ALIO Industries provides optimal motion control solutions for its customers by constantly focussing on nanometer-level precision and repeatability. There is much debate about the validity of claims made in the area of motion control when it comes to extreme accuracy, and the differences between claims of nanometer-level precision and repeatability and its actual attainment are a hot topic today.
Ultimately erroneous claims lead to customer dissatisfaction and failure of often critical industrial applications, and it is because of this that ALIO Industries is at pains to prove its nanometer-level motion control credentials, and also to move the conversation on to facilitate the better understanding of how the motion control world needs to accommodate and understand true nano-precision.
To help in this endeavour, ALIO Industries has been busy redefining the language that the most accurate of motion control systems should use, and has backed this up by registering brand names that it alone can use to demonstrate the company’s unique status in the sector.
Bill Hennessey, CEO at ALIO Industries explains, “First off, we have registered the phrases True Nano Positioning® and True Nano®. Nano has become the new buzz word in the motion and manufacturing sectors in recent years. Most stage companies have recently started to claim “nano” as a marketing hook for their products. ALIO has focused on building nano precision stages for nearly 20 years and we felt it necessary to protect our long-term IP and commitment with trademarks. Companies offer nanometer-resolution or large nano errors with uni-directional planar numbers which are actually micron errors on true stage performance. Resolution means absolutely nothing in the True Nano® world.”
ALIO Industries has also registered the phrase 6-D Nano Precision®. ALIO designs, builds and tests stages in all 6 degrees of freedom, believing a nano precision stage most importantly must have sub-micron straightness and flatness as well. Some motion companies claim nano repeatability and accuracy (which are a planar numbers) knowing the customer application needs ultra-precise straightness and flatness to succeed. Customers’ assumptions of nano precision are mostly based on 2 D planar precision without focus on 6-D. ALIO wanted to define a term that represented the higher levels that its products could attain, and therefore set itself apart from companies that make unproven data sheet claims of accuracy.
Walter Silvesky, VP Sales continues, “Another area that we consistently drive the message is in the area of how accuracy should be validated in the nanometer-level world. So saying, we registered the phrases 6-D Point Precision® and Point Precision®. These trademarks are an extension of the “True” and “6-D” references to performance specifications to a point in space, not the planar methodology current standards use. ALIO’s focus on nano precision position of stages at a point in space is the basis of the new ASME standard for measuring motion systems that NIST is collaborating with. This new standard and ALIO’s long-term focus on nano precision motion systems plus our trademarks strongly position us for all future ultra-precision or nano precision motion systems. Point Precision® and 6-D Point Precision® both define bi-directional repeatability of all 6 degrees of freedom (linear, straightness, flatness, pitch, yaw and roll) to a single point of precision in space for a single motion stage. In ALIO’s case we push this singular stage approach even further with our monolithic XY stages which have combined 6-D point precision at the nanometer precision level of the both axes combined.”
ALIO Industries also owns the trademarks Nano Metrology® and Nano Z®. Nano Metrology® was registered in deference to the evolution and novel designs of metrology sensors which created a need for better stages to move the sample or sensor. ALIO introduced the novel idea of nanometer precision of straightness of travel to reduce the uncertainty of measurement, and has the ability to measure at the nanometer level of uncertainty which include motion and sensor combined error quotients.
The Nano Z® trademark was born out of work that ALIO undertook in the semiconductor industry on a planar XY air bearing and an air bearing Z stage for wafer manufacturing and metrology. The Z lift stage design was so novel that ALIO trademarked its name, and it reinforces the company’s ability to move in Z, vertical, or lift a part with nanometer precision.
Hennessey concludes, “With the recent trademarking of the now well-known and ground-breaking Hybrid Hexapod® which is two orders of magnitude more precise than legacy hexapods, ALIO Industries exhibits an ability to think ahead in its developments in the nanometer-level motion control sector. The company is consistently redefining the language, understanding of, and standardization of nanometer-level motion control solutions to ensure that OEMs attain the levels of accuracy required for project success.”
Leading nanometer-level motion control technology innovator — ALIO Industries — is continuing to advocate the examination of the impact of 6D repeatability testing and performance on single and multi-axis motion control systems. Advancements in manufacturing processes and metrology sensors along with the continuing demand from industry to create innovative technologies and products is driving a greater need for motion systems that are both highly accurate and repeatable at the nanometer level.
All motion systems operate in 3-dimensional space and have errors in 6 degrees of freedom (6-DOF). However, motion systems are often only characterized by performance data of a single or subset of these 6-DOF. This practice leaves several error sources unaccounted for in performance data and specifications. ALIO suggests that repeatability performance for metrology inspection and manufacturing systems must now be analyzed and specified using a “point repeatability” method that accounts for 6D spatial errors in order to provide true representation of nanometer-precision performance.
Traditional systems and test methods — plane repeatability. Many traditional stage and motion systems specify repeatability as a single number representing the variation in linear displacement along an axis of travel, i.e. plane repeatability. Historically, this practice was valid as the repeatability specifications were large enough that other error factors were only a small percentage of the total error and could be ignored.
The repeatability of the plane position along the axis is effectively measured over many cycles at a target position. The intersections of this plane with the axis is a point on the axis line and the collection of these points results in 1D repeatability performance.
This test method makes a critical assumption, namely that the plane only moves in one dimension and the axis is perfectly straight. At the nanometer-level, this assumption is not realistic.
6D nano precision — point repeatability. In nanometer-level precision systems, “other” errors that were previously ignored in less accurate systems often become equal to or greater contributors to the 6D repeatability performance. At the nanometer-level, the axis of travel should actually be shown as bending and twisting through three-dimensional space and thus plane visualization becomes meaningless as it will tip, tilt, and twist as the stage moves along the axis. The stage moves in 6D space, therefore neglecting these additional error sources can result in a misrepresentation of actual stage repeatability performance.
Each linear (or angular) direction the stage moves (or rotates) in results in a positional error in that direction. That motion, which must not be neglected when nanometer-precision is desired, will have an associated repeatability of that error motion. Each point on a stage mounting surface will move in 3D space as of a result of this error motion in 6 degrees of freedom. It is the point repeatability of an infinite number of points attached to a stage, that must be characterized by testing and specification data. Thus, each point repeatability will result in a spherical repeatability range.
Measuring 6D point repeatability. To accurately characterize repeatability, X, Y, and Z components must be measured in a systematic process to characterize the point repeatabilities of a stage along the entire axis. Additionally, a process must be implemented to test the influence of pitch, yaw, and roll errors of the axis and their influence on repeatability. In order to have a high confidence in integrated system performance the motion subsystems must be correctly characterized for 6D performance accounting for all error components of stage motion. Without this, claims of accuracy and repeabality are at best pointless, and at worst knowingly misleading.
6-D Laser LLC is an affiliate of leading nanometer-level motion control specialist ALIO Industries, its mission being the integration of ultrafast laser processing with precision multi-axis motion systems.
6D Laser’s central mission addresses limitations of existing laser processing systems which are largely due to sub-optimal positioning systems used by most system integrators. 6-D Laser tackles this problem by integrating ultra-fast laser material processing with the 6-D nanometer-level precision motion control solutions in which ALIO Industries specializes.
6D Laser vertically integrates all of the sub-systems required for precision laser micro-processing, and it does this by forming strategic partnerships with key component and subsystem suppliers that are required to achieve the goals of demanding precision applications.
In addition to its association with ALIO, 6-D Laser has also partnered with SCANLAB GmbH, which together with ACS Motion Control, has developed an unlimited field-of-view (UFOV) scanning solution for coordinate motion control of the galvo scanner and positioning stages called XLSCAN.
In the area of high-performance planar processing, 6D Laser’s Unlimited Field-of-View (UFV™) solution combines the precision galvo scanning of SCANLAB’s XLSCAN system with ALIO’s precision monolithic XY stages for superior UFV™ accuracy. As customers’ requirements of laser micro-processing applications become more demanding, the performance of legacy systems do not meet the specifications for accuracy, repeatability, and precision.
Conventional unlimited field of view systems that control a scan head and XY stage typically use the high-speed galvo scanners to compensate the slower stage’s following error. A tracking error is induced by the mass inertia and the design of each system’s servo control loop.
This means the real position of the laser spot lags the target position. Therefore, the real laser spot position is correct only after a certain amount of time – and the system momentarily oscillates. Because of this, any imperfections in the stage error mapping, or galvo field correction, will impact the overall precision due to the time lag in the servo loop cycle.
In practice, attempts are made to extrapolate the slower stage’s behavior using estimated values, but that approach only works reliably at slow speeds and for non-abrupt motions.
Especially at corners and sharp features with high acceleration or deceleration rates, this strategy can produce significant position errors.
The XL SCAN control solution used by 6D Laser applies intelligent filters to control the scan head and stages such that physical limitations of each system are taken into account prior to processing, in an integrated trajectory plan. The positions of both systems are coordinated with each other to sub-micron level precision within micro-second cycle time.
XLSCAN synchronizes the motion of the galvo scanhead and linear stages to increase the total field size without stitching or “tiling”. It has higher accuracy than competitive systems through intelligent trajectory planning. Its precision is only limited by the image field calibration and stage error mapping.
Automatic laser control can correct the spot distance relative to the velocity and the laser power across the scan field, and for increased throughput four scanheads can be controlled with a single XLSCAN controller.
In addition, the laser signal can be raised or attenuated in accordance with application requirements. This applies to straight as well as rounded laser markings, and multiple parameter changes and jumps for individual vectors are also possible.
Dr. Stephen R. Uhlhorn, CTO at 6-D Laser concludes, “Infinite Field of View (IFOV)processing systems offer considerable advantages over traditional field-stitching systems by combining the high-speed scanning of galvos with the large field sizes available with motion control stages. This increases processing speed while eliminating errors from field stitching. However, current systems are limited to processing 2D planar substrates. As manufacturing geometries continue to increase in complexity, the need to control angle of incidence (AOI) for non-planar substrates becomes crucial. 6-D Laser’s integrated IFOV laser processing system — built around ALIO’s 5-axis Laser Gimbal — solves this complex manufacturing problem.”
ALIO Industries has just announced the availability of its new AngularesTM Hybrid Hexapod®. The 60-degree tip/tilt travel of the AngularesTM Hybrid Hexapod® is by far the most angular travel range available from any 6-Degree-Of-Freedom (6-DOF) positioner on the market and offers the same unmatched positioning performance found in any of ALIO’s full-line of Hybrid Hexapod systems.
The AngularesTM features precision crossed roller bearing guides, optical incremental or absolute encoder feedback on all axes, linear motor and/or servo ball screw drives, unlimited programmable tool center point locations and coordinate offsets, and zero backlash on all axes. The design makes the AngularesTM capable of unlimited XY travel, Z travel for 62 mm which can be increased to 208 mm using other tripod models, tip/tilt travel of 60 degrees (+/- 30 degrees) with continuous 360 degree Theta-Z, XYZ bidirectional repeatability of less than +/- 0.6 arc-seconds, velocity up to 100 mm/second XY and Z, and less than 10 nanometers linear and 0.1 arc-seconds angular minimum incremental motion.
