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Nano Precision® Motion Systems

ALIO Designs and Manufacturers Proprietary Robotic Devices and Tools that Enable Precise Nano-Scale Movements for Manufacturing and Research & Development.

Products Include Hexapods, Air Bearings, Linear & Rotary Atmospheric and Vacuum Systems.

NANO PRECISION LINEAR MOTION STAGES

  • Nanometer Level Precision
  • Linear Servo Motor Stages

MICRON 2 PRECISION LINEAR MOTION STAGES

  • Micron-Level Positioning Stages
  • Ball-Rail Systems
  • Long Travel Systems

 Z-LIFT AND VERTICAL AXIS MOTION STAGES

  • Vertical Motion
  • GeoSymetric™ Vertical Stages
  • NANO Z® Air Bearing Lift
  • NANO Z® Linear Servo

ROTARY MOTION STAGES

  • Servo Torque Motor Stages

Cartesian Gantries

  • Cartesian Robots
  • Industrial Robots
  • Gantry Assemblies with Tool-Handling Options

Air Bearing Systems

  • Planar Air Bearing System
  • Linear Air Bearing System
  • Rotary Air Bearing Stage
  • Z Air Bearing Stage

ALIO CUSTOM SOLUTIONS

  • Application-Specific Systems
  • Custom Designed Products
  • OEM-Platforms
  • Integrated Sub-Assemblies