Welcome to the ALIO Industries Product Configurator. Here you can find each individual product which ALIO manufactures for your motion control needs. Filter your results and find the perfect solution for your application.
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 60 mm (+/- 30 mm) Payload Capacity: 20 kg Bidirectional Repeatability: +/- 30 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 100 mm (+/- 50 mm) Payload Capacity: 30 kg
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 150mm (+/- 75mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 75 nm / +/- 45 nm
Stage: Hybrid Hexapod (6 DOF) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 100 mm (+/- 50 mm) Z = 12 mm (+ 12 mm/- 0 mm) Payload Capacity: 2.5 kg Bidirectional Repeatability: Click to view
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 250 mm (+ /-125 mm) Payload Capacity: 40 kg Bidirectional Repeatability: +/- 30 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 400 mm (+/- 200 mm) Payload Capacity: 30 kg
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 400 mm (+/- 200 mm) Payload Capacity: 60kg
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 600 mm (+/- 300 mm) Payload Capacity: 60kg
Stage: Monolithic XY Stage with Open Center Motion Type: Linear Motion Systems Direction: X and Y Travel: 250 mm (+/- 125 mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 50 nm
Stage: Monolithic XY Stage with Open Center Motion Type: Linear Motion Systems Direction: X and Y Travel: 150 mm (+/- 75 mm) Payload Capacity: 12 kg Bidirectional Repeatability: +/- 50 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 50 mm (+/- 25 mm) Payload Capacity: 60kg
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 60 mm (+/- 30 mm) Payload Capacity: 10 kg Bidirectional Repeatability: +/- 30 nm
Stage: Enclosed Monolithic XY Motion Type: Linear Motion Systems Direction: X and Y Travel: 450 mm (+/- 225 mm) Payload Capacity: 80 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 200 mm (+/- 100 mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 30 nm
Stage: Enclosed Monolithic XY Motion Type: Linear Motion Systems Direction: X and Y Travel: 350 mm (+/- 175 mm) Payload Capacity: 50 kg Bidirectional Repeatability: +/- 30 nm
Stage: Monolithic XY Stage (Asymmetrical) Motion Type: Linear Motion Systems Direction: X and Y Travel: X - 300 mm (+/- 150 mm) | Y - 200 mm (+/- 100 mm) Payload Capacity: 30 kg Bidirectional Repeatability: +/- 30 nm
Stage: Monolithic XY Stage with Open Center Motion Type: Linear Motion Systems Direction: X and Y Travel: 350 mm (+/- 175 mm) Payload Capacity: 50 kg Bidirectional Repeatability: +/- 50 nm
Stage: Monolithic XY Stage Motion Type: Linear Motion Systems Direction: X and Y Travel: 100 mm (+/- 50 mm) Payload Capacity: 12 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 100 mm (+/- 50 mm) Payload Capacity: 12 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 150 mm (+/- 75 mm) Payload Capacity: 12kg (Vertical) - 25kg (Horizontal) Bidirectional Repeatability: +/- 100 nm
Stage: Monolithic XY Stage Motion Type: Linear Motion Systems Direction: X and Y Travel: 60 mm (+/- 30 mm) Payload Capacity: 10 kg Bidirectional Repeatability: +/- 30 nm
Stage: Monolithic XY Stage with Open Center Motion Type: Linear Motion Systems Direction: X and Y Travel: 200 mm (+/- 100 mm) Payload Capacity: 30 kg Bidirectional Repeatability: +/- 50 nm
Stage: Enclosed Monolithic XY Motion Type: Linear Motion Systems Direction: X and Y Travel: 60 mm (+/- 30 mm) Payload Capacity: 20 kg Bidirectional Repeatability: +/- 30 nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 60mm (+/- 30mm) Payload Capacity: 10 kg Bidirectional Repeatability: +/- 75 nm / +/- 45 nm
Stage: Enclosed Monolithic XY Motion Type: Linear Motion Systems Direction: X and Y Travel: 200 mm (+/- 100 mm) Payload Capacity: 30 kg Bidirectional Repeatability: +/- 30 nm
Stage: Hybrid Hexapod (6 DOF) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 300 mm (+/- 150 mm) Z = 106 mm (+ 106 mm/- 0 mm) Payload Capacity: 10 kg Bidirectional Repeatability: Click to view