The Hybrid Hexapod® was developed by ALIO Industries to address the inherent performance limitations of conventional hexapods. ALIO’s Patented 6-DOF design seamlessly blends and takes advantage of the strengths of serial and parallel kinematic structures while avoiding their weaknesses. The Hybrid Hexapod offers far greater functional versatility, nanometer-level accuracy, repeatability, and superior 6-DOF trajectories than is possible with any traditional hexapod or stacked stage configuration.
Standard hexapods satisfactorily service applications where micron motion tolerances are required, but as the demand for nanometer requirements expands, standard hexapods struggle. This is because there are performance limitations inherent in all “conventional” hexapod designs. They operate within 3-dimensional space, and have errors in all 6 DOF. However, hexapod motion systems have typically only been characterized by performance data of a single degree of freedom. This practice leaves error sources unaccounted for in several degrees of freedom, especially in the areas of flatness and straightness, which are critical precision needs at the nanometer-level. The hexapod’s best flatness and straightness of travel is still no more precise than more than 2 orders of magnitude (2 decimal point less) for basic XY motion.
Because hexapods have six independently controlled links joined together moving a common platform, the motion error of the platform will be a function of the errors of ALL links and joints. Hexapods are known to have optimum precision when performing Z-axis moves, because all links perform the same motion at the same relative link angle. However, when any other X, Y, pitch, yaw or roll motion is commanded, precision and geometric path performance of the hexapod degrades substantially because all links are performing different motions. In the case of conventional hexapods built with non-precision joints, bearings, and motion controllers that are not capable of forward and inverse kinematics equations, the source of error is even more pronounced.
The unique design of the Hybrid Hexapod® is comprised of a parallel kinematic tripod to deliver Z plane and tip/tilt motion. This tripod is integrated with a monolithic serial kinematic stage for XY planar motion. A rotary stage integrated into the top of the tripod (or beneath depending on application needs) provides 360- degree continuous (Theta-Z) rotation.
In this hybrid design, individual axes can be customized to provide XY travel ranges from millimeters to virtually unlimited ranges while maintaining nanometer-levels of precision. Novel forward and inverse controller kinematics provide an unlimited number of programmable tool center point locations plus unmatched path precision and performance.
The 60 degree tip/tilt travel of the AngularesTM Hybrid Hexapod®, by far the most angular travel range available from any 6-DOF positioner on the market, is perfectly suited for applications including aspheric and freeform optical metrology, silicon photonics packaging and probing, laser micro processing (non-planar substrates and taper control), wafer metrology, camera module alignment and assembly, sensor/image stabilization testing, and optical element and fiber alignment.
To find out more about ALIO’s AngularesTM or its full range of Hybrid Hexapod systems, contact a member of the team today.
The patented Hybrid Hexapod® was developed by ALIO to address the critical weaknesses of conventional legacy hexapod designs, as well as the weaknesses of stacked serial stages, and to achieve nanometer-level accuracy, repeatability, and high-integrity flatness and straightness during motion. It utilizes a tripod parallel kinematics structure to deliver Z plane and tip/tilt motion, integrated with a monolithic serial kinematic structure for XY motion. A rotary stage integrated into the top of the tripod (or underneath it, depending on application needs) provides 360-degree continuous Theta Z rotation. In this hybrid design, individual axes can be customized to provide travel ranges from millimeters to over one meter, while maintaining nanometer-levels of precision.
However, Bill Hennessey, CEO of ALIO Industries doesn’t look pleased. “I think that maybe the use of the words precision and accuracy by companies working in the motion control sector should be banned. They are meaningless words unless qualified, and even when qualified, can still mean nothing. I see companies claiming, ‘high precision’, ‘best accuracy possible’, ‘ultra precision’. What do these phrases mean to an end-user? How useful are they? Are they just marketing speak, or do they have a currency in industry? Nothing, not at all, and no I’d say!! At ALIO we talk of nanometer-level repeatability, accuracy and precision which actually means something, and as such the use of our motion control solutions in industry grows exponentially.”
The source of Hennessey’s disquiet is that he has positioned ALIO Industries as the world’s only provider of true nanometer-level motion control solutions, and with the Hybrid Hexapod, for example, has developed a technology that exhibits such True Nano Precision® that existing industry validation standards are useless, and a set of new standards based on ALIO’s Point Precision® methodology is being developed by NIST.
“You see, when discussing precision and accuracy, when it comes to motion control there are too many variables that are not fully understood by customers, and which technology suppliers are fully aware of and swerve in their marketing and communications, using data that flatters to deceive, or deceives completely”, Hennessey continues.
“In many ways, the most accurate end of the motion control market is quite a confusing place to be, as the handful of extremely accurate motion systems suppliers tend to use non-consistent and often illusory ways of describing the levels of precision that they can attain. ALIO has always worked in the area of nanometer-level motion control, and as such has a unique perspective on what really works when looking for this level of precision. Because of this, and with the Hybrid Hexapod® very much front and center, we have focussed on educating the customer base to navigate alternative solutions, and give them the tools to interrogate solutions providers in such a way that they can secure a motion control technology suited to their specific applications.
The Hybrid Hexapod had been a game changer for enabling new and novel processes.”
ALIO Industries believes that any claim of precision or accuracy must be first meaningful, and second provable. When looking at motion control solutions such as the Hybrid Hexapod, this is vital, as in common with all hexapods it is a motion control technology that operates with 6 degrees of freedom (DOF), and operates in 3-dimensional space. Because of this the conversation needs to move toward volumetric accuracy.
Despite this, all 6-DOF motion control solutions suppliers are characterised by performance data of a single degree of freedom. This practice leaves error sources unaccounted for in several degrees of freedom, especially in the areas of flatness and straightness, which are critical precision needs at the nanometer-level. The traditional hexapod’s best flatness and straightness of travel is still no more precise than in the order of magnitude of tens of microns per axis.
Because hexapods have six independently controlled links joined together moving a common platform, the motion error of the platform will be a function of the errors of ALL links and joints. Hexapods are known to have optimum accuracy and repeatability when performing Z-axis moves, because all links perform the same motion at the same relative link angle. However, when any other X, Y, pitch, yaw or roll motion is commanded, accuracy and geometric path performance of the hexapod degrades substantially because all links are performing different motions.
It is generally accepted that hexapods have relatively good stiffness compared to serial stacked multi-axis systems. However, it is often only the hexapod’s “Z” (vertical) stiffness that is considered. Geometric design stiffness has a critical impact on and hexapod’s platform repeatability and rigidity. A lack of design stiffness relates directly to a weak XY plane stiffness with the conventional hexapod working platform. Moreover, this inherent design flaw of the conventional hexapod negatively affects XY axis performance, especially with thermal bonding or machining applications that require more force to be performed accurately within the XY plane.
Hennessey continues, “Traditional hexapod providers are aware of these issues, but instead of confronting them, mask the inefficiencies inherent in the system by throwing meaningless precision claims at the situation or not drawing attention to them at all. One for example makes accuracy claims that seem really good, but are in fact impossible to achieve on any 6-link architecture, and above all would be totally out of reach of any customer. The reason for this is that the precision specs that they quote only apply to single axis moves from the center / mid-stroke default position. Who would ever buy a 6 DOF hexapod to only use it one axis at a time at its center of travel? The accuracy as you move to different positions and angles has to degrade probably by multiples of 5x to 10x.”
The Hybrid Hexapod® represents a quantum step forward in motion control, and for the first time provides the ability to achieve repeatable nano-level precision, stimulating innovation and promoting manufacturing efficiency previously considered impossible. It is redefining the area of precision motion control, and the rule book is having to be rewritten to accommodate it and to position it correctly against industry alternatives.
The level of precision achievable with the Hybrid Hexapod renders the vague and illusory industry standard claims of micron and sub-micron precision redundant, and has forced industry to move towards the concept of Point Precision®.
Point Precision® includes all 6 DOF of errors of each axis in motion, guaranteeing the precision point in the full work envelop, and allows for a “precision number” to be quoted based on an exact point on the wall (as if you used a laser pointer) whereas today’s standard only gives the measurement to the wall as if using a flood light. As a signifier of accuracy and precision today, Point Precision® truly is a must for many applications from laser processing to metrology.
The World’s First and Only 6 Degree-of-Freedom Nano-Positioner with +/- 30 Degrees Tip and Tilt Travel
At the recent Photonics West show, San Francisco, CA, USA, ALIO Industries released the all new HH-30D Hybrid Hexapod® — the industry’s only 6-Degree-Of-Freedom (6-DOF) nano positioning device with +/-30 degrees tip and tilt travel.
The Hybrid Hexapod® was developed by ALIO Industries to address the inherent performance limitations of conventional hexapods. ALIO’s Patented 6-Degree-Of-Freedom (6-DOF) design seamlessly blends and takes advantage of the strengths of serial and parallel kinematic structures while avoiding their weaknesses.
The Hybrid Hexapod® offers far greater functional versatility, nanometer-level accuracy, repeatability, and superior 6-DOF trajectories than is possible with any traditional hexapod or stacked stage configuration. The unique design is comprised of a parallel kinematic tripod to deliver Z plane and tip/tilt motion. This tripod is integrated with a monolithic serial kinematic stage for XY planar motion. A rotary stage integrated into the top of the tripod (or beneath depending on application needs) provides 360-degree continuous yaw (Theta-Z) rotation. In this hybrid design, individual axes can be customized to provide XY travel ranges from millimeters to virtually unlimited ranges while maintaining nanometer-levels of precision. Novel forward and inverse controller kinematics provide an unlimited number of programmable tool center point (TCP) locations.
The HH-30D’s +/- 30 degree tip/tilt travel is by far the most angular travel range available from any 6-DOF positioner on the market, and offers the same unmatched positioning performance found in any of ALIO’s full-line of Hybrid Hexapod® systems. Such a large travel range is unprecedented, and it must also be appreciated that this angular range is the full conical motion of the device and NOT just the available angles from the primary pitch (Theta-Y) and roll (Theta-X) axes.
Furthermore — and as is the case on any Hybrid Hexapod® and completely the opposite of any legacy 6-legged Hexapod — this large angular range does not consume any notable XY travel when the TCP is set at the default 0,0,0 location (top center). Compare this with any alternative traditional hexapod design, and users of the ALIO solution have at least double the amount of tip and tilt range while still having the full XY and Theta-Z travel available.
The new HH-30D Tripod design leverages ALIO’s experience from the field proven Mini Hybrid Hexapod® by using precision ballscrews driven by frameless servo motors. What makes this travel possible is an all-new upper joint design that provides the exceptional travel range in an innovative self-nesting package which keeps the profile extremely low and stiffness very high. Future iterations with this innovative joint can easily incorporate ALIO’s linear motor driven / pneumatically counter balanced links.
The travel range of the tripod is 62mm, which for applications where only a few degrees of tip/tilt are needed would provide a significant amount of remaining pure vertical (Z) travel. Applications that would directly benefit from the large tip/tilt angle include freeform and aspheric optics metrology, taper angle control in laser micro processing, and additive manufacturing. ALIO has also recognized some precision assembly/packaging applications where large offset angles are needed to “reach” into or around complex spaces.
The HH-30D Tripod can be supplied with virtually any ALIO XY stage to provide a wide range of XY travel options – again, something that is not possible with a standard hexapod. While any XY stage can be used, the company has currently released models for three configurations including the 60mm XY Ballscrew Driven XY from the Mini Hybrid Hexapod®, the LM100XY Monolithic Stage, and the CM200XY Low Profile Monolithic Stage. The two latter configurations come with an umbilical cable management system.
