
Max Payload Capability | 70 kg | ||
Assembly Mass | 11 kg |
Model | AI-LM-160x100-XY | ||
Stage | Monolithic XY Stage (Asymmetrical) |
||
Travel - X | 160 mm (+/- 80 mm) | ||
Travel - Y | 100 mm (+/- 50 mm) | ||
Dimensions (Length X Width X Height) | 275 mm x 175 mm x 80 mm | ||
Drives | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm | +/- 0.7 µm | +/- 0.4 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1.0 µm | +/- 0.7 µm | +/- 0.4 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch [2] | +/- 7.5 arc-sec | ||
Yaw | +/- 7.5 arc-sec | ||
Roll | +/- 4.0 arc-sec | ||
Orthogonality | +/- 10.0 arc-sec | +/- 2.5 arc-sec | +/- 0.5 arc-sec |
Max Velocity [3] | 1 m/s | ||
Max Peak Acceleration [3] | 1.5 G | ||
Max Payload Capability | 25 kg | ||
Assembly Mass | 11.4 kg |
Model | AI-VBS-15000 | ||
Stage | Linear Stage | ||
Travel | 150 mm (+/- 75 mm) | ||
Dimensions (Length x Width x Height) | 370 mm x 120 mm x 50 mm | ||
Brake Options | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
||
(-Pbrk) Dimensions (Length x Width x Height) | 404 mm x 120 mm x 50 mm | ||
(-Ebrk) Dimensions (Length x Width x Height) | 452 mm x 120 mm x 50 mm | ||
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm | +/- 1.0 µm | +/- 0.4 µm |
Backlash | 0 nm | ||
Bidirectional Linear Repeatability | +/- 100 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 3.5 µm | +/- 2.5 µm | +/- 1.5 µm |
Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
Pitch [2] | +/- 15 arc-sec | ||
Yaw | +/- 15 arc-sec | ||
Roll | +/- 15 arc-sec | ||
Max Velocity [3] | 0.3 m/s | ||
Max Peak Acceleration [3] | 1.0 G | ||
Max Payload Capability W/ Axis Oriented Horizontal | 25 kg | ||
Max Payload Capability W/ Axis Oriented Vertical | 12 kg | ||
Assembly Mass | 4.6 kg |
Model | AI-VBS-10000 | ||
Stage | Linear Stage | ||
Travel | 100 mm (+/- 50 mm) | ||
Dimensions (Length x Width x Height) | 295 mm x 120 mm x 50 mm | ||
Brake Options | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
||
(-Pbrk) Dimensions (Length x Width x Height) | 329 mm x 120 mm x 50 mm | ||
(-Ebrk) Dimensions (Length x Width x Height) | 377 mm x 120 mm x 50 mm | ||
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm | +/- 1.0 µm | +/- 0.3 µm |
Backlash | 0 nm | ||
Bidirectional Linear Repeatability | +/- 100 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.2 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch [2] | +/- 15 arc-sec | ||
Yaw | +/- 15 arc-sec | ||
Roll | +/- 15 arc-sec | ||
Max Velocity [3] | 0.3 m/s | ||
Max Peak Acceleration [3] | 1.0 G | ||
Max Payload Capability W/ Axis Oriented Horizontal | 25 kg | ||
Max Payload Capability W/ Axis Oriented Vertical | 12 kg | ||
Assembly Mass | 3.8 kg |
Model | AI-VBS-6000 | ||
Stage | Linear Stage | ||
Travel | 60 mm (+/- 30 mm) | ||
Dimensions (Length x Width x Height) | 225 mm x 120 mm x 50 mm | ||
Brake Options | Standard: No Brake Optional: Pneumatic Release, Spring Engage Brake (-PBRK) Optional: Electric 24VDC Release, Spring Engage Brake (-EBRK) |
||
(-Pbrk) Dimensions (Length x Width x Height | 259 mm x 120 mm x 50 mm | ||