Stage: Hybrid Hexapod (6 DOF) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 150 mm (+/- 75 mm) Z = 20 mm (+ 20 mm/- 0 mm) Payload Capacity: 5 kg Bidirectional Repeatability: Click to view
Stage: Monolithic XY Stage with Open Center Motion Type: Linear Motion Systems Direction: X and Y Travel: 30 mm (+/- 15 mm) Payload Capacity: 8 kg Bidirectional Repeatability: +/- 50 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 500 mm (+/- 250 mm) Payload Capacity: 30 kg
Stage: Hybrid Hexapod (6 DOF) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 250 mm(+/- 125 mm) Z = 55 mm (+ 55 mm/- 0 mm) Payload Capacity: 5 kg Bidirectional Repeatability: Click to view
Stage: Monolithic XY Stage Motion Type: Linear Motion Systems Direction: X and Y Travel: 150 mm (+/- 75 mm) Payload Capacity: 12 kg Bidirectional Repeatability: +/- 30 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 300 mm (+/- 150 mm) Payload Capacity: 30 kg
Stage: Hybrid Hexapod (6 DOF) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 100 mm (+/- 50 mm) Z = 6 mm (+ 6 mm/- 0 mm) Payload Capacity: 2 kg Bidirectional Repeatability: Click to view
Stage: Monolithic XY Stage (Asymmetrical) Motion Type: Linear Motion Systems Direction: X and Y Travel: X - 160 mm (+/- 80 mm) | Y - 100 mm (+/- 50 mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 30 nm
Stage: Enclosed Monolithic XY Motion Type: Linear Motion Systems Direction: X and Y Travel: 400 mm (+/- 200 mm) Payload Capacity: 80 kg Bidirectional Repeatability: +/- 30 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 600 mm (+/- 300 mm) Payload Capacity: 30 kg
Stage: Hybrid Hexapod (Angulares®) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 200 mm (+/- 100 mm) Z = 62 mm (+ 62 mm/- 0 mm) Payload Capacity: 5 - 10 kg Bidirectional Repeatability: Click to view
Stage: Hybrid Hexapod (Angulares®) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 200 mm (+/- 100 mm) Z = 62 mm (+ 62 mm/- 0 mm) Payload Capacity: 5 kg Bidirectional Repeatability: Click to view
Stage: Monolithic XY Stage with Open Center Motion Type: Linear Motion Systems Direction: X and Y Travel: 300 mm (+/- 150 mm) Payload Capacity: 50 kg Bidirectional Repeatability: +/- 50 nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 32 mm (+/- 16 mm) Payload Capacity: 20 kg (50 kg w/ Pneuboost) Bidirectional Repeatability: +/- 125 nm / +/- 100 nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 6 mm (+/- 3 mm) Payload Capacity: 10 kg Bidirectional Repeatability: +/- 45nm / +/- 75nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 500 mm (+/- 250 mm) Payload Capacity: 60kg
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 30 mm (+/- 15 mm) Payload Capacity: 8 kg Bidirectional Repeatability: +/- 30 nm
Stage: Enclosed Monolithic XY Motion Type: Linear Motion Systems Direction: X and Y Travel: 250 mm (+/- 125 mm) Payload Capacity: 40 kg Bidirectional Repeatability: +/- 30 nm
Stage: Enclosed Monolithic XY Motion Type: Linear Motion Systems Direction: X and Y Travel: 100 mm (+/- 50 mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 30 nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 100mm (+/- 50mm) Payload Capacity: 12 kg Bidirectional Repeatability: +/- 75 nm / +/- 45 nm
Stage: Hybrid Hexapod (6 DOF) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 60 mm (+/- 30 mm) Z = 15 mm (+ 15 mm/- 0 mm) Payload Capacity: 5 kg Bidirectional Repeatability: Click to view
Stage: Hybrid Hexapod (6 DOF) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 300 mm (+/- 150 mm) Z = 206 mm (+ 206 mm/- 0 mm) Payload Capacity: 20 kg Bidirectional Repeatability: Click to view
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 100 mm (+/- 50 mm) Payload Capacity: 12kg (Vertical) - 25kg (Horizontal) Bidirectional Repeatability: +/- 100 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 200 mm (+/- 100 mm) Payload Capacity: 30 kg
Stage: Enclosed Monolithic XY Motion Type: Linear Motion Systems Direction: X and Y Travel: 300 mm (+/- 150 mm) Payload Capacity: 50 kg Bidirectional Repeatability: +/- 30 nm