The HH-30D with 60mm XY, 62mm Z and unlimited Theta Z starts at $44,900 (€40,000) with controller, which means the unit is comparably priced with industry alternatives but with features and performance they cannot match. The larger (LM) Linear Motor Driven version that was exhibited at the Photonics West show starts at $50,950 (with controller). With 100mm XY travel range andthe throughput available from linear motor drives this unit essentially has no meaningful competition.
ALIO Industries is synonymous with best-in-class nanometer-level motion control solutions, and is well known as the only motion control technology supplier that offers true nanometer-level accuracy and repeatability.
Back in 2001, ALIO started by creating solutions to meet demand from U.S. based technology providers and manufacturers for nano-precision robotics. From that day to this the company has consistently pushed the boundaries in the achievement of ultimate precision in motion control.
It is within this context that ALIO Industries has just announced another innovative nanomater-level precision positioning solution, its new Asymmetric XY stages.
ALIO CEO Bill Hennesey picks up the story. “Over many years, ALIO has been developing precision positioning solutions for applications that do not require identical travel lengths on both the X and the Y axes. All the company’s XY solutions are standard monolithic ones, as regardless of the requirement for X and Y travel lengths to be different, the alternative — stacked stages — will always compromise performance.”
“Take a look at what some alternative suppliers do. Frequently they will offer an XY stack comprised of a single axis crossed roller stage which results in poor static and especially poor dynamic performance related to tuning challenges. In these stacked configurations, the lack of lower axis torsional stiffness and the bending moments of the upper axis greatly limit the dynamic responsiveness of the stage. It’s kind of like trying to find stable footing on a diving board that is sitting on a tightrope!”
Before the recent launch of its Asymmetric XY stages, when confronted with the need to work with applications that required the accommodation of X and Y axis travel that were not the same, ALIO would sometimes limit travel on the upper axis of its monolith XY stages. This would save on the overall moving footprint, but the square body of the stage would still be larger and heavier than it would need to be based on the required travel for the application.
Hennessey continues, “ALIO’s Asymmetric stages provide a solution with identical performance, lower moving mass, and a smaller static and dynamic footprint compared to their square-body designed, monolithic-series counterparts. They also offer a lower working height than traditional XY stacks and without the tuning limitations of stacked assemblies. They provide customers with the exact X and Y travel ranges needed for their applications without the cost of excess travel that is not required and will never be used.”
Three Standard versions with asymmetric body designs / travel lengths are now available with customized versions offered for OEM Programs.
The company offers an array of best-in-class precision motion control solutions which it sees as enabling technologies, used by its customers to make products previously deemed impossible. By working with ALIO, customers are able to manufacture innovative, bleeding-edge products that ensure leadership positions in their respective industries. The recently introduced Asymmetric stages fit well within the overall stable of ALIO’s nanometer-level motion control solutions, and removes some limitations that manufacturers have had to put up with when they require different X and Y axes travel.
Market-leading nanometer-level motion control solutions provider, ALIO Industries, caused some waves at the SPIE Photonics West event held in San Francisco at the beginning of February with a display of innovative and unique products.
ALIO showcased several industry-unique precision positioning products and high throughput scanning solutions for laser micro-processing, this year exhibiting alongside recently launched affiliate company 6D Laser LLC.
ALIO is renowned throughout industry for the development of its patented Hybrid Hexapod® and its True Nano® XY positioning stages.
The Hybrid Hexapod® was developed by ALIO to address the critical weaknesses of conventional legacy hexapod designs, as well as the weaknesses of stacked serial stages, and to achieve nanometer -level accuracy, repeatability, and high-integrity flatness and straightness during motion. It utilizes a tripod parallel kinematics structure to deliver Z plane and tip/tilt motion, integrated with a monolithic serial kinematic structure for XY motion. A rotary stage integrated into the top of the tripod (or underneath it depending on application needs) provides 360-degree continuous yaw rotation. In this hybrid design, individual axes can be customized to provide travel ranges from millimeters to over one meter, while maintaining nanometer-levels of precision.
At Photonics West, ALIO Industries showed live demonstrations of the world’s first and only Hybrid Hexapod® with +/- 30 degrees tip and tilt travel — the new HH-30 Hybrid Hexapod® — which offers more than an order-of-magnitude better precision than alternative hexapod technologies, more travel range in all degrees-of-freedom (DOF) , and significantly higher velocity. The new HH-30 and the world’s most precise compact 6 DOF positioner, the “Mini” Hybrid Hexapod® were front and center at the show, and ALIO was encouraged to see that attendees were increasingly well-informed and recognized that when looking for repeatable nanometer-level precision, ALIO’s solutions are unique.
ALIO’s True Nano® XY positioning stages exhibit unequalled 6-D Nano Precision®. With nanometer-level straightness and flatness, users can be certain that point precision is True Nano®. ALIO’s XY stage family comes with enclosed- or open-center versions from 50-450 mm travel, and standard axis bi-directional repeatability is less than 40 nanometers with optional 10 nanometers bi-directional repeatability for demanding metrology or manufacturing requirements. ALIO uniquely provides its True Nano® XY Stages with NIST traceable data guarnteeing nano precision, not just the marketing data sheet optimism typical with alternative technologies.
At Photonics West, ALIO showcased its new Asymmetric-SeriesTM True Nano® XY positioning stages which represent another unique offering in the industry. When travel ranges for the X and Y axes are not the same, rather than relying on performance-compromising stacked configurations, ALIO’s space-optimizing Asymmetric-Series stages exhibit the same extremely rigid and stable structures that are at the heart of the company’s popular monolithic XY series.
Perhaps one of the key developments from ALIO at Photonics West were technology solutions for precision laser micro-processing, launched under affiliate company 6-D Laser.
6-D Laser has as its central mission to address the limitations of existing laser processing systems which are largely due to sub-optimal positioning systems used by systems integrators. The company tackles this problem by integrating ultra-fast laser material processing with the 6-D nanometer-level precision motion control solutions provided by ALIO Industries through the Hybrid Hexapod®.
6-D Laser has vertically integrated all of the sub-systems required for precision laser micro-processing, and has done this by forming strategic partnerships with key component and subsystem suppliers that are required to achieve the goals of demanding precision applications, including Amplitude Laser, SCANLAB, and ACS Motion Control.
Introducing an integrated ultrafast laser micromachining system that combines the positioning capabilities of the Hybrid Hexapod®, with high-speed optical scanning leads to a system that can process hard, transparent materials with wide-range taper angle control for the creation of high aspect ratio features in thick substrates, without limitations on the feature or field size.
At Photonics West 6D Laser demonstrations included its Polygon Scanner System, and its Unlimited Field-of-View (FOV) Micromachining System. In respect of the Polygon Scanner Systems, 6D Laser has partnered with Next Scan Technology to provide fully integrated planar laser processing systems that combine ALIO’s precision motion stages with high-throughput polygon scanners. For its Unlimited FOV Micromachining System 6D Laser has partnered with SCANLAB to provide fully integrated XLSCAN systems that combine ALIO’s precision motion stages with ACS’s motion control systems.
Laser micro processing has driven innovation and manufacturing efficiency in various industry sectors. 6-D Laser’s micro-processing solutions win through as they can make ultra-precise micro features, are agnostic to which material is being processed, and are highly repeatable. As such, they are now seen as the go-to solutions compared with traditional non-laser driven micro-processing technologies in the consumer electronics, semi-conductor, medical device, solar cell, and optical sectors.
6-D Laser LLC was formed in 2018 as an affiliate of leading nanometer-level motion control specialist ALIO Industries, with the mission of integrating ultrafast laser processing with precision multi-axis motion systems. 6-D Laser offers Hybrid Hexapod-based laser micromachining systems for wide-range taper angle control, 5-Axis Laser Gimbal-based systems for laser processing 3D substrates, and unlimited field of view scanning solutions for laser processing large-format substrates.
Coming out of stealth mode and coinciding with its official launch in 2020, 6-D Laser has launched its website (www.6dlaser.com), and has also announced that the company will be showcasing its radical new approach to laser micro processing at the SPIE Photonics West event, booth 2149, 4-6 February in San Francisco, CA.
6D Laser’s central mission addresses limitations of existing laser processing systems which are largely due to sub-optimal positioning systems used by most system integrators. 6-D Laser tackles this problem by integrating ultra-fast laser material processing with the 6-D nanometer-level precision motion control solutions in which ALIO Industries specializes.
At the heart of 6-D Laser’s integrated ultrafast laser micromachining system is ALIO Industries’ Hybrid Hexapod®, which takes a different approach to traditional 6 Degree of Freedom (6-DOF) positioning devices, and exhibits much higher performance at extremely competitive prices. Rather than 6 independent legs (and 12 connection joints) ALIO’s approach combines a precision XY monolithic stage, tripod, and continuous rotation theta-Z axis to provide superior overall performance.
The combination of serial and parallel kinematics at the heart of ALIO’s 6-D Nano Precision® is characterized by orders-of-magnitude improvements (when compared to traditional hexapods) in precision, path performance, speed, and stiffness. The Hybrid Hexapod® also has a larger work envelope than traditional hexapods with virtually unlimited XY travel and fully programmable tool center point locations. The Hybrid Hexapod® has less than 100 nm Point Precision® repeatability, in 3-dimensional space.
6D Laser vertically integrates all of the sub-systems required for precision laser micro-processing, and it does this by forming strategic partnerships with key component and subsystem suppliers that are required to achieve the goals of demanding precision applications. In addition to its association with ALIO, 6-D Laser has also partnered with SCANLAB GmbH, which together with ACS Motion Control, has developed an unlimited field-of-view (UFOV) scanning solution for coordinate motion control of the galvo scanner and positioning stages called XLSCAN. 6-D Laser has also partnered with NextScanTechnology to provide high-throughput scanning systems that take advantage of the high rep-rates in currently available in ultrafast lasers, and Amplitude Laser, a key supplier of ultrafast laser systems for industrial applications.
Dr. Stephen R. Uhlhorn, CTO at 6-D Laser says, “Introducing an integrated ultrafast laser micromachining system that combines the positioning capabilities of the Hybrid Hexapod®, with high-speed optical scanning leads to a system that can process hard, transparent materials with wide-range taper angle control for the creation of high aspect ratio features in thick substrates, without limitations on the feature or field size.”
Ultrafast laser ablative processes, which remove material in a layer-by-layer process, result in machined features that have a significant side wall taper. For example, a desired cylindrical hole will have a conical profile. Taper formation is difficult to avoid in laser micromachining processes that are creating deep features (> 100 microns). Precision scanheads can create features with near-zero angle side walls, but they are limited to small angles of incidence (AOI) and small field sizes by the optics in the beamline.
Uhlhorn continues, “6-D Laser’s micromachining system controls the AOI and resulting wall taper angle through the Hybrid Hexapod® motion system, and the programmable tool center point allows for the control of the AOI over the entire galvo scan field, enabling the processing of large features.”
At Photonics West, 6-D Laser will be demonstrating a large format, 2D unlimited field of view (UFOV) scanning solution and a high-throughput polygon scanning system. Key members of the team would be delighted to discuss the specifics of your particular applications.