(-Ebrk) Dimensions (Length x Width x Height) | 307 mm x 120 mm x 50 mm | ||
Drive | Frameless Torque Motor, Precision Ball Screw (with Anti-Backlash Nut) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3 µm | +/- 0.7 µm | +/- 0.3 µm |
Backlash | 0 nm | ||
Bidirectional Linear Repeatability | +/- 100 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
Flatness [2] | +/- 2.5 µm | +/- 1.5 µm | |
Pitch [2] | +/- 15 arc-sec | ||
Yaw | +/- 15 arc-sec | ||
Roll | +/- 15 arc-sec | ||
Max Velocity [3] | 0.3 m/s | ||
Max Peak Acceleration [3] | 1.0 G | ||
Max Payload Capability W/ Axis Oriented Horizontal | 20 kg | ||
Max Payload Capability W/ Axis Oriented Vertical | 12 kg | ||
Assembly Mass | 3 kg |
Model | AI-CM-15000-150-XY | ||
Stage | Monolithic XY Stage with Open Center |
||
Travel | 150 mm (+/- 75 mm) | ||
Dimensions (Length x Width x Height) | 282.5 mm x 282.5 mm x 52 mm | ||
Aperture / Thru | 150 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.0 µm | +/- 0.5 µm |
Bidirectional Linear Repeatability | +/- 50 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 4.0 µm | +/- 1.0 µm | +/- 0.5 µm |
Flatness [2] | +/- 5.0 µm | +/- 2.0 µm | |
Pitch [2] | +/- 15.0 arc-sec | ||
Yaw | +/- 15.0 arc-sec | ||
Roll | +/- 15.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 0.9 m/s | ||
Bot Axis Max Velocity [3] | 0.5 m/s | ||
Top Axis Max Peak Acceleration [3] | 1.2 G | ||
Bot Axis Max Peak Acceleration [3] | 0.4 G | ||
Max Payload Capability | 12 kg | ||
Assembly Mass | 7.4 kg |
Model | AI-CM-10000-100-XY | ||
Stage | Monolithic XY Stage with Open Center |
||
Travel | 100 mm (+/- 50 mm) | ||
Dimensions (Length x Width x Height) | 229.5 mm x 229.5 mm x 52 mm | ||
Aperture / Thru | 100 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.0 µm | +/- 0.5 µm |
Bidirectional Linear Repeatability | +/- 50 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 3.0 µm | +/- 1.0 µm | +/- 0.5 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch [2] | +/- 12.0 arc-sec | ||
Yaw | +/- 12.0 arc-sec | ||
Roll | +/- 12.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 0.8 m/s | ||
Bot Axis Max Velocity [3] | 0.5 m/s | ||
Top Axis Max Peak Acceleration [3] | 1.6 G | ||
Bot Axis Max Peak Acceleration [3] | 0.6 G | ||
Max Payload Capability | 12 kg | ||
Assembly Mass | 5.6 kg |
Model | AI-CM-5000-050-XY | ||
Stage | Monolithic XY Stage with Open Center |
||
Travel | 60 mm (+/- 30 mm) | ||
Dimensions (Length x Width x Height) | 179.5 mm x 179.5 mm x 45 mm | ||
Aperture / Thru | 50 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.4 µm |
Bidirectional Linear Repeatability | +/- 50 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 3.0 µm | +/- 0.7 µm | +/- 0.4 µm |
Flatness [2] | +/- 2.5 µm | +/- 1.5 µm | |
Pitch [2] | +/- 12.0 arc-sec | ||
Yaw | +/- 12.0 arc-sec | ||
Roll | +/- 12.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 0.8 m/s | ||
Bot Axis Max Velocity [3] | 0.5 m/s | ||
Top Axis Max Peak Acceleration [3] | 3.0 G | ||
Bot Axis Max Peak Acceleration [3] | 1.0 G | ||
Max Payload Capability | 10 kg | ||
Assembly Mass | 3.2 kg |