Stage: Hybrid Hexapod Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 60 mm (+/- 30 mm) Z = 15 mm (+ 15 mm/- 0 mm) Payload Capacity: 5 kg Bidirectional Repeatability: Click to view
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 200 mm (+/- 100 mm) Payload Capacity: 12 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 150 mm (+/- 75 mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 200 mm (+/- 100 mm) Payload Capacity: 12kg (Vertical) - 25kg (Horizontal) Bidirectional Repeatability: +/- 100 nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 24 mm (+ 24 mm/- 0 mm) Payload Capacity: 16 kg Bidirectional Repeatability: +/- 75nm
Stage: Enclosed Monolithic XY Motion Type: Linear Motion Systems Direction: X and Y Travel: 160 mm (+/- 80 mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 30 nm
Stage: Monolithic XY Stage with Open Center Motion Type: Linear Motion Systems Direction: X and Y Travel: 250 mm (+/- 125 mm) Payload Capacity: 40kg Bidirectional Repeatability: +/- 50 nm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 150 mm (+/- 75 mm) Payload Capacity: 12 kg Bidirectional Repeatability: +/- 30 nm
Stage: Monolithic XY Stage Motion Type: Linear Motion Systems Direction: X and Y Travel: 30 mm (+/- 15 mm) Payload Capacity: 8 kg Bidirectional Repeatability: +/- 30 nm
Stage: Hybrid Hexapod (Angulares®) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 60 mm (+/- 30 mm) Z = 62 mm (+ 62 mm/- 0 mm) Payload Capacity: 5 - 10 kg Bidirectional Repeatability: Click to view
Stage: Hybrid Hexapod (6 DOF) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 300 mm (+/- 150 mm) Z = 106 mm (+ 106 mm/- 0 mm) Payload Capacity: 7.5 kg Bidirectional Repeatability: Click to view
Stage: Hybrid Hexapod (6 DOF) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 100 mm (+/- 50 mm) Z = 15 mm (+ 15 mm/- 0 mm) Payload Capacity: 5 kg Bidirectional Repeatability: Click to view
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 300 mm (+/- 150 mm) Payload Capacity: Depending on application - Ask ALIO Bidirectional Repeatability: +/- 30 nm
Stage: Monolithic XY Stage with Open Center Motion Type: Linear Motion Systems Direction: X and Y Travel: 100 mm (+/- 50 mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 50 nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 100mm (+/- 50mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 75 nm / +/- 45 nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 24 mm (+/- 12 mm) Payload Capacity: 10 kg Bidirectional Repeatability: +/- 45nm / +/- 75nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 1000 mm (+/- 500 mm) Payload Capacity: 60kg
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 50 mm (+/- 25 mm) Payload Capacity: 10 kg Bidirectional Repeatability: +/- 45nm / +/- 75nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 50 mm (+/- 25 mm) Payload Capacity: 30 N, 50 N, 60 N, 70 N, 80 N, or 90 N Bidirectional Repeatability: +/- 100 nm / +/- 75 nm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 300 mm (+/- 150 mm) Payload Capacity: 50kg Bidirectional Repeatability: +/- 30 nm
Stage: Monolithic XY Stage with Open Center Motion Type: Linear Motion Systems Direction: X and Y Travel: 400 mm (+/- 200 mm) Payload Capacity: 50 kg Bidirectional Repeatability: +/- 50 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 150 mm (+/- 75 mm) Payload Capacity: 30 kg
Stage: Hybrid Hexapod (6 DOF) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 200 mm (+/- 100 mm) Z = 15 mm (+ 15 mm/- 0 mm) Payload Capacity: 5 kg Bidirectional Repeatability: Click to view
Stage: Monolithic XY Stage Motion Type: Linear Motion Systems Direction: X and Y Travel: 250 mm (+/- 125 mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 60 mm (+/- 30 mm) Payload Capacity: 12kg (Vertical) - 20kg (Horizontal) Bidirectional Repeatability: +/- 100 nm
Stage: Monolithic XY Stage with Open Center Motion Type: Linear Motion Systems Direction: X and Y Travel: 60 mm (+/- 30 mm) Payload Capacity: 10 kg Bidirectional Repeatability: +/- 50 nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 24 mm (+/- 12 mm) Payload Capacity: 20 kg (50 kg w/ Pneuboost) Bidirectional Repeatability: +/- 125 nm / +/- 100 nm