ALIO Industries has spent 2019 working with numerous customers from across industry that are exploiting the ability to innovate through the use of true nanometer-level motion control solutions.
2019 has been a pivotal year for established nanometer-level motion control solution provider ALIO Industries. Throughout the year, news and coverage of ALIO’s Hybrid Hexapod® has reached every corner of industry globally, and the momentum that has been gained has been exciting as ALIO has helped existing and new customers reach new levels of precision in motion control.
Bill Hennessey says, “In many ways, the ultra-precise end of the motion control market is quite a confusing place to be, as the handful of extremely precise motion control suppliers tend to use non-consistent and often illusory ways of describing the levels of precision that they can attain. ALIO has always worked in the area of nanometer-level motion control, and as such has a unique perspective on what really works when looking for this level of precision. Because of this, during 2019, and with the Hybrid Hexapod® very much front and center, we have focussed on educating the customer base to navigate alternative solutions, and give them the tools to interrogate solutions providers in such a way that they can secure a motion control technology suited to their specific applications.”
In the area of hexapods, this has required ALIO Industries to identify where the usefulness of conventional hexapods expires, as it is here that the Hybrid Hexapod® finds its unique niche.
Hexapods are motion control technologies that operate with 6 degrees of freedom (DOF), and the standard hexapods that abound on the market today satisfactorily service applications where micron motion tolerances are required, but as the demand for nanometer requirements expands, standard hexapods struggle somewhat.
This is because there are performance limitations inherent in all “conventional” hexapod designs. They operate within 3-dimensional space, and have errors in all 6 DOF. However, hexapod motion systems have typically only been characterized by performance data of a single degree of freedom. This practice leaves error sources unaccounted for in several degrees of freedom, especially in the areas of flatness and straightness, which are critical precision needs at the nanometer-level. The hexapod’s best flatness and straightness of travel is still no more precise than in the order of magnitude of tens of microns per axis.
Because hexapods have six independently controlled links joined together moving a common platform, the motion error of the platform will be a function of the errors of ALL links and joints. Hexapods are known to have optimum accuracy and repeatability when performing Z-axis moves, because all links perform the same motion at the same relative link angle. However, when any other X, Y, pitch, yaw or roll motion is commanded, accuracy and geometric path performance of the hexapod degrades substantially because all links are performing different motions. In the case of legacy hexapods built with non-precision joints and motion controllers that are not capable of forward and inverse kinematics equations, the source of error is even more pronounced.
Furthermore, it is generally accepted that hexapods have relatively good stiffness compared to serial stacked multi-axis systems. However, it is often only the hexapod’s “Z” (vertical) stiffness that is considered. Geometric design stiffness has a critical impact on and hexapod’s platform repeatability and rigidity. A lack of design stiffness relates directly to a weak XY plane stiffness with the conventional hexapod working platform. Moreover, this inherent design flaw of the conventional hexapod negatively affects XY axis performance, especially with thermal bonding or machining applications that require more force to be performed accurately within the XY plane.
The Hybrid Hexapod® was developed by ALIO to address the critical weaknesses of conventional legacy hexapod designs, as well as the weaknesses of stacked serial stages, and to achieve nanometer -level accuracy, repeatability, and high-integrity flatness and straightness during motion. It utilizes a tripod parallel kinematics structure to deliver Z plane and tip/tilt motion, integrated with a monolithic serial kinematic structure for XY motion. A rotary stage integrated into the top of the tripod (or underneath it depending on application needs) provides 360-degree continuous yaw rotation. In this hybrid design, individual axes can be customized to provide travel ranges from millimeters to over one meter, while maintaining nanometer-levels of precision.
Hennessey continues, “Engineers working at the cutting edge of what is possible must be stimulated to ask more as they see that this technology reaches places others cannot, has the potential to promote innovations, and can optimise efficiency and cost-effectiveness in manufacture. The Hybrid Hexapod® is orders of magnitude more precise than traditional hexapods, being 100 x stiffer, 30 x faster, and with 10x the usable work envelope of industry standard options.”
ALIO is always eager to discuss how the Hybrid Hexapod® can be used to benefit customer applications, and the company will work to customize specific solutions for particular customer applications.
As the demand for more and more exacting motion control increases across numerous industry sectors, it is vital that before investing, customers are informed enough to make sure that they select the right solution for their specific application.
The motion control sector is characterized by an array of vendors in many ways saying the same things, sometimes in subtly different ways. But statements of competence often flatter to deceive, a bald statement about accuracy, for example, obscuring enormous differences between the capabilities of vendors in terms of repeatability, and motion control solutions being fit for purpose.
Starting with the premise that if a good motion control solution is expensive, how much more expensive is a bad one (with all this implies in terms of time delays and costs of re-investment in a suitable motion control solution) in this piece, we attempt to arm manufacturers with the questions that they need to ask their short-listed motion control technology providers to ensure that the motion control solution option chosen is right first time and up to the job.
Questions need to be asked that delve into motion control vendors’ capabilities and their values.
Customer Focus. Ideally your chosen motion control technology vendor should sell solutions to customers not just products. The key is to be able to customize motion control solutions to specific customer applications. When working in the area of nanometer-level motion control, your chosen vendor should have extensive experience working in the nanometer world. The vendor should also have a demonstrable passion about — and absolute focus on — precision. A vendor supplying nanometer-level motion control solutions should be able to prove its credentials and demonstrate that it has provided a significant number of best-in-class, efficient, and cost-effective motion control solutions for an array of different industry applications. Ask your chosen vendor for evidence. All claims made should be able to be substantiated and this will prove whether your short-listed vendor is equipped to operate at the nanometer-level of accuracy or just the micron level.
What is Motion Control? This may seem like an odd question to ask a motion control technology provider, but it does actually get to the heart of the difference between vendors. Most vendors sell off-the-shelf solutions and leave their customers to align them with their specific applications. In a way, this demotes motion control to a necessary evil, a link in a process chain that is expensive and complicated. But when your vendor provides truly cutting edge nanometer-level accurate and repeatable motion control solutions, it elevates motion control from a necessary evil to an enabling technology. If a vendor provides the best-in-class, most accurate, and most repeatable motion control solutions on the market, they will be able to push the boundaries of what customers may see as possible, and will therefore promote the ability to manufacture innovative, bleeding-edge products that stimulate competitiveness. Try and assess your short-listed vendor’s view of motion control. Do they see obstacles and problems, or opportunities and solutions?
Partnership. Your chosen vendor should place an emphasis on being your strategic partner in product development. It is only by doing this that you can be confident about achieving your challenging motion control and manufacturing goals. Key is early stage engagement with you chosen vendor, and a feeling that they want to truly become embedded in the development of your end-use products and allied motion control solutions. Once again, the difference is between a vendor that sells off-the-shelf solutions (which is not that concerned about your product development process), and one that is dedicated to providing you with customized solutions (which will necessarily want to help you navigate the inherently complicated area of nanometer-level motion control solutions optimized to specific applications). You want to feel that if you don’t engage fully with your chosen vendor that you will compromise quality of outcomes, speed of outcomes, and cost of outcomes. Also, check out the warranty that your vendor is willing to extend. This is a sure-fire way of understanding the level or confidence they have in their own solutions.
Vertical Integration. When working in a world where nanometer-levels of accuracy are the norm, it is vital that motion control products are manufactured in one facility. Ask your vendor whether they have design, machining, metrology, manufacturing, and assembly under one roof. The cross collaboration between product development teams is vital to the achievement of reliable and repeatable ultra-precise motion control solutions, and vertical integration is disproportionately important as the demands for accuracy move from micron-level to nanometer-level precision.
Team. Drill into the experience and technical know-how of your short-listed vendor’s team. Especially when your demand is for nanometer-level motion control, you need to make sure that your vendor has a dedicated focus which will translate into innovative and cutting-edge motion control solutions. Much of this is about the culture you will see in a vendor company. Assess whether you detect a “can do” attitude and whether your vendor seems to nurture a collaborative environment. But above all see if you can feel a passion running through your vendor’s team. If the passion is there, honesty and integrity will often follow, and with that will come trust. And it is ultimately trust that you need to bottom out when choosing a vendor. You need to trust that the motion control solution that you buy fits your requirements, and is not just another unit shifted by the vendor to hit a sales target regardless of ultimate customer satisfaction.
Solutions. If your short-listed precision motion control technology provider is really credible, it will be able to show you a series of innovative solutions that redefine the motion control market. Here you should be looking for evidence of next-generation “blue ocean” technologies, not variations of legacy traditional motion control technologies. This is like the difference between vendors selling hexapods and a company like ALIO Industries that sells the Hybrid Hexapod®, which overcomes process limitations in traditional hexapods, and exhibits orders-of-magnitude improvements in precision, path performance, speed, stiffness, and larger work envelope. Nanaometer-level repeatable motion control is achieved by pushing the envelope, not tweaking years-old technologies to squeeze out ever decreasing increases in accuracy. Check out your vendor’s portfolio of products, the customized solutions they have provided, and the level of innovation that is evident in creating new solutions.
Interrogate precision claims. Pinning down motion control vendors over statements of precision is a minefield. Ultimately, claims on nanometer-level precision is meaningless unless this nanometer-level precision is achieved repeatably. Vendors that cannot achieve repeatable nanometer-level motion control often need to resort to at worst false, and at best illusory claims that muddy the waters. Some vendors even go as far as to publish “typical specifications” and “guaranteed specifications”, typical specifications showing what “could” be possible in a motion control solution, which is greater precision that can actually be guaranteed. In other words, they show what they would like to be able to do, and then demonstrate that what they actually can do is much worse. This takes lack of clarity to a whole new level, and is extremely confusing for customers. Again, look for evidence of vendors that are trying to move this conversation along. ALIO Industries, for example, now talks in terms of Point Precision® referencing performance specifications to a point in space at the single digit micron or nanometer level, and is working with NIST to move on from the planar methodology that current motion control standards use. It is vital that you interrogate precision claims diligently before a making motion control technology purchase. It is also critical that ASTM and/or other internationally registered standards are followed by vendors, instead of methods developed to flatter a particular vendor’s products and which provide flattering data calculations which give a false illusion of precision.
In essence the choice of a nanometer-level motion control solutions provider is based on a number of factors, and is a mix of not just technological competencies but also core values and what “makes a company tick”. Investment in an ultra-precise motion control solution is expensive, and customers need to be certain before nominating a motion control vendor that they will have a best-fit solution that is right first time.
For nearly 20 years, ALIO Industries has been working at the bleeding-edge of nanometer-level motion control. The company has set the standard for ultra-precise and repeatable motion control solutions, including the Hybrid Hexapod® which has less than 100 nm 3-Dimensional 6 axis Point Precision® repeatability, making it an essential technology for mission critical applications in the laser processing, optical inspection, photonics, semiconductor, metrology, and medical device sectors, and indeed all micro-machining projects.
However, it is the company’s ability to truly customize its core motion control solutions that sets it apart from alternative solution providers, offering significant value added by exactly matching OEM customers’ needs as well as pushing the envelope for new world nano-precision applications. ALIO’s on-going focus on exceeding OEM requirements helps its customers become leaders in their respective industry sectors.