Model | AI-CM-15000-XY | ||
Stage | Monolithic XY Stage | ||
Travel | 150 mm (+/- 75 mm) | ||
Dimensions (Length x Width x Height) | 225 mm x 225 mm x 60 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
Bidirectional Linear Repeatability | +/- 30 | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
Pitch [2] | +/- 15.0 arc-sec | ||
Yaw | +/- 15.0 arc-sec | ||
Roll | +/- 15.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 0.8 m/s | ||
Bot Axis Max Velocity [3] | 0.5 m/s | ||
Top Axis Max Peak Acceleration [3] | 1.0 G | ||
Bot Axis Max Peak Acceleration [3] | 0.4 G | ||
Max Payload Capability | 12 kg | ||
Assembly Mass | 8.5 kg |
Model | AI-CM-10000-XY | ||
Stage | Monolithic XY Stage | ||
Travel | 100 mm (+/- 50 mm) | ||
Dimensions (Length x Width x Height) | 184 mm x 184 mm x 60 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.3 µm |
Bidirectional Linear Repeatability | +/- 30 | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.0 µm | +/- 1.0 µm | +/- 0.3 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch [2] | +/- 12.0 arc-sec | ||
Yaw | +/- 12.0 arc-sec | ||
Roll | +/- 12.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 0.7 m/s | ||
Bot Axis Max Velocity [3] | 0.5 m/s | ||
Top Axis Max Peak Acceleration [3] | 1.2 G | ||
Bot Axis Max Peak Acceleration [3] | 0.6 G | ||
Max Payload Capability | 12 kg | ||
Assembly Mass | 5.8 kg |
Model | AI-CM-6000-XY | ||
Stage | Monolithic XY Stage | ||
Travel | 60 mm (+/- 30 mm) | ||
Dimensions (Length x Width x Height) | 125 mm x125 mm x 60 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings |
||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 |
||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.3 µm |
Bidirectional Linear Repeatability | +/- 30 | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.0 µm | +/- 0.7 µm | +/- 0.3 µm |
Flatness [2] | +/- 2.5 µm | +/- 1.5 µm | |
Pitch [2] | +/- 12.0 arc-sec | ||
Yaw | +/- 12.0 arc-sec | ||
Roll | +/- 12.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 0.9 m/s | ||
Bot Axis Max Velocity [3] | 0.6 | ||
Top Axis Max Peak Acceleration [3] | 3.0 G | ||
Bot Axis Max Peak Acceleration [3] | 1.2 G | ||
Max Payload Capability | 10 kg | ||
Assembly Mass | 2.9 kg |
Model | AI-CM-15000 | ||
Stage | Linear Stage | ||
Travel | 150 mm (+/- 75 mm) | ||
Dimensions (Length x Width x Height) | 229 mm x 120 mm x 32 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.4 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 3.5 µm | +/- 2.5 µm | +/- 1.5 µm |
Flatness [2] | +/- 4.0 µm | +/- 2.0 µm | |
Pitch [2] | +/- 15.0 arc-sec | ||
Yaw | +/- 15.0 arc-sec | ||
Roll | +/- 15.0 arc-sec | ||
Max Velocity [3] | 1.1 m/s | ||
Max Acceleration [3] | 1.8 G | ||
Max Payload Capability | 12 kg | ||
Assembly Mass | 2.5 kg |
Model | AI-CM-10000 | ||
Stage | Linear Stage | ||
Travel | 100 mm (+/- 50 mm) | ||
Dimensions (Length x Width x Height) | 190 mm x 120 mm x 32 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 1.0 µm | +/- 0.3 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.2 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch [2] | +/- 12.0 arc-sec | ||