Stage: Hybrid Hexapod Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 200 mm (+/- 100 mm) Z = 60 mm (+ 60 mm/- 0 mm) Payload Capacity: 20 kg Bidirectional Repeatability: Click to view
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 170 mm (+/- 85 mm) Payload Capacity: 20 N, 30 N, 40 N, 50 N, or 60 N Bidirectional Repeatability: +/- 75 nm / +/- 50 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 800 mm (+/- 400 mm) Payload Capacity: 30 kg
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 200mm (+/- 100mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 75 nm / +/- 45 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 50 mm (+/- 25 mm) Payload Capacity: 30 kg
Stage: Monolithic XY Stage with Open Center Motion Type: Linear Motion Systems Direction: X and Y Travel: 150 mm (+/- 75 mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 50 nm
Stage: Monolithic XY Stage (Asymmetrical) Motion Type: Linear Motion Systems Direction: X and Y Travel: X - 395mm | Y - 320mm Payload Capacity: 200 kg Bidirectional Repeatability: +/- 30 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 150 mm (+/- 75 mm) Payload Capacity: 60kg
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 250 mm (+/- 125 mm) Payload Capacity: Depending on application - Ask ALIO Bidirectional Repeatability: +/- 30 nm
Stage: Hybrid Hexapod (Angulares®) Motion Type: Hybrid Hexapods Direction: 3 - 6 Degrees of Freedom Travel: XY = 100 mm (+/- 50 mm) Z = 62 mm (+ 62 mm/- 0 mm) Payload Capacity: 5 - 10 kg Bidirectional Repeatability: Click to view
Stage: Monolithic XY Stage with Open Center Motion Type: Linear Motion Systems Direction: X and Y Travel: 100 mm (+/- 50 mm) Payload Capacity: 12 kg Bidirectional Repeatability: +/- 50 nm
Stage: Monolithic XY Stage with Open Center Motion Type: Linear Motion Systems Direction: X and Y Travel: 200 mm (+/- 100 mm) Payload Capacity: 15 kg Bidirectional Repeatability: +/- 50 nm
Stage: Box Rail Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 1000 mm (+/- 500 mm) Payload Capacity: 100kg
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 200 mm (+/- 100 mm) Payload Capacity: 60kg
Stage: Enclosed Monolithic XY Motion Type: Linear Motion Systems Direction: X and Y Travel: 30 mm ( +/- 15 mm) Payload Capacity: 10 kg Bidirectional Repeatability: +/- 30 nm
Stage: Monolithic XY Stage Motion Type: Linear Motion Systems Direction: X and Y Travel: 300 mm (+/- 150 mm) Payload Capacity: 35 kg Bidirectional Repeatability: +/- 30 nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 50 mm (+/- 25 mm) Payload Capacity: 20 kg (50 kg w/ Pneuboost) Bidirectional Repeatability: +/- 125 nm / +/- 100 nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 50 mm (+/- 25 mm) Payload Capacity: 2 N, 8 N, 14 N, 19 N, or 24 N Bidirectional Repeatability: +/- 75 nm / +/- 45 nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 30 mm (+/- 15 mm) Payload Capacity: 10 kg Bidirectional Repeatability: +/- 45nm / +/- 75nm
Stage: Monolithic XY Stage Motion Type: Linear Motion Systems Direction: X and Y Travel: 200 mm (+/- 100 mm) Payload Capacity: 15 kg Bidirectional Repeatability: +/- 30 nm
Stage: Linear Stage Motion Type: Linear Motion Systems Direction: X (or Y) Travel: 100 mm (+/- 50 mm) Payload Capacity: 25 kg Bidirectional Repeatability: +/- 30 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 300 mm (+/- 150 mm) Payload Capacity: 60kg
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 60 mm (+ 60 mm/- 0 mm) Payload Capacity: 20 kg Bidirectional Repeatability: +/- 75 nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 24 mm (+/-12 mm) Payload Capacity: 2 N, 8 N, 14 N, 19 N, or 24 N Bidirectional Repeatability: +/- 75 nm / +/- 45 nm
Stage: Vertical Z Stage Motion Type: Z-Lift & Vertical Stages Direction: Z Travel: 70 mm (+ 70 mm/- 0 mm) Payload Capacity: 30 kg Bidirectional Repeatability: +/- 100 nm
Stage: Air Bearing Linear Stage Motion Type: Air Bearing Systems, Linear Motion Systems Direction: X (or Y) Travel: 800 mm (+/- 400 mm) Payload Capacity: 60kg
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