Customers approach ALIO for unique applications due to the company’s long track record of successfully delivering complex prototypes that meet or exceed specifications the first time.
The company’s unwavering focus on honesty and integrity help customers understand the complex nature of precision applications. ALIO informs the customer of what they need to know and not just what they want to hear.
CUSTOMIZED SOLUTIONS FOR SPECIFIC APPLICATIONS WITH VIDEO
Laser Gimbal® Five-Axis Positioning Workstation. ALIO’s Laser Gimbal® Five Axis Positioning Workstation is the world’s only positioning system with 5-D vector path laser triggering. The system provides a novel solution for engineers and manufacturers that are using additive and subtractive laser processing techniques on cutting-edge materials to produce a variety of next generation products. (See video of workstation in action: VIDEO).
Additive Manufacturing – Phone Antenna Direct Printing. ALIO is capable of programmable path and contour control using its novel forward and inverse kinematic algorithms. This Hybrid Hexapod® operates at 100mm/sec 3D path velocity and is capable of micron-level path accuracy. In this Hybrid Hexapod® system the nozzle proximity is kept to within 5 microns of surface and was designed for a 24/7 production environment. (See video of ALIO smart phone antenna printing: VIDEO).
Optical Camera Module Assembly/Test. ALIO’s MINI Hybrid Hexapod® is ideal for automated lens alignment/bonding to CCD arrays. It has been helpful in building camera array modules, translational OIS, telescopic integrated lenses for miniature cameras used in every day products like cell phone cameras and drones. Any application requiring 6- degrees of freedom positioning with nanometer/arc-sec levels of incremental motion and repeatability is a good fit for this product where product sensor resolution improvements are driving the need for higher precision. (See video of ALIO Mini Hybrid Hexapod in action: VIDEO).
Sensor Metrology. ALIO has experience providing systems to many of the world’s largest metrology companies for their internal measurement systems. The company can provide solutions for even the most precise targets. (See video of ALIO Nano precision 6-Axis Nano Metrology® System: VIDEO).
Hybrid Hexapod® For Wafer Metrology. ALIO has supplied a 5-axis, open frame Hybrid Hexapod® design for wafer metrology. It’s precision comes from precision crossed-roller bearings, and integrated frameless DC servo motors driving ballscrews. It has a cubic travel range of 350mm “X” x 350mm “Y” x 75mm “Z” and tip/tilt travel ± 2 degrees. ALIO was able to provide ± 0.1 micron bidirectional XYZ repeatability. (See video of ALIO’s Hybrid Hexapod® Large Open Center 5-Axis Platform in action: VIDEO).
Wafer Metrology Low-Profile XY-Theta With Large Open Aperture. ALIO’s vacuum expertise and broad selection of stages allowed the opportunity to couple four HV (10-7 Torr) stages to provide a nano-precision® solution. This R-XY-Z stack once again uses a pure linear based Z solution vs. the legacy Z-wedge design. (See video of ALIO’s semiconductor metrology XYR 300 mm open center system in action: VIDEO).
Application: Fiber/Optical Assembly (Private Label). ALIO’s metrology grade XY stage is the foundation for an exceptional three-axis alignment platform. ALIO’s unique design of the Z axis provides a completely linear based vertical solution with near air bearing performance. The Z stage with a high force linear motor, linear encoder, linear high-precision crossed roller bearings and integrated linear air counterbalance exceeds any mechanical based vertical axis on the market as well as some air bearing options. One major advantage to this unique solution allows for the customer’s payload to be mounted directly on the top of the stage in-line with the motor, encoder, bearings, and counterbalance thus minimizing overhanging brackets and greatly reducing potential Abbé errors. ALIO’s linear Z axis is 5 times order of magnitude more precise than old school z-wedge solutions.
Application: Nano Metrology. ALIO has taken its industry-leading, near air-bearing performance open center metrology stages, to the next level. This crossed roller bearing 300mm XY Nano Metrology® stage is DC Servo linear motor driven with 300mm open center, has unmatched motion performance with 3-Sigma, 6-D (linear, straightness, flatness, pitch, yaw and roll) and bi-directional repeatability of less than +/- 250nm. In other words, the volumetric bi-directional repeatability of any XY point is within a sphere of 500nm or less.
ALIO Industries is synonymous with accuracy and innovation in ultra-precision motion control solutions. The company is driven by a peerless team of exceptional engineers that have an obsessive focus on nanometer-level motion control, customer success, and pushing the boundaries of what is perceived as possible.
It is all about heritage and focus. ALIO has an 18-year history working at the vanguard of nano precision motion control, something that no other motion control supplier can claim.
Back in 2001, ALIO began by creating “a better way” (ALIO is Latin for “a better way”) to meet demand from U.S. based technology providers and manufacturers for nano-precision robotics. The company started life building the piezo hexapod, a product with unrivalled precision that the industry said was impossible to build. From that day to this ALIO has consistently pushed the boundaries in the achievement of precision in motion control.
Nanometer-Level Precision
The company offers a high-end boutique-like service, offering bespoke motion control solutions rather than off the shelf products, with a strong emphasis on responsiveness to its customers. As a company, ALIO has always been focussed on nano precision, and as such the company has a reputation, a knowledge base, and a level of stability that cannot be matched when ultra precise and reliable motion control is demanded.
From 2001 onwards, ALIO has developed an expansive product line, including Hexapod robotic systems, air bearing systems, linear and rotary nano-precision systems (with both mechanical and air bearings guides), and systems bespoke for atmospheric, clean room, and ultra-high vacuum environments. All ALIO’s motion control products are characterized by TRUE NANO Positioning®.
Today, the evolution of the company has led to the launch of the patented Hybrid Hexapod®, which is a game changer for 5 and 6 axis motion performance. The Hybrid Hexapod® is orders of magnitude more precise than traditional hexapods. It is 100 times stiffer, 30 times faster, has unrivalled path precision, and exhibits 10 times the usable work envelope for the same XYZ travels of a hexapod. There are absolutely no performance, precision, or quality advantages of choosing a traditional hexapod versus a Hybrid Hexapod®, and it is therefore the cost-competitive solution for ANY 6-D motion and precision needs.
Another key product that ALIO has developed after years of evolution of its True Nano® single axis stages, is the monolithic XY stage product family with extreme 6-D Nano Precision®. The ALIO monolithic XY stages, (with enclosed center and open center), outperform all alternative XY motion solutions, with Point Precision® motion performance and unrivalled stiffness.
ALIO’s linear stages, patented Nano Z® lift, mechanical Z lift, and rotary stage lines were designed to excel at nanometer precision motion performance. The company’s superior accuracy and quality is backed by the motion control industry’s ONLY 3-year warranty.
When Microns Matter
ALIO also offers its newly introduced µII (micro II) product line, to compete in the lower cost, lower precision micron (µm) world. Demands for low cost, mid-precision, reliable long travel stages influenced ALIO’s decision to introduce the µII product line. As with all ALIO products, this line was designed using ALIO’s uncompromising standards of “quality first” thus providing the customer with long term reliable operation.
The easily configurable µII product line stages can be used as a single axis, stacked in XY orientations, or complete gantry operation. ALIO’s control platforms are easily set up to handle the complex motion requirements for rigid gantry motion.
The µII recirculating ball rail bearing stage line comes standard in sizes of 100mm up to 1 meter thus providing the end user a solution suitable for many applications.
ALIO sees best-in-class precision motion control solutions as enabling technologies, used by its customers to make products previously deemed impossible. By working with ALIO, customers are able to manufacture innovative, bleeding-edge products that ensure leadership positions in their respective industries.
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To get a clear view of what can be achieved through the use of ultra-precise motion control solutions, contact ALIO today.
Often, the technical descriptions of “how” technologies allow greater and greater precision in motion control and tighter and tighter tolerance attainments are pretty impenetrable. Interesting on a level, but rarely passing the “so what” test when it comes to understanding the possibilities that exist for embracing sometimes expensive technology options when viewed through the prism of the upside for business and the enhancement of the bottom line.
For some, the subject of motion control may seem a little dry, a little chewy! Often, the technical descriptions of “how” technologies allow greater and greater precision in motion control and tighter and tighter tolerance attainments are pretty impenetrable.
Interesting on a level, but rarely passing the “so what” test when it comes to understanding the possibilities that exist for embracing sometimes expensive technology options when viewed through the prism of the upside for business and the enhancement of the bottom line. In this article, we will take a completely different perspective.
We will suggest to you that the ONLY reason that you should invest in an ultra-precision motion control technology solution is if there is a real and understandable business case for doing so. We will also attempt to clear the fog. Fog? Well yes! Many technology providers make claims.
Let’s face it, it is simple to say that a motion control technology can do something that it cannot. Many companies offer solutions at entry-level price points suggesting premium-priced functionality, others simply tell untruths or half-truths that flatter to deceive.
“All well and good — classic lines of competitive engagement” you may say. But when working at the cutting edge of ultra-precision engineering, where manufacturers are constantly pushing the envelope and innovating, false claims and counter claims are at best confusing, but at worst lead to disappointment and disillusionment.
Manufacturers miss out on real opportunities because they have sub-optimal experiences with inappropriately positioned technological solutions.
This is good for no-one! It is within this context that this article will focus not just on general motion control issues, but also why one newly introduced motion control option in particular — the Hybrid Hexapod® technology — is disruptive and unique in its ability to open up motion control accuracy that to this point has been impossible to achieve.
Motion Control in Ultra-Precision Engineering When discussing micro manufacturing, precision engineering, and ultra-precision engineering, we are in a relatively undefined environment. What is precision for one company will not be precision for another, and in many instances technologies that are “good enough” when it comes to accuracy and attainment of tolerances are perfectly well suited for many applications.
As they say, you don’t always need a Rolls Royce to get to the shops! But when looking at the area of ultra-precision engineering, we are all working at the bleeding edge of what is possible, where not just microns matter, but sub-micron and nanometer tolerances are an everyday requirement.
This is a world where repeatable reliable precision and motion control not just desirable, it is vital. When looking at motion control in precision and ultra-precision engineering, there are a plethora of alternative technologies, and also an array of options that provide a range of accuracy parameters suitable for different applications.
Let’s start by taking a 6-mile high view of the area of precision motion control options. The burgeoning field of precision motion control is driven by industry demand for technologies that will improve production processes.
The emphasis from across industry is for smarter, smaller, and faster precision motion control and positioning equipment, and demand is especially high in areas like laser micro machining, micro assembly automation, optical inspection, semiconductor metrology, and photonics components test and alignment applications.
We are working at the cutting edge here. For example, finer and faster control of motion is at the heart of super-resolution microscopies and the latest photonics and materials developments.
Like never before, design engineers and motion control engineers from across a host of industry sectors have at their fingertips motion control options that not only achieve what their applications require, but in many instances advance innovation by enabling processes that were previously impossible.
This article will have at its core focus hexapod technologies. In the last 20-25 years, there has been more and more interest in hexapods to cater for the increased demand for micron, and sub-micron level precision in multi-axis motion applications.
Hexapod motion control technology exists at the ultra-precision end of motion control, and it has been the best-in-class motion control solution for exacting industrial applications.