Yaw | +/- 12.0 arc-sec | ||
Roll | +/- 12.0 arc-sec | ||
Max Velocity [3] | 1 m/s | ||
Max Acceleration [3] | 2.0 G | ||
Max Payload Capability | 12 kg | ||
Assembly Mass | 2.2 kg |
Model | AI-CM-6000 | ||
Stage | Linear Stage | ||
Travel | 60 mm (+/- 30 mm) | ||
Dimensions (Length x Width x Height) | 130 mm x 120 mm x 32 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | ||
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
Flatness [2] | +/- 2.5 µm | +/- 1.5 µm | |
Pitch [2] | +/- 12.0 arc-sec | ||
Yaw | +/- 12.0 arc-sec | ||
Roll | +/- 12.0 arc-sec | ||
Max Velocity [3] | 0.9 m/s | ||
Max Acceleration [3] | 3.0 G | ||
Max Payload Capability | 10 kg | ||
Assembly Mass | 1.4 kg |
Model | AI-LM-15000 | ||
Stage | Linear Stage | ||
Travel | 150 mm (+/- 75 mm) | ||
Dimensions (Length x Width x Height) | 275 mm x 120 mm x 45 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.4 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.2 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch Y [2] | +/- 15.0 arc-sec | ||
Yaw | +/- 15.0 arc-sec | ||
Roll | +/- 8.0 arc-sec | ||
Max Velocity [3] | 2.1 m/s | ||
Max Acceleration [3] | 6.0 G | ||
Max Payload Capability | 25 kg | ||
Assembly Mass | 4.4 kg |
Model | AI-LM-10000 | ||
Stage | Linear Stage | ||
Travel | 100 mm (+/- 50 mm) | ||
Dimensions (Length x Width x Height) | 244 mm x 120 mm x 45 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.3 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
Pitch Y [2] | +/- 10.0 arc-sec | ||
Yaw | +/- 10.0 arc-sec | ||
Roll | +/- 6.0 arc-sec | ||
Max Velocity [3] | 1.8 m/s | ||
Max Acceleration [3] | 7.0 G | ||
Max Payload Capability | 25 kg | ||
Assembly Mass | 4 kg |
Model | AI-LM-6000 | ||
Stage | Linear Stage | ||
Travel | 60 mm (+/- 30 mm) | ||
Dimensions (Length x Width x Height) | 168 mm x 120 mm x 40 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.5 µm | +/- 1.5 µm | +/- 1.0 µm |
Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
Pitch Y [2] | +/- 10.0 arc-sec | ||
Yaw | +/- 10.0 arc-sec | ||
Roll | +/- 6.0 arc-sec | ||
Max Velocity [3] | 1.2 m/s | ||
Max Acceleration [3] | 5.0 G | ||
Max Payload Capability | 20 kg | ||
Assembly Mass | 2.2 kg |
Model | AI-LM-15000-150-XY | ||
Stage | Monolithic XY Stage with Open Center | ||
Travel | 150 mm (+/- 75 mm) | ||
Dimensions (Length x Width x Height) | 326.5 mm x 326.5 mm x 68 mm | ||
Aperture / Thru | 150 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.2 µm | +/- 0.6 µm |
Bidirectional Linear Repeatability | +/- 50 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 3.0 µm | +/- 1.2 µm | +/- 0.6 µm |
Flatness [2] | +/- 3.0 µm | +/- 1.5 µm | |
Pitch [2] | +/- 15.0 arc-sec | ||
Yaw | +/- 15.0 arc-sec | ||
Roll | +/- 15.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 1.7 m/s | ||
Bot Axis Max Velocity [3] | 1.0 m/s | ||
Top Axis Max Peak Acceleration [3] | 4.0 G | ||
Top Axis Max Peak Acceleration [3] | 1.4 G | ||
Max Payload Capability | 25 kg | ||
Assembly Mass | 14 kg |
Model | AI-LM-10000-100-XY | ||
Stage | Monolithic XY Stage with Open Center | ||
