ALIO Nano Precision 6-Axis Metrology System – Air Bearing Stage and Hybrid Hexapod

ALIO’s patent pending Hybrid Hexapod® customized for large volume 6 axis Nano Metrology® System with G-Code motion programming. Hybrid Hexapod® with an air bearing X axis performs 6-D Nano Precision® over a large envelope for metrology applications. ALIO is proud to be the reference system for the world’s major high end metrology companies.

View our Air Bearing Systems here

View our Metrology Applications here