The Hybrid Hexapod® sits at the very top of this ultra-precise tree when it comes to repeatable ultra-precision motion control, and this article will describe why the Hybrid Hexapod® is unique and opens up new levels of innovation and manufacturing efficiency previously considered impossible.
But before looking at the opportunities this unique technology opens up, lets back up a little, and briefly overview a few of the array of alternative motion control solutions that exist today. The General Motion Control Environment In the area of motion control, one-size certainly does not fit all.
As just mentioned, hexapods in general and the Hybrid Hexapod® technology in particular exists where precision means ultra-precision, and such accuracy is not always required. In a three dimensional space, an object can rotate about or translate along and on three axes.
Thus, the object is said to have six degrees of freedom (3 rotational and 3 transitional) More “entry-level” motion control technologies for less exacting applications include precision linear actuators, linear translation stages, and rotation stages, all of which exhibit only one degree of freedom. Hexapod are characterised by 6 degrees of freedom (6DOF) which as we shall see make them appropriate for extremely exacting applications. Precision Linear Actuators.
Many with even a passing interest in motion control will be aware of precision linear actuators — positioning devices that produce motion in one degree of freedom, and usually don’t include a guiding system for the payload.
Typically electrically driven units are the most accurate, and some drive technologies such as electro-mechanical, piezoelectric, and linear motor acuators are capable of producing linear motion.
Such precision linear actuators are designed to deliver high performance in situations that require continuous duty operation, and are often to be found in applications such as value control in vehicle applications and the process and packaging industry, pressing and clamping, edge-guide control, backstop adjust, loading and unloading, and drilling, welding, gluing or thermoforming.
Linear Stages. A linear stage or “translation stage” builds on the principles of a linear actuator, but adds a work piece or platform for fixing an application load, or for stacking extra stages to form a multi-axis configuration.
The stage’s workpiece is a precision component with a linear bearing for guidance. Linear stages consist of a platform that moves relative to a base. The platform and base are joined by some form of guide that restricts motion of the platform to only one dimension.
A variety of different styles of guides are used, each with benefits and drawbacks making each guide type more appropriate for some applications than for others.
Roller guides, for example, are inexpensive, but are relatively low accuracy, have a relatively short life span and can be found in optics lab stages and drawer slides. Flexures, however, are a different kettle of fish, have excellent accuracy, there is no backlash, and they last pretty much forever, and are extensively used in optic fiber alignment applications.
Rotation Stages. Rotary stages again only exhibit one degree of freedom, and comprise of a platform that rotates relative to a base. The base and platform are joined by bearings that restrict motion of the platform to rotation about a single axis.
Precision motorized rotation stages are frequently used in bio-medical applications, or for semiconductor inspection, assessment of fiber-optical alignment, or X-ray crystallography. Air-bearing rotation stages — generally used for the highest precision and smoothness of motion/velocity — deliver ultra-low runout and wobble, as well as very high resolution and repeatability.
Hexapods and Six Degrees of Freedom For many manufacturers, any of the above mentioned one degree of freedom motion control technologies will afford the required level of precision. In addition there are adaptations of motion control technologies that offer 2 degrees of freedom, 3 degrees of freedom etc… that may also suit applications where micron and and sub-micron accuracy may not be critical.
However, increasingly, industry is demanding greater and greater precision and nanometer accuracy, and when this is the case, such solutions are entirely inappropriate. Enter stage left hexapod motion control solutions.
With hexapod Robots, we are talking motion control technologies that operate with 6DOF, and have characteristics that make them appropriate for the most exacting of industrial applications where micron accuracy is an everyday requirement.
First off, let’s nail what we mean by 6DOF.In it is most simplified definition, 6DOF refers to the specific number of axes that a rigid body is able to move in three dimensional space. It can move up and down, forward and backwards, and left and right (translation), and it can rotate in order to face a different axis (pitch, yaw, and roll).
Hexapod robots are six-legged “parallel-kinematic mechanism” (PKM) motion systems.Most often, they consist of two platforms — a fixed base platform and a second movable platform — which are connected and supported by six independent legs that expand and contract in parallel.
By coordinating the motion of the six legs, the movable platform (and whatever is mounted on it) can move in any direction relative to the base platform. Here we have a compact technology that allows absolute freedom of movement in 3D space.
For manufacturers operating in areas where they demand micron tolerances the hexapod motion control solution has been revolutionary, and today it is used extensively throughout a range of sectors, most notable optics and medical.
But in the world of precision engineering, the quest for better and better and more and more accurate technology solutions is inexorable, and whereas the standard hexapods that abound on the market today satisfactorily service applications where micron motion tolerances are required, as the demand for nanometer requirements expands, standard hexapods cannot keep up.
This is where a new advance has just been made building on the hexapod platform, the Hybrid Hexapod® now unique among all motion control technologies in that it caters for ultra-precision sub-micron applications.
The Trouble with Conventional Hexapod Technology As with any newly introduced disruptive technology, the starting point for ALIO Industries (creator of the Hybrid Hexapod®) was to listen to and respond to customer demand.
ALIO — along with a number of highly skilled and reputable companies in this space — has a long pedigree in the supply of standard “micron” tolerance hexapods. But increasingly, industry began to articulate concerns about the limitations of hexapods for their more exacting applications.
OK, so now here comes the technical bit, but we will keep it simple. There are performance limitations inherent in all “conventional” hexapod designs. All hexapod motion systems operate within three-dimensional space, and have errors in all six degrees of freedom.
However, hexapod motion systems have typically only been characterized by performance data of a single degree of freedom.This practice leaves error sources unaccounted for in several degrees of freedom, especially in the areas of flatness and straightness, which are critical precision needs at the nanometer level.
The hexapod’s best flatness and straightness of travel is still no more precise than in the order of magnitude of tens of microns per axis.
Because hexapods have six independently controlled links joined together moving a common platform, the motion error of the platform will be a function of the errors of ALL links and joints.
Hexapods are known to have optimum accuracy and repeatability when performing Z-axis moves, because all links perform the same motion at the same relative link angle.
However, when any other X, Y, pitch, yaw or roll motion is commanded, accuracy and geometric path performance of the hexapod degrades substantially because all links are performing different motions.
In the case of legacy hexapods built with non-precision joints and motion controllers that are not capable of forward and inverse kinematics equations, the source of error is even more pronounced.
Furthermore, it is generally accepted that hexapods have relatively good stiffness compared to serial stacked multi-axis systems. However, it is often only the hexapod’s “Z” (vertical) stiffness that is considered.
Geometric design stiffness has a critical impact on and hexapod’s platform repeatability and rigidity. A lack of design stiffness relates directly to a weak XY plane stiffness with the conventional hexapod working platform.
Moreover, this inherent design flaw of the conventional hexapod negatively affects XY axis performance, especially with thermal bonding or machining applications that require more force to be performed accurately within the XY plane.
While there are compensation methods to reduce error sources in conventional 6-link hexapods, they do not improve performance at the single-digit micron or nanometer level.
Motion systems’ straightness and repeatability performance must be analyzed and specified using a “point precision” methodology that accounts for ALL 6-D spatial errors in order to provide a true representation of nanometer precision, or what we can call “True Nano” precision.
The Hybrid Hexapod® The Hybrid Hexapod® was developed to address the critical weaknesses of conventional legacy hexapod designs as outlined above, as well as the weaknesses of stacked serial stages, and to achieve nanometer accuracy, repeatability, and high-integrity flatness and straightness during motion.
The name Hybrid Hexapod® is indicative of a 6DOF function motion positioning system constructed of a hybrid serial and parallel kinematic structure, rather than a six-link pure parallel kinematic design structure seen in traditional hexapods. It utilizes a tripod parallel kinematics structure to deliver Z plane and tip/tilt motion, integrated with a monolithic serial kinematic structure for XY motion.
A rotary stage integrated into the top of the tripod (or underneath it depending on application needs) provides 360-degree continuous yaw rotation.In this hybrid design, individual axes can be customized to provide travel ranges from millimeters to over one meter, while maintaining nanometer levels of precision.
We started this article by saying that all information provided had to pass the “so-what” test, while at the same time elevating the value of ultra-precision motion control systems from a necessary evil to a truly disruptive enabling technology.
As an engineer working at the cutting edge of what is possible, you must be stimulated to ask more as you see that this technology reaches places others cannot, has the potential to promote innovations, and will optimise your efficiency and cost-effectiveness in manufacture. At this stage, motion control articles typically disappear into pages of equations and descriptions of mathematical models that “prove” the working of the technology and how it measures up to alternatives.
Instead, we will round things up by summarising what the Hybrid Hexapod® opens up for you, answer your “so what” questions, and hopefully whet your appetite to ask more. (At some point you may well need a purely technical discussion, and we are fully equipped to oblige, but for now, let’s detail the opportunities that are now open to you.) Stimulating Innovation Let’s make one thing clear from the get go.
Conventional hexapods are a great technology, but as is the case in all industry sectors, things move on, and pioneers in ultra-precision engineering are continually adding to the palette of technology options available to engineers. If you are happy with micron accuracy a traditional hexapod may serve you well.
But the Hybrid Hexapod® provides orders of magnitude improvements in precision, path performance, speed, stiffness, and larger work envelope with virtually unlimited XY travel, and fully programmable tool center point locations at the same price point as normal hexapods.
So saying, while it achieves less than 100 nm 3-dimensional 6 axis point precision repeatability, (making it an essential technology for sub-micron mission critical applications in the laser processing, optical inspection, photonics, semiconductor, metrology, and medical device sectors — and indeed all micro-machining projects) it also arguably provides an obvious alternative to a conventional hexapod for micron tolerance applications.
Returning to our motoring analogy earlier in this article, you may not always need a Rolls Royce to go to the shops, but if you can go in a Rolls Royce to pick up the burger buns for the same price as a going on a push bike, why wouldn’t you? As an engineer, the Hybrid Hexapod® is now forcing you as a professional working in the ultra-precision engineering space to look outside the box, raise your eyes to new horizons, recognise that there is now a new generation of ultra-precision motion control technology that allows you to achieve engineering goals you considered were previously impossible.
The precision and ultra-precision engineering world has a history of such quantum changes, technologies in the area of plastic molding now allowing the manufacture of dust-speck sized components, metrology options allowing the measurement of previously impossible geometries and details, and new machining technologies achieving the manufacture of seemingly impossibly precise and complex parts and components.
The Hybrid Hexapod® adds advances in motion control to that list. Engineers and manufacturers now need to look at their applications and achievement of tolerance parameters through the following prism, and innovate and create without restriction.
You can now use a motion control technology that due to the use of high-dynamic non-contact linear motors can achieve velocities from microns per second to hundreds of millimetres per second; 1-2 orders of magnitude better bi-directional repeatability when compared with conventional hexapods; nanometer level step sizes; no backlash; no hysteresis; smoother, straighter, flatter motion; and a mean time between failures of over 80,000 hours! In the world of 6DOF nanotechnology applications, the Hybrid Hexapod® technology allows for the provision of documented proof of performance over all six degrees of freedom of a body in motion at the nanometer level of precision.
As such it is unique, and this is the first time that this has been possible. We now see leading blue-chip OEMs working on nanometer applications in the optical, semiconductor, manufacturing, metrology, laser processing and micro-machining sectors, and achieving successes previously unattainable.