Travel | 100 mm (+/- 50 mm) | ||
Dimensions (Length x Width x Height) | 230 mm x 230 mm x 64 mm | ||
Aperture / Thru | 100 mm | ||
Motor | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length Optional: Cable Management Brackets ("-CAB") |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 4.0 µm | +/- 1.0 µm | +/- 0.5 µm |
Bidirectional Linear Repeatability | +/- 50 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 2.0 µm | +/- 1.0 µm | +/- 0.5 µm |
Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
Pitch [2] | +/- 10.0 arc-sec | ||
Yaw | +/- 10.0 arc-sec | ||
Roll | +/- 10.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 1.4 m/s | ||
Bot Axis Max Velocity [3] | 0.8 m/s | ||
Top Axis Max Peak Acceleration [3] | 4.0 G | ||
Top Axis Max Peak Acceleration [3] | 1.6 G | ||
Max Payload Capability | 25 kg | ||
Assembly Mass | 6.5 kg |
Model | AI-LM-10000-XY | ||
Stage | Monolithic XY Stage | ||
Travel | 100 mm (+/- 50 mm) | ||
Dimensions (Length x Width x Height) | 244 mm x 244 mm x 80 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) | ||
Feedback | Non-Contact Optical Linear Encoder | ||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length | ||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.7 µm | +/- 0.3 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1.0 µm | +/- 0.7 µm | +/- 0.3 µm |
Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
Pitch [2] | +/- 10.0 arc-sec | ||
Yaw | +/- 10.0 arc-sec | ||
Roll | +/- 6.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 1.4 m/s | ||
Bot Axis Max Velocity [3] | 0.8 m/s | ||
Top Axis Max Peak Acceleration [3] | 4.0 G | ||
Bot Axis Max Peak Acceleration [3] | 1.6 G | ||
Max Payload Capability | 25 kg | ||
Assembly Mass | 13 kg |
Model | AI-LM-6000-XY | ||
Stage | Monolithic XY Stage | ||
Travel | 60 mm (+/- 30 mm) | ||
Dimensions (Length x Width x Height) | 152.5 mm x 152.5 mm x 80 mm | ||
Drive | Direct Drive (Ironless Core Linear Motor) |
||
Feedback | Non-Contact Optical Linear Encoder |
||
Bearings | Crossed Roller Bearings | ||
Cables | High Flex, 10M Cycle, 3m Length |
||
Structure | Anodized Aluminum 6061-T6 | ||
Environment | Ambient Optional: Clean Room and Vacuum (10-6 Torr) |
||
Operating Temperature | 0°C to 50°C | ||
Humidity | 10% to 80% Non-Condensing | ||
Performance Specifications [1] | (STD) | ULTRA | NANO |
Linear Displacement Accuracy | +/- 3.0 µm | +/- 0.5 µm | +/- 0.2 µm |
Bidirectional Linear Repeatability | +/- 30 nm | ||
Resolution | Standard: ~4.88 nm after 4096 Interpolation Optional: Digital AQB (1 nm - 5000 nm) and Absolute (1 nm - 100 nm) |
||
Straightness | +/- 1.0 µm | +/- 0.5 µm | +/- 0.2 µm |
Flatness [2] | +/- 2.0 µm | +/- 1.0 µm | |
Pitch [2] | +/- 10.0 arc-sec | ||
Yaw | +/- 10.0 arc-sec | ||
Roll | +/- 6.0 arc-sec | ||
Orthogonality | +/- 20.0 arc-sec | +/- 5.0 arc-sec | +/- 1.0 arc-sec |
Top Axis Max Velocity [3] | 1.2 m/s | ||
Bot Axis Max Velocity [3] | 0.7 m/s | ||
Top Axis Max Peak Acceleration [3] | 5.0 G | ||
Bot Axis Max Peak Acceleration [3] | 2.0 G | ||
Max Payload Capability | 20 kg | ||
Assembly Mass | 4.7 kg |