There are times when technological advancements are such that they necessitate a root and branch change in the language and nature of discussion associated with them.
When electricity became available in every home, it would have been somewhat perverse if we had all continued to talk in terms of our preferred candles rather than the relative luminescence and longevity of various forms of light bulb. Likewise, when the car began to emerge, and eventually replaced the horse and cart as the most efficient form of transportation, the discussion logically switched from the best hay to feed the horse to the merits of different forms of internal combustion.
Without stretching this analogy to breaking point, there is a similar shift in the area of motion control. A new technology has emerged that pushes the boundaries of what is deemed possible in terms of precision to such an extent that the language surrounding the technology has to change, and the nature of the conversation needs to shift in order to differentiate this new technology from standard industry alternatives.
The technology in question is the Hybrid HexapodTM from ALIO Industries, Arvada, CO, USA. We are in blue ocean territory here. In the last 20-25 years, there has been more and more interest in hexapods to cater for the increased demand for micron, and sub-micron level precision in multi-axis motion applications.
Hexapod motion control technology exists at the ultra-precision end of motion control, and it has been the best-in-class motion control solution for exacting industrial applications for a couple of decades.
The burgeoning area of more and more precise motion control is driven by industry demand for technologies that will improve production processes. The emphasis from across industry is for smarter, smaller, and faster precision motion control and positioning equipment, and demand is especially high in areas like laser micro machining, micro assembly automation, optical inspection, semiconductor metrology, and photonics components test and alignment applications.
The Hybrid HexapodTM represents a quantum step forward in motion control, and for the first time provides the ability to achieve repeatable nano-level accuracy, stimulating innovation and promoting manufacturing efficiency previously considered impossible. It is redefining the area of precision motion control, and the rule book is having to be rewritten to accommodate it and to position it correctly against industry alternatives. One key area for focus is how motion control process suppliers describe the level of precision achievable. Standard industry vernacular talks in terms of micron and sub-micron precision, but ALIO is now working with NIST to move to a new and more effective methodology of measuring and quantifying motion systems by introducing the concept of Point PrecisionTM.
What Does Precision Mean? Really Mean? The very nature of the word precision is vague. Readers will be used to hearing descriptions using phrases such as “precise” and “ultra-precise”. Also, you will be used to reading claims of achievable “resolution”. But what does resolution really mean and what does it tell you? In the area of motion control the focus should and must be on much more exacting criteria, by which we mean repeatability and accuracy.
Precision is actually synonymous with repeatability and accuracy, but too often suppliers hide deficiencies in these areas behind meaningless phrases such as precision, high accuracy, high precision, or ultra-precision When looking at the Hybrid HexapodTM, “precision” means 10 nanometers or less — repeatably! For standard Hexapods claims of precision are best condition, unidirectional one axis numbers, which don’t factor all six-axis error quotients or the backlash, which is the total error of all motion in a Hexapod due to the compression and tension of each leg for every move.Claims made for conventional hexapods may be designed to look like a similar duck to claims made by real nanometer accurate motion control solutions, but from the perspective of Point PrecisionTM they do not quack in nanometers but tens of microns.
Unless the word precision is accompanied by such quantifiable and definite statements in terms of what is achievable, it is truly meaningless. While still vague, micron, sub-micron, and nano precision is better. It at east gives an illusion to the level of precision that is being claimed.
Point PrecisionTM — The New Gold Standard The language used can be seen to be deficient, it is not being refined enough and evolving quickly enough to help differentiate available motion control solutions. So saying, ALIO Industries has introduced the concept of Point PrecisionTM which has now been adopted by NIST as the future standard methodology of measuring and quantifying motion systems.
Point PrecisionTM includes all 6 degrees of freedom of errors of each axis in motion, guaranteeing the precision point in the full work envelop. (As an example, the ALIO patented Hybrid HexapodTM has a 3D point precision of less than 100 nm repeatability anywhere in its full work zone. With that information a customer with, for example, a demanding metrology application can be extremely confident in their uncertainty measurement error quotient.)
Point PrecisionTM allows for a “precision number” to be quoted based on an exact point on the wall (as if you used a laser pointer) whereas today’s standard only gives the measurement to the wall as if using a flood light. As a signifier of accuracy and precision today, Point PrecisionTM truly is a must for many applications from laser processing to metrology.
We exist in a world where alternative suppliers are unable to match the precision of ALIO’s motion control solutions. The key is not just an ability to be nano precise, but to be nano precise repeatably. For some suppliers this is impossible, and so we see either false claims or illusory claims often hidden behind the veneer of meaningless phrases such as ultra-precise and high resolution.
Some even go as far as to publish “Typical Specifications” and “Guaranteed Specifications”. Typical specifications show what “could” be possible in a motion control solution, and allude to much greater precision than the guaranteed specifications, which is what the supplier will — obviously — “guarantee”. In other words, they show what they would like to be able to do repeatably, and then show that what they can actually do which is less good. They aspire to be better than they are. It may indeed be fair to say that they aspire to be as precise as ALIO. Unclear claims and false claims help no-one, especially the customer who often ends up with sub-optimal results.
This is why ALIO has moved the conversation along, and in terms of specifications we have changed the language and now routinely talk about Point PrecisionTM, referencing performance specifications to a point in space, not the planar methodology current standards use.
This is the basis of the new NIST standard for measuring motion systems mentioned above. While there are compensation methods to reduce error sources in conventional 6-link hexapods, they do not improve performance at the single-digit micron or nanometer level.Motion systems’ straightness and repeatability performance must be analyzed and specified using a “point precision” methodology that accounts for ALL 6-D spatial errors in order to provide a true representation of nanometer precision, or what ALIO call “True Nano” TM precision.
Point PrecisionTM is the gold standard when customers need to assess the REAL precision of alternative motion control solutions, and reinforces ALIO’s claim to be the ONLY motion control supplier that can provide repeatable nano levels of precision in motion control. Summary There are numerous companies working in the area of micro and nano manufacturing that exist because of a passion to lead and to provide industry with solutions that stimulate innovation and advance the chances of achieving success in ever more exacting precision engineering applications. By their very nature, they push the boundaries, and strive to provide technology solutions that facilitate greater and greater precision, which is consistently demanded across industry.
However, at the same time, there are numerous companies that follow, and attempt to compete with sub-optimal solutions, either making false claims of competence, or using language that is vague, and does not shine a light in a meaningful way on the levels of precision that can be achieved. It is the customer base that suffers from such lack of clarity and obfuscation. ALIO has adopted a new approach to address the lack of clarity that exists specifically in the area of motion control solutions. The company is independently acknowledged as the only supplier that can manufacture repeatable nano-level accurate motion control solutions, and through a process of education and redefining the language used to explain its technologies, ALIO will give industry the tools and understanding to differentiate between the alternative levels of accuracy and repeatability that exist in the market today.
The creation with NIST of the Point PrecisionTM as the future standard methodology of measuring and quantifying motion systems, ALIO is exemplifying the uniqueness of its motion control solutions in the area of nanometer precision, and as would be expected of a company at the bleeding edge of innovation in 6-D Nano PrecisionTM motion control, is leading and changing the conversation.
Claims made for conventional hexapods may be designed to look like a similar duck to claims made by real nanometer accurate motion control solutions, but from the perspective of Point PrecisionTM they do not quack in nanometers but tens of microns. Unless the word precision is accompanied by such quantifiable and definite statements in terms of what is achievable, it is truly meaningless. While still vague, micron, sub-micron, and nano precision is better. It at east gives an illusion to the level of precision that is being claimed.
Point PrecisionTM — The New Gold Standard The language used can be seen to be deficient, it is not being refined enough and evolving quickly enough to help differentiate available motion control solutions. So saying, ALIO Industries has introduced the concept of Point PrecisionTM which has now been adopted by NIST as the future standard methodology of measuring and quantifying motion systems.
Point PrecisionTM includes all 6 degrees of freedom of errors of each axis in motion, guaranteeing the precision point in the full work envelop. (As an example, the ALIO patented Hybrid HexapodTM has a 3D point precision of less than 100 nm repeatability anywhere in its full work zone. With that information a customer with, for example, a demanding metrology application can be extremely confident in their uncertainty measurement error quotient.) Point PrecisionTM allows for a “precision number” to be quoted based on an exact point on the wall (as if you used a laser pointer) whereas today’s standard only gives the measurement to the wall as if using a flood light. As a signifier of accuracy and precision today, Point PrecisionTM truly is a must for many applications from laser processing to metrology.
We exist in a world where alternative suppliers are unable to match the precision of ALIO’s motion control solutions. The key is not just an ability to be nano precise, but to be nano precise repeatably. For some suppliers this is impossible, and so we see either false claims or illusory claims often hidden behind the veneer of meaningless phrases such as ultra-precise and high resolution. Some even go as far as to publish “Typical Specifications” and “Guaranteed Specifications”. Typical specifications show what “could” be possible in a motion control solution, and allude to much greater precision than the guaranteed specifications, which is what the supplier will — obviously — “guarantee”. In other words, they show what they would like to be able to do repeatably, and then show that what they can actually do which is less good. They aspire to be better than they are. It may indeed be fair to say that they aspire to be as precise as ALIO. Unclear claims and false claims help no-one, especially the customer who often ends up with sub-optimal results.
This is why ALIO has moved the conversation along, and in terms of specifications we have changed the language and now routinely talk about Point PrecisionTM, referencing performance specifications to a point in space, not the planar methodology current standards use. This is the basis of the new NIST standard for measuring motion systems mentioned above. While there are compensation methods to reduce error sources in conventional 6-link hexapods, they do not improve performance at the single-digit micron or nanometer level.Motion systems’ straightness and repeatability performance must be analyzed and specified using a “point precision” methodology that accounts for ALL 6-D spatial errors in order to provide a true representation of nanometer precision, or what ALIO call “True Nano” TM precision.
Point PrecisionTM is the gold standard when customers need to assess the REAL precision of alternative motion control solutions, and reinforces ALIO’s claim to be the ONLY motion control supplier that can provide repeatable nano levels of precision in motion control. Summary There are numerous companies working in the area of micro and nano manufacturing that exist because of a passion to lead and to provide industry with solutions that stimulate innovation and advance the chances of achieving success in ever more exacting precision engineering applications. By their very nature, they push the boundaries, and strive to provide technology solutions that facilitate greater and greater precision, which is consistently demanded across industry.
However, at the same time, there are numerous companies that follow, and attempt to compete with sub-optimal solutions, either making false claims of competence, or using language that is vague, and does not shine a light in a meaningful way on the levels of precision that can be achieved. It is the customer base that suffers from such lack of clarity and obfuscation. ALIO has adopted a new approach to address the lack of clarity that exists specifically in the area of motion control solutions. The company is independently acknowledged as the only supplier that can manufacture repeatable nano-level accurate motion control solutions, and through a process of education and redefining the language used to explain its technologies, ALIO will give industry the tools and understanding to differentiate between the alternative levels of accuracy and repeatability that exist in the market today.
The creation with NIST of the Point PrecisionTM as the future standard methodology of measuring and quantifying motion systems, ALIO is exemplifying the uniqueness of its motion control solutions in the area of nanometer precision, and as would be expected of a company at the bleeding edge of innovation in 6-D Nano PrecisionTM motion control, is leading and changing the conversation.
When electricity became available in every home, it would have been somewhat perverse if we had all continued to talk in terms of our preferred candles rather than the relative luminescence and longevity of various forms of light bulb. Likewise, when the car began to emerge, and eventually replaced the horse and cart as the most efficient form of transportation, the discussion logically switched from the best hay to feed the horse to the merits of different forms of internal combustion.
Without stretching this analogy to breaking point, there is a similar shift in the area of motion control. A new technology has emerged that pushes the boundaries of what is deemed possible in terms of precision to such an extent that the language surrounding the technology has to change, and the nature of the conversation needs to shift in order to differentiate this new technology from standard industry alternatives. The technology in question is the Hybrid HexapodTM from ALIO Industries, Arvada, CO, USA. We are in blue ocean territory here. In the last 20-25 years, there has been more and more interest in hexapods to cater for the increased demand for micron, and sub-micron level precision in multi-axis motion applications. Hexapod motion control technology exists at the ultra-precision end of motion control, and it has been the best-in-class motion control solution for exacting industrial applications for a couple of decades.
The burgeoning area of more and more precise motion control is driven by industry demand for technologies that will improve production processes. The emphasis from across industry is for smarter, smaller, and faster precision motion control and positioning equipment, and demand is especially high in areas like laser micro machining, micro assembly automation, optical inspection, semiconductor metrology, and photonics components test and alignment applications.
The Hybrid HexapodTM represents a quantum step forward in motion control, and for the first time provides the ability to achieve repeatable nano-level accuracy, stimulating innovation and promoting manufacturing efficiency previously considered impossible. It is redefining the area of precision motion control, and the rule book is having to be rewritten to accommodate it and to position it correctly against industry alternatives. One key area for focus is how motion control process suppliers describe the level of precision achievable. Standard industry vernacular talks in terms of micron and sub-micron precision, but ALIO is now working with NIST to move to a new and more effective methodology of measuring and quantifying motion systems by introducing the concept of Point PrecisionTM.
What Does Precision Mean? Really Mean? The very nature of the word precision is vague. Readers will be used to hearing descriptions using phrases such as “precise” and “ultra-precise”. Also, you will be used to reading claims of achievable “resolution”. But what does resolution really mean and what does it tell you? In the area of motion control the focus should and must be on much more exacting criteria, by which we mean repeatability and accuracy. Precision is actually synonymous with repeatability and accuracy, but too often suppliers hide deficiencies in these areas behind meaningless phrases such as precision, high accuracy, high precision, or ultra-precision When looking at the Hybrid HexapodTM,
“precision” means 10 nanometers or less — repeatably! For standard Hexapods claims of precision are best condition, unidirectional one axis numbers, which don’t factor all six-axis error quotients or the backlash, which is the total error of all motion in a Hexapod due to the compression and tension of each leg for every move.Claims made for conventional hexapods may be designed to look like a similar duck to claims made by real nanometer accurate motion control solutions, but from the perspective of Point PrecisionTM they do not quack in nanometers but tens of microns. Unless the word precision is accompanied by such quantifiable and definite statements in terms of what is achievable, it is truly meaningless. While still vague, micron, sub-micron, and nano precision is better. It at east gives an illusion to the level of precision that is being claimed.
Point PrecisionTM — The New Gold Standard The language used can be seen to be deficient, it is not being refined enough and evolving quickly enough to help differentiate available motion control solutions. So saying, ALIO Industries has introduced the concept of Point PrecisionTM which has now been adopted by NIST as the future standard methodology of measuring and quantifying motion systems.
Point PrecisionTM includes all 6 degrees of freedom of errors of each axis in motion, guaranteeing the precision point in the full work envelop. (As an example, the ALIO patented Hybrid HexapodTM has a 3D point precision of less than 100 nm repeatability anywhere in its full work zone. With that information a customer with, for example, a demanding metrology application can be extremely confident in their uncertainty measurement error quotient.)
Point PrecisionTM allows for a “precision number” to be quoted based on an exact point on the wall (as if you used a laser pointer) whereas today’s standard only gives the measurement to the wall as if using a flood light. As a signifier of accuracy and precision today, Point PrecisionTM truly is a must for many applications from laser processing to metrology. We exist in a world where alternative suppliers are unable to match the precision of ALIO’s motion control solutions. The key is not just an ability to be nano precise, but to be nano precise repeatably. For some suppliers this is impossible, and so we see either false claims or illusory claims often hidden behind the veneer of meaningless phrases such as ultra-precise and high resolution.
Some even go as far as to publish “Typical Specifications” and “Guaranteed Specifications”. Typical specifications show what “could” be possible in a motion control solution, and allude to much greater precision than the guaranteed specifications, which is what the supplier will — obviously — “guarantee”. In other words, they show what they would like to be able to do repeatably, and then show that what they can actually do which is less good. They aspire to be better than they are. It may indeed be fair to say that they aspire to be as precise as ALIO. Unclear claims and false claims help no-one, especially the customer who often ends up with sub-optimal results.
This is why ALIO has moved the conversation along, and in terms of specifications we have changed the language and now routinely talk about Point PrecisionTM, referencing performance specifications to a point in space, not the planar methodology current standards use. This is the basis of the new NIST standard for measuring motion systems mentioned above. While there are compensation methods to reduce error sources in conventional 6-link hexapods, they do not improve performance at the single-digit micron or nanometer level.Motion systems’ straightness and repeatability performance must be analyzed and specified using a “point precision” methodology that accounts for ALL 6-D spatial errors in order to provide a true representation of nanometer precision, or what ALIO call “True Nano” TM precision.
Point PrecisionTM is the gold standard when customers need to assess the REAL precision of alternative motion control solutions, and reinforces ALIO’s claim to be the ONLY motion control supplier that can provide repeatable nano levels of precision in motion control. Summary There are numerous companies working in the area of micro and nano manufacturing that exist because of a passion to lead and to provide industry with solutions that stimulate innovation and advance the chances of achieving success in ever more exacting precision engineering applications. By their very nature, they push the boundaries, and strive to provide technology solutions that facilitate greater and greater precision, which is consistently demanded across industry.
However, at the same time, there are numerous companies that follow, and attempt to compete with sub-optimal solutions, either making false claims of competence, or using language that is vague, and does not shine a light in a meaningful way on the levels of precision that can be achieved. It is the customer base that suffers from such lack of clarity and obfuscation. ALIO has adopted a new approach to address the lack of clarity that exists specifically in the area of motion control solutions. The company is independently acknowledged as the only supplier that can manufacture repeatable nano-level accurate motion control solutions, and through a process of education and redefining the language used to explain its technologies, ALIO will give industry the tools and understanding to differentiate between the alternative levels of accuracy and repeatability that exist in the market today.
The creation with NIST of the Point PrecisionTM as the future standard methodology of measuring and quantifying motion systems, ALIO is exemplifying the uniqueness of its motion control solutions in the area of nanometer precision, and as would be expected of a company at the bleeding edge of innovation in 6-D Nano PrecisionTM motion control, is leading and changing the conversation.
In response to the demand from industry for more and more versatile and accurate motion control systems, market-leader ALIO Industries has just received a US patent on the next generation Hybrid Hexapod® technology which out performs any other Hexapod solution in the market. The Hybrid Hexapod® is a game-changer in the field of motion control, and will stimulate innovation as an enabler of next-generation manufacturing processes.
Hexapods have a long history in motion control applications, but in recent years traditional 6 Degree of Freedom (6-DOF) positioning devices have been found wanting when confronted with the industry demand for higher accuracy, improved repeatability, and better geometric performance. Simply speaking, hexapods are devices where six links or actuators (that extend and retract) join a stationary bottom plate with a top plate that performs coordinated motion in 6-DOF.
A sample, fixture, sensor, or any device can be mounted on the top plate and can be manipulated to be in any location and orientation in the available range of travel In complex applications where high precision, 6-DOF motion is required, a hexapod is the go-to solution due to its compact size and the fact that it is more reliable than serial stacked stages with their inherent stack-up of errors, alignment difficulties, and cable management issues.
With the exponential demand across industry for sub-micron levels of miniaturization and the requirements for process applications motion systems that move from micro to nano levels of precision, traditional hexapods cannot achieve the desired results.
This is due to performance limitations inherent in traditional hexapod designs that require the accurate coordination of the movement of all six axes to accomplish a motion profile, even if the requirement is only for a simple single-axis motion. In addition, despite the fact that the general perception is that hexapods exhibit good stiffness compared to serial stacked multi-axis systems, this is really only in the vertical “z” axis, with weaknesses in the “xy” plane.
ALIO’s Hybrid Hexapod® takes a different approach to traditional 6 Degree of Freedom (6-DOF) positioning devices, and exhibits much higher performance at extremely competitive prices.Rather than 6 independent legs (and 12 connection joints) ALIO’s approach combines a precision XY monolithic stage, tripod, and continuous rotation theta-Z axis to provide superior overall performance.
The combination of serial and parallel kinematics at the heart of ALIO’s 6-D Nano Precision® stages renders traditional hexapod kinematics obsolete, with orders-of-magnitude improvements in precision, path performance, speed, stiffness and a larger work envelope with virtually unlimited XY travel, and fully programmable tool center point locations.
ALIO’s Hybrid Hexapod® has less than 100 nm 3-Dimensional 6 axis Point Precision® repeatability, making it an essentialtechnology for mission critical applications in the laser processing, optical inspection, photonics, semiconductor, metrology, and medical device sectors, and indeed all micro-machining projects.
A major photonics customer recently commented; “We demanded an NDA to ensure ALIO does not even mention our company since the ALIO Hybrid Hexapod® is a game changer in our industry”. With multiple Hybrid Hexapods in service, the high expectations of this customer have been exceeded.
As the world’s ONLY motion control system supplier that can boast true nanometer level accuracy and repeatability, ALIO Industries presents its new corporate video, now featuring on the home page of the company’s newly created website. ALIO is synonymous with passion in motion control solutions!
Every member of the ALIO team is characterised by dedication and integrity. We are defined by our customers’ success, dedicated to the provision of optimized solutions within budget and on time. We focus ONLY on customer satisfaction, integrity meaning that every project we work on is characterized by an honest, pragmatic and collaborative working relationship with you. By doing this we add real and tangible value to your business. We are proud to release our new corporate video which we think shows our culture and capabilities.
We focus ONLY on customer satisfaction, integrity meaning that every project we work on is characterized by an honest, pragmatic and collaborative working relationship with you. By doing this we add real and tangible value to your business. We are proud to release our new corporate video which we think shows our culture and capabilities.
Extreme precision is our absolute focus. ALIO has existed at the cutting-edge of precision motion control for its entire 18-year history, so we own the space that other suppliers are trying to migrate to from the micron world of precision. We live and breath nanometer-level precision, it is ALL we know. In our world-class facilities, our exceptional team consistently manufacture ultra-precise motion control solutions that exceed customer expectations.
At ALIO, we nurture the fundamental meaning of partnership. Results are always better when knowledge is openly shared throughout a team, and this also allows us be creative and find practical motion control solutions for any application. We think our new corporate video exactly describes our position at the cutting edge of nanometer-level motion control.
翻译由我们中国区合作伙伴Aunion Tech Co., Ltd（上海昊量光电设备有限公司）家提供！
